Nitride semiconductor light-emitting element and method for fabricating the same
First Claim
Patent Images
1. A method for fabricating a nitride semiconductor light-emitting element, the method comprising the steps of:
- (a) providing a substrate;
(b) forming a nitride-based semiconductor multilayer structure including an n-type semiconductor region, an active layer, and a p-type semiconductor region on the substrate, the nitride-based semiconductor multilayer structure having a growing plane which is an m-plane;
(c) forming a p-side electrode on the growing plane of the p-type semiconductor region; and
(d) heating the nitride-based semiconductor multilayer structure after the step (c) has been performed to diffuse Ge in the p-side electrode so that the concentration of Ge becomes lower at an interface between the p-side electrode and the p-type semiconductor region than at the surface of the p-side electrode opposite from the p-type semiconductor region.
1 Assignment
0 Petitions
Accused Products
Abstract
This nitride-based semiconductor light-emitting element includes: a nitride-based semiconductor multilayer structure including a p-type semiconductor region, the nitride-based semiconductor multilayer structure having a growing plane which is an m-plane; and an electrode which is arranged on an AldGaeN layer. The AldGaeN layer is formed of a GaN-based semiconductor. The electrode includes Ag as the principal component and also includes Ge and at least one of Mg and Zn.
9 Citations
19 Claims
-
1. A method for fabricating a nitride semiconductor light-emitting element, the method comprising the steps of:
-
(a) providing a substrate; (b) forming a nitride-based semiconductor multilayer structure including an n-type semiconductor region, an active layer, and a p-type semiconductor region on the substrate, the nitride-based semiconductor multilayer structure having a growing plane which is an m-plane; (c) forming a p-side electrode on the growing plane of the p-type semiconductor region; and (d) heating the nitride-based semiconductor multilayer structure after the step (c) has been performed to diffuse Ge in the p-side electrode so that the concentration of Ge becomes lower at an interface between the p-side electrode and the p-type semiconductor region than at the surface of the p-side electrode opposite from the p-type semiconductor region. - View Dependent Claims (2, 3, 4, 5, 6)
-
-
7. A nitride semiconductor light-emitting element comprising:
-
an n-side electrode; a nitride-based semiconductor multilayer structure including an n-type semiconductor region, an active layer and a p-type semiconductor region, the nitride-based semiconductor multilayer structure having a growing plane which is an m-plane; and a p-side electrode which is arranged on the p-type semiconductor region, wherein the p-type semiconductor region is formed of a GaN-based semiconductor, the p-side electrode is formed of an alloy including Ag as the principal component and also including Ge and at least one of Mg and Zn, Ge has been diffused in the alloy, and the concentration of Ge is lower at an interface between the p-side electrode and the p-type semiconductor region than at the surface of the p-side electrode opposite from the p-type semiconductor region. - View Dependent Claims (8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19)
-
Specification