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Radio frequency power load and associated method

  • US 8,902,015 B1
  • Filed: 11/18/2011
  • Issued: 12/02/2014
  • Est. Priority Date: 11/18/2011
  • Status: Active Grant
First Claim
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1. A radio frequency power load apparatus, comprising:

  • a container;

    a first fluid having an ion source therein, the first fluid being surrounded by the container;

    a first conductor immersed in the first fluid;

    a second conductor electrically connected to the container; and

    the first and second conductors electrically connected to the first fluid;

    wherein the apparatus is adjusted to a selected frequency by adjusting any one of a size, a material composition, and a position of the first conductor.

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