Radiation source and method for lithographic apparatus for device manufacture

• US 8,890,099 B2
• Filed: 07/27/2012
• Issued: 11/18/2014
• Est. Priority Date: 09/02/2011
• Status: Active Grant

• Current Assignee: ASML Netherlands BV (ASML Holding NV)
• Original Assignee: ASML Netherlands BV (ASML Holding NV)
• Inventors: Hultermans, Ronald Johannes, Kempen, Antonius Theodorus Wilhelmus, Van Essen, Bernard
• Primary Examiner(s): Vanore, David A
• Application Number:
  US14/342,007
• Publication Number:
  US 20140209817A1
• Time in Patent Office: 844 Days
• Field of Search: 250/493.1, 250/503.1, 250/504.R, 430/30, 430/945, 355/67, 355/77
• US Class Current: 250/504.R
• CPC Class Codes: B22D 43/004 by using filtering means B22C9/086 takes precedence
• CPC Class Codes: G03F 7/70033 by plasma extreme ultraviolet [EUV] sources
• CPC Class Codes: H05G 2/005 containing a metal as principal radiation generating component
• CPC Class Codes: H05G 2/006 details of the ejection system, e.g. constructional details of the nozzle
• CPC Class Codes: H05G 2/008 involving a beam of energy, e.g. laser or electron beam in the process of exciting the plasma
• CPC Class Codes: Y10S 430/146 Laser beam
• CPC Class Codes: Y10T 29/49826 Assembling or joining

Abstract

A radiation source for generating EUV from a stream of molten metal fuel droplets by LPP (Laser Produced Plasma) or (Dual Laser Plasma) has a fuel droplet generator arranged to provide a stream of droplets of fuel and at least one laser configured to vaporise at least some of said droplets of fuel, whereby radiation is generated. The fuel droplet generator has nozzle, fuel supply line, and reservoir, with a pumping device arranged to supply a flow of molten metal fuel from the reservoir through the fuel feed line and out of the nozzle as a stream of droplets. The fuel droplet generator has a replaceable filter assembly in the fuel feed line, arranged to filter the molten metal fuel in use, to deter nozzle blockage by solid particulate impurities in the fuel.

Claims

1. A radiation source having a fuel droplet generator configured to provide a stream of droplets of fuel at least one laser configured to vaporize at least some of said droplets of fuel, whereby radiation is generated, the fuel droplet generator comprising:

a nozzle;

a fuel feed line;

a reservoir;

a pumping device configured to supply a flow of molten metal fuel from the reservoir through the fuel feed line and out of the nozzle as a stream of droplets; and

a replaceable filter assembly in the fuel feed line and configured to filter said molten metal fuel in use, the replaceable filter assembly having a rigid support plate having first and second opposed faces, with one or more channels, each extending from a respective first aperture in the first face through a respective second aperture in the second face, and supporting a filter membrane on the first face and extending over each first aperture of the first face,

wherein the filter membrane comprises mutually spaced holes therein, with each first aperture aligned with a plurality of the holes to provide fluid connection between the plurality of holes and the respective channel.

2. The radiation source of claim 1, wherein the fuel droplet generator comprises:

a replaceable nozzle assembly comprising the nozzle, and

a connector for connecting the nozzle assembly to the fuel feed line

whereby the nozzle is in fluid connection with the fuel feed line, wherein the filter assembly is retained in the connector in use.

3. The radiation source of claim 2, wherein the connector is adapted to releasably hold the filter assembly between the fuel feed line and an inlet orifice of the nozzle assembly in use.

4. The radiation source of claim 2, wherein the replaceable nozzle is adapted to releasably hold the filter assembly between the fuel feed line and an inlet orifice of the nozzle assembly in use.

5. The radiation source of claim 3, wherein the replaceable filter assembly is bonded to the inlet orifice of the nozzle assembly, whereby the replaceable nozzle and the filter assembly form a unitary component.

