Individually addressable band electrode arrays and methods to prepare the same

• US 8,901,433 B2
• Filed: 09/12/2011
• Issued: 12/02/2014
• Est. Priority Date: 09/10/2010
• Status: Expired due to Fees

• Current Assignee: Hitachi Chemical Company Limited (Resonac Holdings Corp.), Hitachi Chemical Research Center, Inc (Resonac Holdings Corp.)
• Original Assignee: Hitachi Chemical Company Limited (Resonac Holdings Corp.), Hitachi Chemical Research Center, Inc (Resonac Holdings Corp.)
• Inventors: Devadoss, Anando
• Primary Examiner(s): Norris, Jeremy C
• Application Number:
  US13/820,994
• Publication Number:
  US 20130168135A1
• Time in Patent Office: 1,177 Days
• Field of Search: 174255-261, 174262-266, 298/46, 361792-795
• US Class Current: 174/261
• CPC Class Codes: G01N 27/27 Association of two or more measuring systems or cells, each measuring a different parameter, where the measurement results may be either used independently, the systems or cells being physically associated, or combined to produce a value for a further parameter
• CPC Class Codes: H01R 43/16 for manufacturing contact members, e.g. by punching and by bending
• CPC Class Codes: H05K 1/11 Printed elements for providing electric connections to or between printed circuits
• CPC Class Codes: Y10T 29/49155 Manufacturing circuit on or in base
• CPC Class Codes: Y10T 29/49222 forming array of contacts or terminals

Abstract

Band electrode arrays, methods of manufacturing, and a method of using are disclosed. The arrays have individually addressable band electrodes such that diffusion layers of the band electrodes overlap. An exemplary method of manufacturing may comprise: a first insulating layer is disposed on a substrate; a first band electrode is disposed on the first insulating layer; a second insulating layer is disposed on the first insulating layer and completely covers the first band electrode; a second band electrode is disposed on the second insulating layer; a third insulating layer is disposed on the second insulating layer and completely covers the second band electrode; the first and second band electrodes are electrically insulated from each other and individually addressable; cross-sectional surfaces of the first and second band electrodes are exposed on the test surface; and these exposed cross-sectional surfaces substantially overlap each other in a direction perpendicular to the substrate.

Claims

1. A band electrode array comprising:

a substrate;

a first insulating layer disposed on the substrate;

a first band electrode disposed on the first insulating layer;

wherein the first band electrode has a thickness of about 1 nm-about 5000 nm and an exposed cross-sectional surface having a width of about 1 μ

m-about 1 cm;

a second insulating layer disposed on the first insulating layer and completely covering the first band electrode;

wherein the second insulating layer has a thickness of about 100 nm-about 500 μ

m;

a second band electrode disposed on the second insulating layer;

wherein the thickness of the second band electrode is about 1 nm-about 5000 nm and width of the exposed cross-sectional surface of the second band electrode is about 1 μ

m-about 1 cm;

a third insulating layer is disposed on the second insulating layer and completely covering the second band electrode;

wherein the first and second band electrodes are electrically insulated from each other and individually addressable;

cross-sectional surfaces of the first and second band electrodes are exposed on the test surface and coextensive with the test surface; and

the exposed cross-sectional surfaces substantially overlap each other in a direction perpendicular to the substrate.

2. The band electrode array of claim 1, wherein diffusion layers of the first and second band electrodes overlap.

3. The band electrode array of claim 1, further comprising a third band electrode disposed on the first insulating layer and completely covered by the second insulating layer, wherein the first, second and third band electrodes are electrically insulated from each other and individually addressable.

4. The band electrode array of claim 3, further comprising a fourth band electrode disposed on the second insulating layer and completely covered by the third insulating layer, wherein the first, second, third and fourth band electrodes are electrically insulated from each other and individually addressable.

5. The band electrode array of claim 1, wherein the first band electrode and/or the second band electrode are formed from a plurality of layers.

6. The band electrode array of claim 1, wherein at least one of the substrate, band electrodes, and insulating layers have a curvilinear or rectilinear form.

7. The band electrode array of claim 1, wherein the substrate is made of silicon, glass, plastic, rubber, silicone and/or a combination thereof.

8. The band electrode array of claim 1, wherein the first, second and third insulating layers are made of epoxy, silicone, polymer, oxide, nitride, carbide, plastic, rubber and/or a combination thereof.

