Biosensor and system and process for forming
First Claim
1. A process for forming a functionalized carbon nanotube field effect transistor (CNTFET) device including site-specific nanoparticle deposition on a carbon nanotube field effect transistor (CNTFET) including one or more carbon nanotubes, a source electrode, a drain electrode, and a sacrificial electrode on a substrate with an interposed dielectric layer, the process comprising:
- passivating the CNTFET with a layer of Poly(methyl methacrylate) (PMMA);
programming a processor of an electron-beam lithography system with a predetermined removal pattern;
applying electron-beam lithography using the electron-beam lithography system to the CNTFET to remove portions of the PMMA layer and expose one or more underlying portions of the one or more carbon nanotubes and the sacrificial electrode of the CNTFET in accordance with the programmed predetermined removal pattern;
applying an amount of an electrolyte solution to the CNTFET, including the exposed one or more underlying portions of the one or more carbon nanotubes and the sacrificial electrode;
applying a voltage to the sacrificial electrode while grounding the source and drain electrodes; and
electrodepositing one or more nanoparticles formed from atoms of the sacrificial electrode onto the one or more exposed portions of the one or more carbon nanotubes.
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Accused Products
Abstract
A process for forming a carbon nanotube field effect transistor (CNTFET) device includes site-specific nanoparticle deposition on a CNTFET that has one or more carbon nanotubes, a source electrode, a drain electrode, and a sacrificial electrode on a substrate with an interposed dielectric layer. The process includes control of PMMA removal and electrodeposition in order to select nanoparticle size and deposition location down to singular nanoparticle deposition. The CNTFET device resulting in ultra-sensitivity for various bio-sensing applications, including detection of glucose at hypoglycemic levels.
24 Citations
23 Claims
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1. A process for forming a functionalized carbon nanotube field effect transistor (CNTFET) device including site-specific nanoparticle deposition on a carbon nanotube field effect transistor (CNTFET) including one or more carbon nanotubes, a source electrode, a drain electrode, and a sacrificial electrode on a substrate with an interposed dielectric layer, the process comprising:
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passivating the CNTFET with a layer of Poly(methyl methacrylate) (PMMA); programming a processor of an electron-beam lithography system with a predetermined removal pattern; applying electron-beam lithography using the electron-beam lithography system to the CNTFET to remove portions of the PMMA layer and expose one or more underlying portions of the one or more carbon nanotubes and the sacrificial electrode of the CNTFET in accordance with the programmed predetermined removal pattern; applying an amount of an electrolyte solution to the CNTFET, including the exposed one or more underlying portions of the one or more carbon nanotubes and the sacrificial electrode; applying a voltage to the sacrificial electrode while grounding the source and drain electrodes; and electrodepositing one or more nanoparticles formed from atoms of the sacrificial electrode onto the one or more exposed portions of the one or more carbon nanotubes. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 18, 19, 20)
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11. A process for forming a functionalized carbon nanotube field effect transistor (CNTFET) device including site-specific nanoparticle deposition on a carbon nanotube field effect transistor (CNTFET) including one or more carbon nanotubes, a source electrode, a drain electrode, and a sacrificial electrode on a substrate with an interposed dielectric layer, the process comprising:
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removing portions of a protective layer covering the one or more carbon nanotubes in accordance with a predetermined removal pattern to expose one or more individual underlying portions of the one or more carbon nanotubes and to expose the sacrificial electrode of the CNTFET, wherein each of the exposed one or more individual underlying portions of the one or more carbon nanotubes has a first predetermined dimension; applying an amount of an electrolyte solution to the CNTFET, including the exposed one or more underlying portions of the one or more carbon nanotubes and the sacrificial electrode; applying a voltage to the sacrificial electrode while grounding the source and drain electrodes; and electrodepositing one or more nanoparticles each having a predetermined second dimension formed from atoms of the sacrificial electrode onto the one or more exposed portions of the one or more carbon nanotubes, wherein the first predetermined dimension is only slightly larger than the second predetermined dimension. - View Dependent Claims (12, 13, 14, 15, 16, 17)
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21. A process for forming a functionalized carbon nanotube field effect transistor (CNTFET) device including site-specific nanoparticle deposition on a carbon nanotube field effect transistor (CNTFET) including one or more carbon nanotubes, a source electrode, a drain electrode, and at least a first and second sacrificial electrode on a substrate with an interposed dielectric layer, the process comprising:
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removing portions of a protective layer covering the one or more carbon nanotubes in accordance with a first predetermined removal pattern to selectively expose a first individual underlying portion of the one or more carbon nanotubes and to selectively expose the first sacrificial electrode of the CNTFET; applying an amount of an electrolyte solution to the CNTFET, including the exposed first underlying portion and the exposed first sacrificial electrode; applying a first voltage to the first sacrificial electrode while grounding the source and drain electrodes; electrodepositing one or more nanoparticles formed from first atoms of the first sacrificial electrode onto the first exposed underlying portions of the one or more carbon nanotubes; removing portions of a protective layer covering the one or more carbon nanotubes in accordance with a second predetermined removal pattern to selectively expose a second individual underlying portion of the one or more carbon nanotubes and to selectively expose the second sacrificial electrode of the CNTFET; applying an amount of an electrolyte solution to the CNTFET, including the exposed second underlying portion and the exposed second sacrificial electrode; applying a second voltage to the second sacrificial electrode while grounding the source and drain electrodes; and electrodepositing one or more nanoparticles formed from second atoms of the second sacrificial electrode onto the second exposed underlying portions of the one or more carbon nanotubes. - View Dependent Claims (22, 23)
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Specification