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Two degree of freedom dithering platform for MEMS sensor calibration

  • US 8,887,550 B2
  • Filed: 01/06/2012
  • Issued: 11/18/2014
  • Est. Priority Date: 04/27/2011
  • Status: Active Grant
First Claim
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1. A micro-electromechanical system (MEMS) sensing device, the device comprising:

  • a MEMS sensor formed in a plane of a MEMS sensor layer; and

    at least one rotator configured to dither the MEMS sensor, wherein dithering the MEMS sensor is performed in the plane of the MEMS sensor layer and about an axis in the plane of the MEMS sensor layer, wherein the at least one rotator comprises;

    a first rotor layer, the first rotor layer comprising a first rotor portion connected to the MEMS sensor, wherein the first rotor portion rotates about the axis in the plane of the MEMS sensor layer; and

    a second rotor layer, the second rotor layer comprising a second rotor portion connected to the MEMS sensor, wherein the second rotor portion rotates about the axis in the plane of the MEMS sensor layer.

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