9. The band electrode array of claim 1, wherein the first and second band electrodes are made of gold, silver, copper, platinum, palladium, carbon, conductive polymer, metal alloy, and/or a combination or mixture thereof.

10. The band electrode array of claim 1, wherein the exposed cross-sectional surface of the first band electrode is functionalized by a first chemical species and/or the exposed cross-sectional surface of the second band electrode is functionalized by a second chemical species, and the first and second chemical species are the same or different species.

11. A method of manufacturing the band electrode array of claim 1, comprising:

(a) depositing the first insulating layer onto the substrate,

(b) placing a first shadow mask on the first insulating layer,

(c) forming the first band electrode in an opening of the first shadow mask by depositing a conductive film over the first shadow mask,

(d) removing the first shadow mask,

(e) depositing the second insulating layer such that the first band electrode is completely covered by the second insulating layer,

(f) placing a second shadow mask on the second insulating layer,

(g) forming the second band electrode in an opening of the second shadow mask by depositing a conductive film over the second shadow mask,

(h) removing the second shadow mask,

(i) depositing the third insulating layer such that the second band electrode is completely covered by the third insulating layer, and

(j) cleaving or cutting a side surface of the band electrode array to form the test surface such that cross-sectional surfaces of the first and second band electrodes are exposed thereon and substantially overlap each other in a direction perpendicular to the substrate.

12. The method of claim 11, further comprising electrically connecting a first lead to the first band electrode between steps (d) and (e), and electrically connecting a second lead to the second band electrode between steps (h) and (i).

13. The method of claim 11, wherein the method does not comprise using photolithography or using e-beam lithography.

14. The method of claim 11, further comprising functionalizing the exposed cross-sectional surface of the first band electrode and/or the exposed cross-sectional surface of the second band electrode.

15. The method of claim 11, further comprising:

immersing the test surface of the band electrode array, a reference electrode and a counter electrode in an electrolyte;

applying a voltage on one of the band electrodes relative to the reference electrode such that a desired electrochemical reaction is induced on the exposed cross-sectional surface of the one band electrode and a desired chemical species is deposited thereon;

optionally applying another voltage at the same time to the other band electrode relative to the reference electrode such that no electrical current flows through the other band electrode.

16. The method of claim 14, wherein the desired chemical species is alkane thiols with different end groups, aromatic diazonium ions with different end groups, aromatic amines with different end groups, aliphatic or aromatic alcohols with different end groups, aliphatic and/or aromatic carboxylic compounds with different end groups, dihydroxy bezaldehydes with different end groups or a combination thereof.

17. A method of using the band electrode array of claim 1, comprising:

immersing the test surface of the band electrode array, a reference electrode and a counter electrode in an analyte solution;

applying a first voltage signal to the first band electrode such that a first electrochemical reaction is induced on the exposed cross-sectional surface of the first band electrode and a reaction product is generated in the vicinity thereof;

applying a second voltage signal to the second band electrode such that the reaction product undergoes a second electrochemical reaction on the exposed cross-sectional surface of the second band electrode and a resultant electrical current flows through the second band electrode; and

detecting and analyzing the electrical current through the second band electrode to determine characteristics of the first electrochemical reaction and properties of the reaction product.

18. The method of claim 17, further comprising:

terminating the second voltage signal as applied to the second band electrode; and

applying the second voltage signal to a third band electrode such that the reaction product undergoes an electrochemical reaction on the exposed cross-sectional surface of the third band electrode and the resultant electrical current flows through the third band electrode.

19. The method of claim 17, wherein the first voltage signal and/or the second voltage signal are constant DC voltages or voltages changing with time.

20. The method of claim 17, wherein the voltages changing with time are triangular voltage signals, sawtooth voltage signals, staircase signals, and/or a combination thereof.

21. The band electrode array of claim 1, wherein the thickness of the first band electrode is different than the thickness of the second band electrode.

22. The band electrode array of claim 1, wherein the width of the exposed cross-sectional surface of first band electrode is different than the width of the exposed cross-sectional surface of the second band electrode.

23. The band electrode array of claim 1, wherein the thickness of the first band electrode is different than the thickness of the second band electrode, and the width of the exposed cross-sectional surface of the first band electrode is different than the width of the exposed cross-sectional surface of the second band electrode.