Method for manufacturing an electro-optical device

• US 8,890,172 B2
• Filed: 01/20/2011
• Issued: 11/18/2014
• Est. Priority Date: 06/04/1999
• Status: Expired due to Fees

• Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Original Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Inventors: Yamazaki, Shunpei, Koyama, Jun, Yamamoto, Kunitaka, Konuma, Toshimitsu
• Primary Examiner(s): Smith, Zandra
• Assistant Examiner(s): CHIU, TSZ K
• Application Number:
  US13/009,875
• Publication Number:
  US 20110108863A1
• Time in Patent Office: 1,398 Days
• Field of Search: 257/79, 257/59, 257/72, 257/761
• US Class Current: 257/79
• CPC Class Codes: H01L 27/12 the substrate being other than a semiconductor body, e.g. an insulating body
• CPC Class Codes: H01L 27/1214 comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
• CPC Class Codes: H10K 50/80 Constructional details
• CPC Class Codes: H10K 50/84 Passivation; Containers; Encapsulations
• CPC Class Codes: H10K 50/841 Self-supporting sealing arrangements
• CPC Class Codes: H10K 50/844 Encapsulations
• CPC Class Codes: H10K 50/87 Arrangements for heating or cooling
• CPC Class Codes: H10K 59/12 Active-matrix OLED [AMOLED] displays
• CPC Class Codes: H10K 59/124 Insulating layers formed between TFT elements and OLED elements
• CPC Class Codes: H10K 59/35 comprising red-green-blue [RGB] subpixels
• CPC Class Codes: H10K 59/871 Self-supporting sealing arrangements
• CPC Class Codes: H10K 59/873 Encapsulations
• CPC Class Codes: H10K 59/8794 Arrangements for heating and cooling
• CPC Class Codes: H10K 71/135 using ink-jet printing
• CPC Class Codes: H10K 85/114 Poly-phenylenevinylene; Derivatives thereof
• CPC Class Codes: H10K 85/146 poly N-vinylcarbazol; Derivatives thereof
• CPC Class Codes: H10K 85/30 Coordination compounds
• CPC Class Codes: H10K 85/311 Phthalocyanine
• CPC Class Codes: H10K 85/324 comprising aluminium, e.g. Alq3
• CPC Class Codes: H10K 85/342 comprising iridium
• CPC Class Codes: H10K 85/346 : comprising platinum
• CPC Class Codes: H10K 85/631 : Amine compounds having at least two aryl rest on at least one amine-nitrogen atom, e.g. triphenylamine
• CPC Class Codes: H10K 85/649 : Aromatic compounds comprising a hetero atom

Abstract

An object of the present invention is to provide an EL display device having high operation performance and reliability.

A third passivation film 45 is disposed under the EL element 203 comprising a pixel electrode (anode) 46, an EL layer 47 and a cathode 48, and diffusion of alkali metals from the EL element 203 formed by ink jet method into TFTs is prevented. Further, the third passivation film 45 prevents penetration of moisture and oxygen from the TFTs, and suppress degradation of the EL element 203 by dispersing the heat generated by the EL element 203.

Claims

1. A light emitting device comprising:

a wiring line over a substrate;

a first insulating film over the wiring line, the first insulating film having an opening overlapped with a part of the wiring line;

a first electrode over the first insulating film;

a second insulating film covering an edge of the first electrode;

a light emitting layer over and in contact with the first electrode;

a second electrode over the light emitting layer and a top surface of the second insulating film; and

a third insulating film covering the second electrode,

wherein the second electrode is electrically connected to the wiring line through the opening, and

wherein the wiring line extends towards an edge of the substrate to provide a portion to be electrically connected to a flexible printed circuit.

2. The light emitting device according to claim 1, wherein the third insulating film extends beyond an edge of the first insulating film and is in contact with the wiring line.

3. The light emitting device according to claim 1, wherein the first insulating film comprises a first inorganic insulating film, an organic insulating film over the first inorganic insulating film, and a second inorganic insulating film over the organic insulating film.

