Device and method for fabricating display device

• US 8,899,174 B2
• Filed: 10/01/2010
• Issued: 12/02/2014
• Est. Priority Date: 02/02/2010
• Status: Expired due to Fees

• Current Assignee: Samsung Display Company Limited (Samsung Electronics Co. Ltd.)
• Original Assignee: Samsung Display Company Limited (Samsung Electronics Co. Ltd.)
• Inventors: Jang, Won-Hyouk, Kang, Eu-Gene, Lee, Joo-Hwa, Hwang, Min-Jeong
• Primary Examiner(s): Yuan, Dah-Wei D
• Assistant Examiner(s): PENCE, JETHRO M
• Application Number:
  US12/896,496
• Publication Number:
  US 20110189380A1
• Time in Patent Office: 1,523 Days
• Field of Search: None
• US Class Current: 118/665
• CPC Class Codes: B05C 11/00 Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00 means for manipulating or holding work B05C13/00; enclosures for apparatus, booths B05C15/00; spray booths B05B16/00
• CPC Class Codes: C23C 14/12 Organic material
• CPC Class Codes: C23C 14/243 Crucibles for source material C23C14/28, C23C14/30 take precedence
• CPC Class Codes: C23C 14/54 Controlling or regulating the coating process
• CPC Class Codes: C23C 14/545 using measurement on deposited material
• CPC Class Codes: C23C 14/547 using optical methods
• CPC Class Codes: C23C 16/00 Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes reactive sputtering or vacuum evaporation C23C14/00
• CPC Class Codes: C23C 16/44 characterised by the method of coating C23C16/04 takes precedence
• CPC Class Codes: C23C 16/448 characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
• CPC Class Codes: C23C 16/52 Controlling or regulating the coating process C23C16/45557, C23C16/279 take precedence

Abstract

A device for manufacturing a display device includes a deposition source; a deposition thickness calculator for calculating a deposition thickness of a deposition material deposited on a substrate; and a controller for controlling a power of a heater which heats the deposition source by comparing the deposition thickness calculated with a reference thickness. The controller controls the power of the heater either at least one time for each substrate on which the thin film is to be deposited or at regular intervals while the deposition material is deposited. Influence of measurement noise that is included in a quartz crystal sensor for measuring a deposition speed may be minimized, and distribution of deposition thickness of an organic light emitting material may be reduced, thereby increasing the yield of the deposition process and producing quality display devices.

Claims

1. A device for manufacturing a display device, comprising:

a deposition source;

a deposition thickness calculator making determination of a deposition thickness of a deposition material deposited on a substrate, and the deposition material being provided by the deposition source;

a controller controlling application of power to a heater disposed to heat the deposition source by comparing the deposition thickness determined with a reference thickness, and the controller controlling the power of the heater either once when each substrate is loaded into a deposition chamber or at regular intervals during each period while the deposition material is deposited on the substrate; and

a deposition speed measuring sensor measuring a vapor volume of the deposition material that is sublimated from the deposition source with the deposition material filling the deposition chamber, the deposition speed measuring sensor not coexisting in the device for manufacturing the display device with a deposition thickness measurer which irradiates light to a pattern of a thin film that is deposited onto the substrate, receives the light reflected by the pattern of the thin film, and measures a polarization state of the light reflected,

wherein the deposition speed measuring sensor comprises a quartz crystal sensor and the deposition speed measuring sensor measures the vapor volume emitted from the deposition source before contacting the substrate.

2. The device of claim 1, further including a deposition rate calculator providing a representation of a deposition speed of the deposition material by using the measured vapor volume of the deposition material.

3. The device of claim 2, wherein the deposition thickness calculator calculates the deposition thickness of the deposition material by integrating the deposition speed of the deposition material with respect to time.