Acoustic resonator structure having an electrode with a cantilevered portion
First Claim
Patent Images
1. An acoustic resonator, comprising:
- a first electrode;
a second electrode comprising a plurality of sides, wherein the second electrode has a planar portion;
a cantilevered portion extending from one or more of the plurality of sides, wherein the cantilevered portion comprises a first part and a second part and the first part is oriented at an angle less than 90°
relative to the planar portion of the second electrode, wherein the first part and the second part of the cantilevered portion are not disposed in a plane of the planar portion; and
a piezoelectric layer disposed between the first and second electrodes, the cantilevered portion extending above the piezoelectric layer, wherein an air gap exists between the cantilevered portion and the piezoelectric layer.
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Abstract
An acoustic resonator comprises a first electrode and second electrode comprising a plurality of sides. At least one of the sides of the second electrode comprises a cantilevered portion. A piezoelectric layer is disposed between the first and second electrodes. An electrical filter comprises an acoustic resonator.
510 Citations
25 Claims
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1. An acoustic resonator, comprising:
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a first electrode; a second electrode comprising a plurality of sides, wherein the second electrode has a planar portion; a cantilevered portion extending from one or more of the plurality of sides, wherein the cantilevered portion comprises a first part and a second part and the first part is oriented at an angle less than 90°
relative to the planar portion of the second electrode, wherein the first part and the second part of the cantilevered portion are not disposed in a plane of the planar portion; anda piezoelectric layer disposed between the first and second electrodes, the cantilevered portion extending above the piezoelectric layer, wherein an air gap exists between the cantilevered portion and the piezoelectric layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. An acoustic resonator, comprising:
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a first electrode; a second electrode comprising a plurality of sides, wherein at least one of the sides comprises a cantilevered portion; a piezoelectric layer disposed between the first and second electrodes; a reflective element disposed beneath the first electrode, the second electrode and the piezoelectric layer, a contacting overlap of the reflective element, the first electrode, the second electrode and the piezoelectric layer defining an active area of the acoustic resonator, wherein the first electrode substantially covers the reflective element, and the piezoelectric layer extends over an edge of the first electrode; and a bridge disposed adjacent to a termination of the active area of the acoustic resonator, the bridge extending past an edge of the reflective element. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16, 17, 18)
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19. An acoustic resonator, comprising:
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a first electrode; a second electrode comprising a plurality of sides, wherein the second electrode has a planar portion; a cantilevered portion extending from one or more of the plurality of sides, wherein the cantilevered portion comprises a first part and a second part and the first part is oriented at an angle less than 90°
relative to the planar portion of the second electrode;a piezoelectric layer disposed between the first and second electrodes, the cantilevered portion extending above the piezoelectric layer, wherein a gap exists between the cantilevered portion and the piezoelectric layer; and a bridge disposed along the one side of the second electrode that does not comprise one of the cantilevered portions. - View Dependent Claims (20, 21, 22, 23, 24, 25)
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Specification