4. The light emitting device according to claim 1, wherein the third insulating film comprises silicon nitride.

5. The light emitting device according to claim 1, wherein the third insulating film comprises silicon nitride oxide.

6. The light emitting device according to claim 1, further comprising a third electrode between the light emitting layer and the second electrode.

7. The light emitting device according to claim 1, wherein the light emitting layer, the second electrode, and the third insulating film are sealed in a space surrounded by the substrate, a housing member, and an adhesive.

8. The light emitting device according to claim 7, wherein a drying agent is provided in the space.

9. The light emitting device according to claim 1, wherein the light emitting layer comprises an organic light emitting material.

10. The light emitting device according to claim 1, wherein the light emitting device is an EL display device.

11. The light emitting device according to claim 1, wherein the light emitting device is incorporated into an electronic device selected from the group consisting of a video camera, a digital camera, a goggle type display, a car navigation system, a personal computer, a mobile computer, a mobile telephone, an electronic book, an image playback device, and a car audio system.

12. A light emitting device comprising:

a wiring line over a substrate;

a first insulating film over the wiring line, the first insulating film having an opening overlapped with a part of the wiring line;

a first electrode over the first insulating film;

a second insulating film covering an edge of the first electrode;

a light emitting layer over and in contact with the first electrode;

a second electrode over the light emitting layer and a top surface of the second insulating film; and

a third insulating film covering the second electrode,

wherein the second electrode is electrically connected to the wiring line through the opening,

wherein the wiring line extends towards an edge of the substrate to provide a portion to be electrically connected to a flexible printed circuit, and

wherein the third insulating film comprises silicon, oxygen and nitrogen.

13. The light emitting device according to claim 12, wherein the third insulating film extends beyond an edge of the first insulating film and is in contact with the wiring line.

14. The light emitting device according to claim 12, wherein the first insulating film comprises a first inorganic insulating film, an organic insulating film over the first inorganic insulating film, and a second inorganic insulating film over the organic insulating film.

15. The light emitting device according to claim 12, further comprising a third electrode between the light emitting layer and the second electrode.

16. The light emitting device according to claim 12, wherein the light emitting layer, the second electrode, and the third insulating film are sealed in a space surrounded by the substrate, a housing member, and an adhesive.

17. The light emitting device according to claim 16, wherein a drying agent is provided in the space.

18. The light emitting device according to claim 12, wherein the light emitting layer comprises an organic light emitting material.

19. The light emitting device according to claim 12, wherein the light emitting device is an EL display device.

20. The light emitting device according to claim 12, wherein the light emitting device is incorporated into an electronic device selected from the group consisting of a video camera, a digital camera, a goggle type display, a car navigation system, a personal computer, a mobile computer, a mobile telephone, an electronic book, an image playback device, and a car audio system.

21. A light emitting device comprising:

a wiring line over a substrate;

an organic insulating film over the wiring line, the organic insulating film having an opening overlapped with a part of the wiring line;

a first electrode over the organic insulating film;

a first insulating film covering an edge of the first electrode;

a light emitting layer over and in contact with the first electrode;

a second electrode over the light emitting layer and a top surface of the first insulating film; and

a second insulating film covering the second electrode,

wherein the second electrode is electrically connected to the wiring line through the opening, and

wherein the wiring line extends towards an edge of the substrate to provide a portion to be electrically connected to a flexible printed circuit.

22. The light emitting device according to claim 21, wherein the second insulating film extends beyond an edge of the organic insulating film and is in contact with the wiring line.

23. The light emitting device according to claim 21, wherein the second insulating film comprises silicon nitride.

24. The light emitting device according to claim 21, wherein the second insulating film comprises silicon nitride oxide.

25. The light emitting device according to claim 21, further comprising a third electrode between the light emitting layer and the second electrode.

