Reduced capacity carrier and method of use

• US 8,888,433 B2
• Filed: 08/19/2005
• Issued: 11/18/2014
• Est. Priority Date: 08/19/2004
• Status: Active Grant

• Current Assignee: Brooks Automation Ltd. (United Kingdom) (Azenta, Inc.)
• Original Assignee: Brooks Automation Incorporated (Azenta, Inc.)
• Inventors: Gilchrist, Ulysses, Fosnight, William, Hofmeister, Christopher, Friedman, Gerald M., Bufano, Michael L.
• Primary Examiner(s): KEENAN, JAMES W
• Application Number:
  US11/207,231
• Publication Number:
  US 20060088272A1
• Time in Patent Office: 3,378 Days
• Field of Search: 414/217.1
• US Class Current: 414/217.1
• CPC Class Codes: H01L 21/67326 Horizontal carrier comprising wall type elements whereby the substrates are vertically supported, e.g. comprising sidewalls
• CPC Class Codes: H01L 21/67353 specially adapted for a single substrate
• CPC Class Codes: H01L 21/67369 characterised by shock absorbing elements, e.g. retainers or cushions
• CPC Class Codes: H01L 21/67373 characterised by locking systems
• CPC Class Codes: H01L 21/67376 characterised by sealing arrangements
• CPC Class Codes: H01L 21/67383 characterised by substrate supports
• CPC Class Codes: H01L 21/67389 characterised by atmosphere control
• CPC Class Codes: H01L 21/67393 characterised by the presence of atmosphere modifying elements inside or attached to the closed carrierl
• CPC Class Codes: H01L 21/67763 the wafers being stored in a carrier, involving loading and unloading H01L21/6779 takes precedence
• CPC Class Codes: H01L 21/67772 involving removal of lid, door, cover
• CPC Class Codes: H01L 21/67778 involving loading and unloading of wafers
• CPC Class Codes: H01L 21/6779 the workpieces being stored in a carrier, involving loading and unloading
• CPC Class Codes: Y10S 414/139 including wafer charging or discharging means for vacuum chamber

Abstract

A substrate transport apparatus is provided. The apparatus has a casing and a door. The casing is adapted to form a controlled environment therein. The casing has supports therein for holding at least one substrate in the casing. The casing defines a substrate transfer opening through which a substrate transport system accesses the substrate in the casing. The door is connected to the casing for closing the substrate transfer opening in the casing. The casing has structure forming a fast swap element allowing replacement of the substrate from the apparatus with another substrate without retraction of the substrate transport system and independent of substrate loading in the casing.

Claims

1. A substrate transport apparatus comprising:

a casing adapted to form a controlled environment therein, the casing having supports therein each configured for holding a substrate where at least one substrate is held in the casing, and the casing including a load port interface defining a substrate transfer opening through which a substrate transport system accesses the at least one substrate in the casing, the load port interface being a single-plane interface for coupling the casing to a load port such that casing to load port alignment is determined in at least two orthogonal axes by only the single-plane interface, the single-plane interface being arranged substantially perpendicular to the supports; and

a door connected to the casing for closing the substrate transfer opening in the casing;

a controller connected to the casing;

wherein the casing has structure forming a fast swap element allowing replacement of the at least one substrate from the apparatus with another substrate independent of substrate loading in the casing and of substrate handling capacity of the substrate transport apparatus, the fast swap element including

a detector mounted within the casing, the detector being configured to identify at least a location of the at least one substrate within the supports for at least unloading the at least one substrate, and

a case connector communicably connectable to the controller for allowing the controller to register data from the detector regarding the location of the at least one substrate,

the controller being configured to effect substrate replacement with the fast swap element independent of original substrate placement in the supports.

2. The apparatus according to claim 1, wherein the casing has a registration system for registering the apparatus with a load port of the substrate transport system.

3. The apparatus according to claim 2, wherein the substrate transfer opening is located in a side of the casing, and wherein the registration system is located on the same side of the casing.

4. The apparatus according to claim 1, wherein the fast swap element is selectably locatable in the casing.

5. The apparatus according to claim 1, wherein the detector is configured to identify a predetermined characteristic of the at least one substrate in the casing.

6. The apparatus according to claim 5, wherein the detector is a reader for reading an identification indicia of the at least one substrate.

7. The apparatus according to claim 1, wherein the controller is remotely located from the casing.

8. The apparatus according to claim 1, where the controller is configured to effect substrate replacement such that the substrate can be placed in each one of the supports regardless of original placement of the substrate when removed from the casing for processing.

9. A substrate transport apparatus comprising:

a casing adapted to form a controlled environment therein, the casing being sized to hold more than one substrate therein, the casing including a load port interface defining a substrate transfer opening through which substrates are moved in and out of the casing;

a door connected to the casing for closing the substrate transfer opening in the casing;

holding stations located in the casing, each of which is capable of holding a substrate, at least one of the holding stations being a substrate holding station holding the substrate when the transport apparatus is in a loaded condition where at least one substrate is loaded in the substrate apparatus, and at least another of the holding stations is arranged so that it is capable of changing states between a first state where the at least another of the holding stations is a discretionary holding station so that the discretionary holding station forms a spare holding station upon mating of the casing to a load port, the discretionary holding station being capable of optionally holding another substrate when the transport apparatus is in the loaded condition and a second state where the at least another of the holding stations is not capable of optionally holding another substrate when the substrate transport is in a loaded condition, wherein each of the at least one holding station and the at least another holding station is selectably switchable between the first and second states and the load port interface being a single-plane interface for coupling the casing to a load port such that casing to load port alignment is determined in at least two orthogonal axes by only the single-plane interface, the single-plane interface being arranged substantially perpendicular to a plane of the substrate holding stations;

a controller,

a detector, and

a case connector, the detector and case connector in communication with at least one of the holding stations for effecting switching between the first and second states, the detector being mounted within the casing, and configured to identify at least a location of the at least one substrate within the holding stations for at least unloading the at least one substrate, and the case connector being communicably connectable to the controller for allowing the controller to register data from the detector regarding the location of the at least one substrate within the holding stations and the controller is configured to cause switching of the at least one holding station and the at least another holding station between the first and second states.

10. The apparatus according to claim 9, wherein the at least one holding station is selectably switched to change a substrate processing lot size.

11. The apparatus according to claim 10, wherein the at least one holding station is selectably switched to increase the substrate processing lot size.

12. The apparatus according to claim 9, wherein the at least one holding station is selectably switched for effecting generation of a virtual substrate processing lot when the apparatus is loaded with substrates.

13. The apparatus according to claim 12, wherein the virtual substrate processing lot is formed by the substrate in the substrate holding station and the other substrate in the discretionary holding station, the substrate and the other substrate being from different processing lots.

14. The apparatus according to claim 9, wherein the detector is a reader capable of reading substrate identification indicia on the substrate in the substrate holding station.

15. The apparatus according to claim 9, wherein the discretionary holding station defines a substrate buffer in the apparatus.

16. The apparatus of claim 9, further comprising at least one substrate indicator configured to indicate a location of substrates within the casing.

17. The apparatus according to claim 9, wherein the controller is remotely located from the casing.