6. The radiation source of claim 1, wherein the rigid support plate is a silicon wafer.

7. The radiation source claim 1, wherein the filter membrane is a silicon nitride membrane.

8. The radiation source of claim 1, wherein the first apertures have a maximum width of 100 μ

m and the holes have a maximum width of 3 μ

m.

9. The radiation source of claim 1, wherein the replaceable filter assembly is coated with a layer of material insoluble in said molten metal fuel.

10. A lithographic apparatus, comprising:

the radiation source of claim 1;

an illumination system configured to condition the radiation beam;

a support constructed to support a patterning device, the patterning device being capable of imparting the radiation beam with a pattern in its cross-section to form a patterned radiation beam;

a substrate table constructed to hold a substrate, and

a projection system configured to project the patterned radiation beam onto a target portion of said substrate.

11. A fuel droplet generator for providing a stream of droplets of fuel for use in a radiation source for device lithography, the fuel droplet generator comprising a nozzle, a fuel feed line, a reservoir, and a pumping device arranged to supply a flow of molten metal fuel from the reservoir through the fuel feed line and out of the nozzle as a stream of droplets,

wherein the fuel droplet generator has a filter assembly in the fuel feed line, arranged to filter said molten metal fuel in use,

the filter assembly comprising a rigid support plate having first and second opposed faces, with one or more channels, each extending from a respective first aperture in the first face through a respective second aperture in the second face, and

supporting a filter membrane bonded to the first face and extending over each first aperture of the first face,

wherein the filter membrane comprises mutually spaced holes therein, with each first aperture aligned with a plurality of the holes to provide fluid connection between the plurality of holes and the respective channel.

12. A method for filtering a molten metal fuel supply for a fuel droplet generator for providing a stream of droplets of molten metal fuel to provide a radiation source, by laser excitation, for device lithography, the fuel droplet generator comprising a nozzle, a fuel feed line, a reservoir, and a pumping device arranged to supply a flow of molten metal fuel from the reservoir through the fuel feed line and out of the nozzle as a stream of droplets, the method comprising:

inserting and retaining a replaceable filter assembly in the fuel feed line, arranged to filter the molten metal fuel in use, the replaceable filter assembly comprising a rigid support plate having first and second opposed faces, with one or more channels, each extending from a respective first aperture in the first face through a respective second aperture in the second face, and

supporting a filter membrane on the first face and extending over each first aperture of the first face,

wherein, the filter membrane comprises mutually spaced holes therein, with each first aperture aligned with a plurality of the holes to provide fluid connection between the plurality of holes and the respective channel.

13. The method of claim 12, wherein the insertion of the replaceable filter assembly is carried out under clean room conditions.

14. The method of claim 12, wherein the fuel droplet generator comprises a replaceable nozzle assembly comprising the nozzle, and a connector for connecting the nozzle assembly to the fuel feed line whereby the nozzle is in fluid connection with the fuel feed line, wherein the filter assembly is retained in the connector in use.

15. The method of claim 14, wherein the connector is adapted to releasably retain the filter assembly between the fuel feed line and an inlet orifice of the nozzle assembly in use.

16. The method of claim 14, wherein the replaceable nozzle is adapted to retain the filter assembly between the fuel feed line and an inlet orifice of the nozzle assembly in use.

17. The method of claim 12, wherein the replaceable filter assembly is bonded to the inlet orifice of the nozzle assembly whereby the replaceable nozzle and the filter assembly form a unitary component.

18. The method of claim 17, wherein the filter assembly is bonded to the inlet orifice of the nozzle under clean room conditions and stored in a hermetically sealed package prior to insertion.

19. The method of claim 12, wherein the rigid support plate is formed by etching of a wafer under clean room conditions.

20. The method of claim 19, wherein the filter membrane is formed by growth of a membrane layer onto the first surface and etching of the membrane layer under clean room conditions.