26. The light emitting device according to claim 21, wherein the light emitting layer, the second electrode, and the second insulating film are sealed in a space surrounded by the substrate, a housing member, and an adhesive.

27. The light emitting device according to claim 26, wherein a drying agent is provided in the space.

28. The light emitting device according to claim 21, wherein the light emitting layer comprises an organic light emitting material.

29. The light emitting device according to claim 21, wherein the light emitting device is an EL display device.

30. The light emitting device according to claim 21, wherein the light emitting device is incorporated into an electronic device selected from the group consisting of a video camera, a digital camera, a goggle type display, a car navigation system, a personal computer, a mobile computer, a mobile telephone, an electronic book, an image playback device, and a car audio system.

35. The light emitting device according to claim 21, further comprising an inorganic insulating film between the substrate and the organic insulating film.

31. A light emitting device comprising:

a wiring line over a substrate;

a first insulating film over the wiring line, the first insulating film having an opening overlapped with a part of the wiring line;

a first electrode over the substrate, the first electrode not overlapping with the wiring line;

a second insulating film over the first electrode, the second insulating film being over and in contact with a part of the first electrode;

an electroluminescent layer over and in contact with the first electrode;

a second electrode over the electroluminescent layer; and

a conductive layer overlapping with the first electrode, the second insulating film, and the second electrode,

wherein the second electrode is electrically connected to the wiring line through the opening.

32. The light emitting device according to claim 31, wherein the first electrode is located above the wiring line.

33. The light emitting device according to claim 31, further comprising a transistor electrically connected to the first electrode,

wherein the conductive layer is a gate electrode of the transistor.

34. The light emitting device according to claim 31, wherein the electroluminescent layer comprises at least one of a hole injection layer, a hole transporting layer, an electron transporting layer, an electron injecting layer, and a light emitting layer.

36. A light emitting device comprising:

a wiring line and a transistor over a substrate, the transistor comprising a gate electrode and source and drain electrodes;

a first insulating film over the wiring line and the transistor, the first insulating film having an opening overlapped with a part of the wiring line;

a first electrode over the first insulating film, the first electrode electrically connected to one of source and drain electrodes of the transistor;

a second insulating film covering an edge of the first electrode;

a light emitting layer over and in contact with the first electrode;

a second electrode over the light emitting layer and a top surface of the second insulating film; and

a third insulating film covering the second electrode,

wherein the second electrode is electrically connected to the wiring line through the opening, and

wherein the wiring line extends towards an edge of the substrate to provide a portion to be electrically connected to a flexible printed circuit.

37. The light emitting device according to claim 36, wherein the third insulating film extends beyond an edge of the first insulating film and is in contact with the wiring line.

38. The light emitting device according to claim 36, wherein the first insulating film comprises a first inorganic insulating film, an organic insulating film over the first inorganic insulating film, and a second inorganic insulating film over the organic insulating film.

39. The light emitting device according to claim 36, wherein the third insulating film comprises silicon nitride.

40. The light emitting device according to claim 36, wherein the third insulating film comprises silicon nitride oxide.

41. The light emitting device according to claim 36, further comprising a third electrode between the light emitting layer and the second electrode.

42. The light emitting device according to claim 36, wherein the light emitting layer, the second electrode, and the third insulating film are sealed in a space surrounded by the substrate, a housing member, and an adhesive.

43. The light emitting device according to claim 42, wherein a drying agent is provided in the space.

44. The light emitting device according to claim 36, wherein the light emitting layer comprises an organic light emitting material.

45. The light emitting device according to claim 36, wherein the light emitting device is an EL display device.

46. The light emitting device according to claim 36, wherein the light emitting device is incorporated into an electronic device selected from the group consisting of a video camera, a digital camera, a goggle type display, a car navigation system, a personal computer, a mobile computer, a mobile telephone, an electronic book, an image playback device, and a car audio system.

47. The light emitting device according to claim 36, wherein the source and drain electrodes and the wiring line are formed by patterning a same conductive film.