Optical inspector

• US 8,896,825 B2
• Filed: 02/01/2013
• Issued: 11/25/2014
• Est. Priority Date: 02/01/2013
• Status: Active Grant

• Current Assignee: KLA-Tencor Corporation (KLA Corporation)
• Original Assignee: Zeta Instruments, Inc. (KLA Corporation)
• Inventors: Meeks, Steven W., Kudinar, Rusmin, Nguyen, Hung P.
• Primary Examiner(s): Chowdhury, Tarifur
• Assistant Examiner(s): RAHMAN, MD M
• Application Number:
  US13/757,154
• Publication Number:
  US 20140218722A1
• Time in Patent Office: 662 Days
• Field of Search: 356/237.1
• US Class Current: 356/237.1
• CPC Class Codes: G01N 21/01 Arrangements or apparatus for facilitating the optical investigation
• CPC Class Codes: G01N 21/55 Specular reflectivity
• CPC Class Codes: G02B 26/10 Scanning systems
• CPC Class Codes: G02B 26/125 Details of the optical system between the polygonal mirror and the image plane G02B26/123, G02B26/127 take precedence; F-Theta lenses G02B13/0005

Abstract

An optical inspector includes a radiating source, a time varying beam reflector, a telecentric scan lens, a first and second lens, a field stop, and a detector. The radiating source irradiates a first position of on the time varying beam reflector with a source beam. The time varying beam reflector directs the source beam to the telecentric scan lens, which in turn directs the source beam to a sample. The first lens focuses scattered radiation from the sample to generate multiple scan lines at a first focal plane. The field stop is positioned at the first focal plane to block one or more scan lines at the first focal plane. The scan line not blocked by the field stop propagates to the second lens. The second lens de-scans the scan line and generates a point of scattered radiation at a second focal plane where the detector input is located.

Claims

1. An apparatus, comprising:

a time varying beam reflector;

a radiating source that irradiates a first position of the time varying beam reflector;

a waveplate that is positioned between the radiating source and the time varying beam reflector;

a telecentric lens that directs the radiation reflected by the time varying beam reflector onto a sample, wherein the radiation reflected by the time varying beam reflector and directed by the telecentric scan lens produces a moving irradiated spot on the sample, wherein the irradiation of the sample causes scattered radiation to reflect from a top surface of the sample and a bottom surface of the sample;

a first lens that receives scattered radiation from the sample, wherein the first lens is orientated at an oblique angle to the plane of incidence of the moving irradiated spot on the transparent sample;

a field stop located at the focal plane of the first lens, wherein the field stop blocks a first portion of the scattered radiation, and wherein a majority of the first portion of scattered radiation is reflected from one surface of the sample;

a de-scan lens located after the focal plane of the first lens that receives a second portion of the scattered radiation not blocked by the field stop; and

a detector located at the focal plane of the de-scan lens.

2. The apparatus of claim 1, wherein the time varying beam reflector is a rotating polygon.

3. The apparatus of claim 1, wherein the scattered radiation at the focal plane of the first lens is moving, and wherein the de-scan lens focuses the moving scattered radiation to a stationary location where the detector is located.

4. The apparatus of claim 1, further comprising:

a processor, wherein the processor receives signals from the detector, and wherein the processor determines a characteristic of the sample based upon the signals received from the detector.

5. The apparatus of claim 1, wherein the scattered radiation does not include specular reflection, and wherein the de-scan lens includes one of a pair of achromatic lenses, an aspheric lens, a plano-convex lens, a Cooke triplet lens, or a camera lens.

6. The apparatus of claim 1, wherein the radiating source is a laser, wherein the detector includes a photomultiplier tube, and wherein the sample is a wafer.

7. The apparatus of claim 1, wherein the field stop is not a pinhole field stop.

8. The apparatus of claim 1, further comprising:

a processor; and

a motor that drives the time varying beam reflector, wherein the processor communicates with the any combination of;

the detector, the radiating source, and the motor.

9. The apparatus of claim 1, wherein the first lens is one of a camera lens, a Cooke triplet lens, a plano-convex lens, an aspheric lens, or an achromatic lens.

10. A method, comprising:

(a) irradiating a first position of a time varying beam reflector;

(b) directing the radiation from the time varying beam reflector onto a sample, wherein the radiation reflected by a time varying beam reflector and directed by the telecentric scan lens produces a moving irradiated spot on the sample, and wherein the irradiation of the sample causes scattered radiation to reflect from a top surface of the sample and a bottom surface of the sample;

(c) focusing scattered radiation from the sample to a first focal plane, wherein the first focal plane is orientated at an oblique angle to the plane of incidence of the moving irradiated spot on the sample;

(d) blocking a first portion of the focused scattered radiation from the sample at the first focal plane, wherein a majority of the first portion of the focused scattered radiation is reflected from one surface of the sample;

(e) de-scanning a second portion of the focused scattered radiation from the sample, wherein the second portion of the focused scattered radiation was not blocked in (d); and

(f) detecting the intensity of the second portion of the focused scattered radiation from the sample.

11. The method of claim 10, wherein the irradiating of (a) is performed by a laser source, and wherein the time varying beam reflector is a rotating polygon.

12. The method of claim 10, wherein the focusing of (c) is performed by a camera lens, and wherein the de-scanning of (e) is performed by a pair of achromatic lenses.

13. The method of claim 10, wherein the blocking of (d) is performed by a field stop.

14. The method of claim 10, wherein the detecting of (f) occurs at a second focal plane resulting from the de-scanning of (e).

15. The method of claim 10, wherein the detecting of (f) is performed by a photomultiplier tube.

16. A device comprising:

a time varying beam reflector;

a radiating source that irradiates a first position of the time varying beam reflector;

a waveplate that is positioned between the radiating source and the time varying beam reflector;

a telecentric lens that directs the radiation reflected by the time varying beam reflector onto a sample, wherein the radiation reflected by the time varying beam reflector and directed by the telecentric scan lens produces a moving irradiated spot on the sample, wherein the irradiation of the sample causes scattered radiation to reflect from a top surface of the sample and a bottom surface of the sample;

a first lens that receives scattered radiation from the sample , wherein the first lens is orientated at an oblique angle to the plane of incidence of the moving irradiated spot on the transparent sample; and

a first means for blocking a first portion of the scattered radiation from the sample, wherein a majority of the first portion of the scattered radiation is reflected from one surface of the sample; and

a second means for de-scanning a second portion of the scattered radiation from the sample.

17. The device of claim 16, wherein the first means includes a field stop, and wherein the second means includes a de-scanning lens.