Gyroscope utilizing torsional springs and optical sensing
First Claim
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1. A gyroscope comprising:
- a microelectromechanical system (MEMS) structure configured to be driven to move about a drive axis, the structure further configured to move about a sense axis in response to a Coriolis force generated by rotation of the structure about a rotational axis while moving about the drive axis; and
an optical sensor system configured to optically measure movement of the structure about the sense axis, wherein the optical sensor system comprises one or more optical fibers configured to irradiate at least a portion of the structure with electromagnetic radiation in a direction of the movement about the sense axis and to receive reflected electromagnetic radiation from the portion of the structure to optically measure the movement of the structure about the sense axis.
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Abstract
A gyroscope and a method of detecting rotation are provided. The gyroscope includes a structure configured to be driven to move about a drive axis. The structure is further configured to move about a sense axis in response to a Coriolis force generated by rotation of the structure about a rotational axis while moving about the drive axis. The structure further includes at least one first torsional spring extending generally along the drive axis and at least one second torsional spring extending generally along the sense axis. The gyroscope further includes an optical sensor system configured to optically measure movement of the structure about the sense axis.
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Citations
29 Claims
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1. A gyroscope comprising:
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a microelectromechanical system (MEMS) structure configured to be driven to move about a drive axis, the structure further configured to move about a sense axis in response to a Coriolis force generated by rotation of the structure about a rotational axis while moving about the drive axis; and an optical sensor system configured to optically measure movement of the structure about the sense axis, wherein the optical sensor system comprises one or more optical fibers configured to irradiate at least a portion of the structure with electromagnetic radiation in a direction of the movement about the sense axis and to receive reflected electromagnetic radiation from the portion of the structure to optically measure the movement of the structure about the sense axis. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. A method of detecting rotation, the method comprising:
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providing a structure configured to be driven to move about a drive axis and to move about a sense axis in response to a Coriolis force generated by rotation of the structure about a rotational axis while moving about the drive axis; driving the structure to move about the drive axis; rotating the structure about the rotational axis while the structure moves about the drive axis; and optically measuring movement of the structure about the sense axis, wherein optically measuring movement of the structure comprises irradiating at least a portion of the structure with electromagnetic radiation from at least one optical fiber, the at least one optical fiber emitting the electromagnetic radiation in a direction of the movement about the sense axis and receiving reflected electromagnetic radiation from the portion of the structure. - View Dependent Claims (15, 16, 17)
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18. A method of fabricating a gyroscope, the method comprising:
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providing a structure configured to be driven to move about a drive axis, the structure further configured to move about a sense axis in response to a Coriolis force generated by rotation of the structure about a rotational axis while moving about the drive axis; and providing an optical sensor system configured to optically measure movement of the structure about the sense axis, wherein the optical sensor system comprises one or more optical fibers configured to irradiate at least a portion of the structure with electromagnetic radiation in a direction of the movement about the sense axis and to receive reflected electromagnetic radiation from the portion of the structure to optically measure the movement of the structure about the sense axis. - View Dependent Claims (19, 20, 21, 22, 23)
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24. A gyroscope comprising:
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a structure configured to be driven to move about a drive axis, the structure further configured to move about a sense axis in response to a Coriolis force generated by rotation of the structure about a rotational axis while moving about the drive axis; and an optical sensor system configured to optically measure movement of the structure about the sense axis, wherein the optical sensor system comprises at least a first optical fiber and a second optical fiber, wherein the first optical fiber is configured to irradiate at least a first portion of the structure with electromagnetic radiation in a direction of the movement about the sense axis and to receive reflected electromagnetic radiation from the first portion of the structure to optically measure the movement of the structure about the sense axis, wherein the first optical fiber and the first portion of the structure form at least a first Fabry-Perot cavity therebetween and the reflected electromagnetic radiation that propagates through the first Fabry-Perot cavity is reflected back to the first optical fiber, wherein the second optical fiber is configured to irradiate at least a second portion of the structure with electromagnetic radiation in the direction of the movement about the sense axis and to receive reflected electromagnetic radiation from the second portion of the structure to optically measure the movement of the structure about the sense axis, wherein the second optical fiber and the second portion of the structure form at least a second Fabry-Perot cavity therebetween and the reflected electromagnetic radiation that propagates through the second Fabry-Perot cavity is reflected back to the second optical fiber. - View Dependent Claims (25)
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26. A method of detecting rotation, the method comprising:
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providing a structure configured to be driven to move about a drive axis and to move about a sense axis in response to a Coriolis force generated by rotation of the structure about a rotational axis while moving about the drive axis; driving the structure to move about the drive axis; rotating the structure about the rotational axis while the structure moves about the drive axis; and optically measuring movement of the structure about the sense axis, wherein optically measuring movement of the structure comprises; irradiating at least a first portion of the structure with electromagnetic radiation from at least a first optical fiber, the first optical fiber emitting the electromagnetic radiation in a direction of the movement about the sense axis and receiving reflected electromagnetic radiation from the first portion of the structure, wherein the first optical fiber and the first portion of the structure form at least a first Fabry-Perot cavity therebetween and the reflected electromagnetic radiation that propagates through the first Fabry-Perot cavity is reflected back to the first optical fiber; and irradiating at least a second portion of the structure with electromagnetic radiation from at least a second optical fiber, the second optical fiber emitting the electromagnetic radiation in the direction of the movement about the sense axis and receiving reflected electromagnetic radiation from the second portion of the structure, wherein the second optical fiber and the second portion of the structure form at least a second Fabry-Perot cavity therebetween and the reflected electromagnetic radiation that propagates through the second Fabry-Perot cavity is reflected back to the second optical fiber. - View Dependent Claims (27, 28, 29)
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Specification