Rear-face illuminated solid state image sensors
First Claim
1. A method of forming a microelectronic unit comprising:
- forming a recessed portion extending through a packaging layer attached to a front surface of a semiconductor element and terminating at a thin region of a conductive contact, the conductive contact being disposed at the front surface of the semiconductor element, the semiconductor element having a rear surface remote from the front surface and including a light detector disposed adjacent to the front surface, connected to the conductive contact and aligned with a portion of the rear surface to receive light through the rear surface portion, wherein the light detector includes a plurality of light detector elements arranged in an array, wherein the conductive contact has a first thickness at the thin region and includes a thicker region having a second thickness that is thicker than the first thickness; and
forming a conductive interconnect extending through the recessed portion to connect to the conductive contact at the thin region, at least a portion of the conductive interconnect being exposed at a surface of the microelectronic unit.
6 Assignments
0 Petitions
Accused Products
Abstract
A microelectronic unit includes a semiconductor element having a front surface to which a packaging layer is attached, and a rear surface remote from the front surface. The element includes a light detector including a plurality of light detector element arranged in an array disposed adjacent to the front surface and arranged to receive light through the rear surface. The semiconductor element also includes an electrically conductive contact at the front surface connected to the light detector. The conductive contact includes a thin region and a thicker region which is thicker than the thin region. A conductive interconnect extends through the packaging layer to the thin region of the conductive contact, and a portion of the conductive interconnect is exposed at a surface of the microelectronic unit.
-
Citations
15 Claims
-
1. A method of forming a microelectronic unit comprising:
-
forming a recessed portion extending through a packaging layer attached to a front surface of a semiconductor element and terminating at a thin region of a conductive contact, the conductive contact being disposed at the front surface of the semiconductor element, the semiconductor element having a rear surface remote from the front surface and including a light detector disposed adjacent to the front surface, connected to the conductive contact and aligned with a portion of the rear surface to receive light through the rear surface portion, wherein the light detector includes a plurality of light detector elements arranged in an array, wherein the conductive contact has a first thickness at the thin region and includes a thicker region having a second thickness that is thicker than the first thickness; and forming a conductive interconnect extending through the recessed portion to connect to the conductive contact at the thin region, at least a portion of the conductive interconnect being exposed at a surface of the microelectronic unit. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
-
Specification