Individually addressable band electrode arrays and methods to prepare the same
First Claim
1. A band electrode array comprising:
- a substrate;
a first insulating layer disposed on the substrate;
a first band electrode disposed on the first insulating layer;
wherein the first band electrode has a thickness of about 1 nm-about 5000 nm and an exposed cross-sectional surface having a width of about 1 μ
m-about 1 cm;
a second insulating layer disposed on the first insulating layer and completely covering the first band electrode;
wherein the second insulating layer has a thickness of about 100 nm-about 500 μ
m;
a second band electrode disposed on the second insulating layer;
wherein the thickness of the second band electrode is about 1 nm-about 5000 nm and width of the exposed cross-sectional surface of the second band electrode is about 1 μ
m-about 1 cm;
a third insulating layer is disposed on the second insulating layer and completely covering the second band electrode;
wherein the first and second band electrodes are electrically insulated from each other and individually addressable;
cross-sectional surfaces of the first and second band electrodes are exposed on the test surface and coextensive with the test surface; and
the exposed cross-sectional surfaces substantially overlap each other in a direction perpendicular to the substrate.
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Accused Products
Abstract
Band electrode arrays, methods of manufacturing, and a method of using are disclosed. The arrays have individually addressable band electrodes such that diffusion layers of the band electrodes overlap. An exemplary method of manufacturing may comprise: a first insulating layer is disposed on a substrate; a first band electrode is disposed on the first insulating layer; a second insulating layer is disposed on the first insulating layer and completely covers the first band electrode; a second band electrode is disposed on the second insulating layer; a third insulating layer is disposed on the second insulating layer and completely covers the second band electrode; the first and second band electrodes are electrically insulated from each other and individually addressable; cross-sectional surfaces of the first and second band electrodes are exposed on the test surface; and these exposed cross-sectional surfaces substantially overlap each other in a direction perpendicular to the substrate.
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Citations
23 Claims
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1. A band electrode array comprising:
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a substrate; a first insulating layer disposed on the substrate; a first band electrode disposed on the first insulating layer;
wherein the first band electrode has a thickness of about 1 nm-about 5000 nm and an exposed cross-sectional surface having a width of about 1 μ
m-about 1 cm;a second insulating layer disposed on the first insulating layer and completely covering the first band electrode;
wherein the second insulating layer has a thickness of about 100 nm-about 500 μ
m;a second band electrode disposed on the second insulating layer;
wherein the thickness of the second band electrode is about 1 nm-about 5000 nm and width of the exposed cross-sectional surface of the second band electrode is about 1 μ
m-about 1 cm;a third insulating layer is disposed on the second insulating layer and completely covering the second band electrode; wherein the first and second band electrodes are electrically insulated from each other and individually addressable;
cross-sectional surfaces of the first and second band electrodes are exposed on the test surface and coextensive with the test surface; and
the exposed cross-sectional surfaces substantially overlap each other in a direction perpendicular to the substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23)
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Specification