Lithographic apparatus and device manufacturing method

• US 8,896,815 B2
• Filed: 10/30/2012
• Issued: 11/25/2014
• Est. Priority Date: 10/31/2011
• Status: Expired due to Fees

• Current Assignee: ASML Netherlands BV (ASML Holding NV)
• Original Assignee: ASML Netherlands BV (ASML Holding NV)
• Inventors: Mulder, Heine Melle
• Primary Examiner(s): KREUTZER, COLIN WRIGHT
• Application Number:
  US13/663,924
• Publication Number:
  US 20130107238A1
• Time in Patent Office: 756 Days
• Field of Search: 355/46, 355/67, 355/71, 355/77, 359/298, 359/615
• US Class Current: 355/67
• CPC Class Codes: G03F 7/2008 characterised by the reflectors, diffusers, light or heat filtering means or anti-reflective means used
• CPC Class Codes: G03F 7/26 Processing photosensitive materials; Apparatus therefor G03F7/12 - G03F7/24 take precedence
• CPC Class Codes: G03F 7/70391 Addressable array sources specially adapted to produce patterns, e.g. addressable LED arrays
• CPC Class Codes: G03F 7/704 Scanned exposure beam, e.g. raster-, rotary- and vector scanning mask projection exposure involving relative movement of patterned beam and workpiece during imaging G03F7/70358
• CPC Class Codes: G03F 7/70575 Wavelength control, e.g. control of bandwidth, multiple wavelength, selection of wavelength or matching of optical components to wavelength

Abstract

A apparatus having a projection system to project a plurality of radiation beams onto a substrate, wherein the plurality of radiation beams includes a first group of one or more radiation beams formed from radiation within a first wavelength range and a second group of one or more radiation beams formed from radiation within a second wavelength range, different from the first wavelength range. The apparatus also has a dispersion element configured such that one or more radiation beams of the first group are incident on the dispersion element at a different angle from the one or more radiation beams of the second group and such that the one or more radiation beams of the first and second group output from the dispersion element are substantially parallel.

Claims

1. An exposure apparatus, comprising:

a projection system configured to project a plurality of radiation beams onto a substrate, wherein the plurality of radiation beams comprises a first group of radiation beams formed from radiation within a first wavelength range and a second group of radiation beams formed from radiation within a second wavelength range, different from the first wavelength range; and

a dispersion element, configured such that radiation beams of the first group are incident on the dispersion element at a different angle from radiation beams of the second group and such that the radiation beams of the first and second groups output from the dispersion element are substantially parallel, wherein the radiation beams within each group incident on the dispersion element are arranged in a respective row associated with each group when incident on the dispersion element, and the radiation beams of the first and second groups output from the dispersion element are arranged in a single row when output from the dispersion element.

2. The apparatus according to claim 1, wherein the dispersion element comprises a prism formed from a material that has a refractive index that varies with the wavelength of radiation passing through it.

3. The apparatus according to claim 2, wherein the prism is formed from fused silicon.

4. The apparatus according to claim 1, wherein the dispersion element comprises a grating.

5. The apparatus according to claim 1, wherein:

the plurality of radiation beams comprises a third group of one or more radiation beams formed from radiation within a third wavelength range, different from the wavelength ranges of the other groups; and

the dispersion element is configured such that one or more radiation beams of each of the groups are incident on the dispersion element at different angles from the other groups and such that the radiation beams of each of the groups output from the dispersion element are substantially parallel.

6. The apparatus according to claim 1, wherein the radiation beams from each of the groups are arranged in the output row of radiation beams in a regularly interleaved manner.

7. The apparatus according to claim 1, wherein the wavelength range of each of the groups is 1 nm or less.

8. The apparatus according to claim 1, wherein the wavelength range of each of the groups is 10% or less of the wavelength separation from the nearest wavelength range of another group.

9. The apparatus according to claim 1, wherein no two of the wavelength ranges associated with the groups of radiation beams overlap.

10. The apparatus according to claim 1, wherein the radiation beam path length between a programmable patterning device configured to provide the plurality of radiation beams and the dispersion element is arranged to be different for each of the groups of radiation beams, the difference being selected to reduce a difference in a position of best focus of the radiation beams when projected onto the substrate that is introduced by differences in the response of the projection system to the different radiation wavelengths.

11. The apparatus according to claim 1, wherein the projection system comprises a chromatic correction element arranged between the dispersion element and the substrate, the chromatic correction, element configured to reduce a difference in a position of best focus of the radiation beams when projected onto the substrate that is introduced by differences in the response of other elements of the projection system to the different radiation wavelengths.

12. The apparatus according to claim 1, further comprising a programmable patterning device, configured to provide the plurality of radiation beams.

13. The apparatus according to claim 12, wherein the programmable patterning device comprises a controllable element to selectively provide the plurality of radiation beams.

14. The apparatus according to claim 12, wherein the programmable patterning device comprises a plurality of self-emissive contrast devices.

15. The apparatus according to claim 1, wherein the projection system comprises a stationary part and a moving part.

16. The apparatus according to claim 15, wherein the moving part is configured to rotate relative to the stationary part.

17. The apparatus according to claim 15, wherein the stationary part comprises the dispersion element.

18. A device manufacturing method comprising:

using a projection system to project a plurality of radiation beams onto a substrate, wherein the plurality of radiation beams comprises a first group of radiation beams formed from radiation within a first wavelength range and a second group of radiation beams formed from radiation within a second wavelength range, different from the first wavelength range; and

passing the radiation beams via a dispersion element such that radiation beams of the first group are incident on the dispersion element at a different angle from radiation beams of the second group and such that the radiation beams of the first and second groups output from the dispersion element are substantially parallel, wherein the radiation beams within each group incident on the dispersion element are arranged in a respective row associated with each group when incident on the dispersion element, and the radiation beams of the first and second groups output from the dispersion element are arranged in a single row when output from the dispersion element.

19. An exposure apparatus, comprising:

a projection system configured to project a plurality of radiation beams onto a substrate, wherein the plurality of radiation beams comprises a first group of radiation beams formed from radiation within a first wavelength range and a second group of one or more radiation beams formed from radiation within a second wavelength range, different from the first wavelength range; and

a dispersion element, configured such that radiation beams of the first group are incident on the dispersion element at a different angle, from one or more radiation beams of the second group and such that the radiation beams of the first and second groups output from the dispersion element are substantially parallel in a single row and output from the dispersion element at a different angle than the angles of incidence on the dispersion element of the radiation beams of the first group and of the one or more radiation beams of the second group.

20. The apparatus according to claim 19, wherein the one or more radiation beams from the first group is interleaved with the radiation beams from the second group in the output row.