Transducer and method for manufacturing same
First Claim
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1. A transducer which measures a force applied by an analyte being bonded to a surface thereof, comprising:
- a chamber;
a deformation generating portion which classifies the chamber into a first area and a second area, is provided with a bonding layer to be bonded to the analyte at a surface that comes into contact with the first area, and has a perforated member shape including one or more holes that allow the first area and the second area to communicate with each other;
a deformation amount measuring member measuring a deformation amount of the deformation generating portion;
a first liquid which is provided in the first area and includes an analyte; and
a second liquid which is provided in the second area and forms an interface with the first liquid in the vicinity of the holes,wherein elastic deformation is generated in the deformation generating portion when the analyte is bonded to the bonding layer.
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Abstract
The present invention relates to a transducer and a method for manufacturing same, and more particularly, to a transducer and to a method for manufacturing same, in which a first liquid and a second liquid are supplied such that, at the boundary therebetween, a deformation-generating part, including a perforated structure having one or more holes therein, is formed, and the effect of external pressure is negated by the action between the liquids.
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Citations
20 Claims
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1. A transducer which measures a force applied by an analyte being bonded to a surface thereof, comprising:
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a chamber; a deformation generating portion which classifies the chamber into a first area and a second area, is provided with a bonding layer to be bonded to the analyte at a surface that comes into contact with the first area, and has a perforated member shape including one or more holes that allow the first area and the second area to communicate with each other; a deformation amount measuring member measuring a deformation amount of the deformation generating portion; a first liquid which is provided in the first area and includes an analyte; and a second liquid which is provided in the second area and forms an interface with the first liquid in the vicinity of the holes, wherein elastic deformation is generated in the deformation generating portion when the analyte is bonded to the bonding layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A transducer which measures a force applied by an analyte being bonded to a surface thereof, comprising:
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a chamber; a substrate; a deformation generating portion which classifies the chamber into a first area and a second area, is provided with a bonding layer to be bonded to the analyte at a surface that comes into contact with the first area, and has a perforated member shape including one or more holes that allow the first area and the second area to communicate with each other; a deformation amount measuring member measuring a deformation amount of the deformation generating portion; a first liquid which is provided in the first area and includes an analyte; and a second liquid which is provided in the second area and forms an interface with the first liquid in the vicinity of the hole, wherein elastic deformation is generated in the deformation generating portion when the analyte is boned to the bonding layer.
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10. A method of manufacturing a transducer comprising:
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depositing an insulating layer onto a substrate; forming a lower electrode on an upper portion of the insulating layer; forming a sacrificial layer which covers a part of the insulating layer and a part of the lower electrode; forming an upper electrode to extend to an upper portion of the sacrificial layer and to be separated from the lower electrode; forming a deformation generating portion to cover the sacrificial layer; forming a bonding layer on an upper portion of the deformation generating portion; forming a hole which causes the bonding layer, the deformation generating portion, and the upper electrode to simultaneously communicate with each other; and removing the sacrificial layer. - View Dependent Claims (11, 12, 13, 14)
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15. A method of manufacturing a transducer comprising:
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forming a lower electrode on an upper portion of a substrate; forming a sacrificial layer which covers a part of the substrate and a part of the lower electrode; forming an upper electrode to extend to an upper portion of the sacrificial layer and to be separated from the lower electrode; forming a deformation generating portion to cover the sacrificial layer; forming a hole which causes the deformation generating portion and the upper electrode to simultaneously communicate with each other; and removing the sacrificial layer. - View Dependent Claims (16, 17, 18, 19, 20)
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Specification