Resonator and method of controlling the same

• US 8,902,022 B2
• Filed: 03/26/2012
• Issued: 12/02/2014
• Est. Priority Date: 03/28/2011
• Status: Active Grant

• Current Assignee: NXP B.V. (NXP Semiconductors NV)
• Original Assignee: NXP B.V. (NXP Semiconductors NV)
• Inventors: Jansman, Andreas Bernardus Maria, VAN DER AVOORT, CASPER
• Primary Examiner(s): Jones, Stephen
• Assistant Examiner(s): OUTTEN, SAMUEL S
• Application Number:
  US13/430,275
• Publication Number:
  US 20120249265A1
• Time in Patent Office: 981 Days
• Field of Search: 333/186
• US Class Current: 333/186
• CPC Class Codes: H03H 2009/02251 Design
• CPC Class Codes: H03H 2009/02488 Vibration modes
• CPC Class Codes: H03H 9/02259 Driving or detection means
• CPC Class Codes: H03H 9/02433 Means for compensation or elimination of undesired effects
• CPC Class Codes: H03H 9/2452 Free-free beam resonators

Abstract

A resonator comprising a resonator body and actuation electrodes for driving the resonator into a resonant mode, in which the resonator body vibrates parallel to a first axis. The resonator comprises means to apply a voltage to the resonator in a direction perpendicular to the first axis direction. This serves to shift the frequency of resonant modes other than the principal resonant mode, and this allows increased amplitude of output signal from the resonator.

Claims

1. A resonator comprising:

a resonator body;

an actuation electrode that is configured to drive the resonator into a resonant mode in which the resonator body vibrates parallel to a first axis; and

a detection arrangement that is configured to detect the vibration in the first axis direction and generate an electrical output signal derived from the vibration, wherein the resonator comprises an element configured to apply a bias voltage to the resonator body, using at least one bias electrode separated from the resonator body by a non-conductive gap extending in a direction perpendicular to the first axis direction, wherein the application of the bias voltage shifts an eigenfrequency of a parasitic mode.

2. The resonator as claimed in claim 1, wherein the element configured to apply the bias voltage further comprises:

a counter-electrode placed in a direction perpendicular to the first axis direction from the resonator body; and

a voltage source that is configured to apply a voltage between the resonator body and the counter-electrode.

3. The resonator as claimed in claim 1, wherein the element configured to apply the bias voltage further comprises:

a voltage source that is configured to apply a voltage between the resonator body and a carrier substrate beneath the resonator body.

4. The resonator as claimed in claim 1, wherein the element configured to apply the bias voltage is configured to apply a constant voltage.

5. The resonator as claimed claim 1, wherein the element configured to apply the bias voltage further comprises:

a feedback circuit that is configured to regulate the bias voltage.

6. The resonator as claimed in claim 5, wherein the feedback circuit has as input the electrical output signal.

7. The resonator as claimed in claim 5, wherein the feedback circuit further comprises:

an element that is configured to measure a vibration transverse to the first axis direction.

8. The resonator as claimed in claim 7, wherein the element that is configured to measure a vibration further comprises:

a capacitance sensor.

9. The resonator as claimed in claim 1, wherein the resonator is a MEMS resonator.

10. The resonator as claimed in claim 9, wherein the resonator body further comprises:

a pair of arms which extend along the first axis direction, with a head at each end of the pair of arms, and wherein the element configured to apply the voltage further comprises;

a first electrode on one side of one head or a first pair of electrodes on opposite sides of the one head, transverse to the first axis direction; and

a second electrode on one side of the other head.

11. The resonator as claimed in claim 10, wherein the actuation electrodes are at the ends of the heads positioned along a central axis in the first axis direction of the resonator.

12. A method of controlling a resonator which comprises a resonator body and an actuation electrode for driving the resonator into a resonant mode, in which the resonator body vibrates parallel to a first axis, the method comprising:

applying a bias voltage to the resonator body, using at least one bias electrode separated from the resonator body by a non-conductive gap extending in a direction perpendicular to the first axis direction, wherein the application of the bias voltage shifts an eigenfrequency of a parasitic mode;

detecting the vibration in the first axis direction; and

generating an electrical output signal derived from the vibration.

13. The method as claimed in claim 12, further comprising:

controlling the voltage based on analysis of the electrical output signal, thereby to minimize parasitic vibrations perpendicular to the first axis direction.

14. The method as claimed in claim 12, further comprising:

controlling the voltage based on detecting a position of the resonator body, thereby to minimize parasitic vibrations perpendicular to the first axis direction.

15. The method as claimed in claim 14, further comprising:

measuring a capacitance between the resonator body and a bias electrode to detect the position of the resonator body.