Evaporator with internal restriction
First Claim
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1. A method of flash evaporating a liquid, the method comprising:
- introducing the liquid into an inlet of a vaporization chamber;
passing the liquid through an atomizer that is configured to ultrasonically vaporize the introduced liquid; and
passing the vaporized liquid through a vapor nozzle that is fluidly cooperative with a vapor outlet of the vaporization chamber, where a collar with a first portion that forms an annular ring and a second portion that are removably connected to one another is placed in fluid communication with the vaporization chamber such that an outwardly extending first portion of the collar forms a non-filtered single opening with a substantially unobstructed vapor flowpath therethrough such that upon the passage of the vaporized liquid through the collar, it increases a pressure in the vaporization chamber while leaving the conductance of the vapor through the vapor nozzle substantially unchanged, the first portion further defining a first annular flange and the second portion defining a second annular flange that is placed adjacent the first portion such that at least the second portion defines a smaller cross-sectional area than the vapor outlet.
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Abstract
An evaporator includes a vaporization chamber having a monomer inlet and a vapor outlet. There is a vapor nozzle in the vapor outlet. The evaporator also includes a collar positioned between the vaporization chamber and the vapor nozzle which increases the pressure in the evaporation chamber while the conductance through the nozzle is substantially unchanged.
311 Citations
16 Claims
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1. A method of flash evaporating a liquid, the method comprising:
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introducing the liquid into an inlet of a vaporization chamber; passing the liquid through an atomizer that is configured to ultrasonically vaporize the introduced liquid; and passing the vaporized liquid through a vapor nozzle that is fluidly cooperative with a vapor outlet of the vaporization chamber, where a collar with a first portion that forms an annular ring and a second portion that are removably connected to one another is placed in fluid communication with the vaporization chamber such that an outwardly extending first portion of the collar forms a non-filtered single opening with a substantially unobstructed vapor flowpath therethrough such that upon the passage of the vaporized liquid through the collar, it increases a pressure in the vaporization chamber while leaving the conductance of the vapor through the vapor nozzle substantially unchanged, the first portion further defining a first annular flange and the second portion defining a second annular flange that is placed adjacent the first portion such that at least the second portion defines a smaller cross-sectional area than the vapor outlet. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A method of flash evaporating a liquid, the method comprising:
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introducing the liquid into an inlet of a vaporization chamber that also has a vapor outlet; passing the liquid through an atomizer that is configured to ultrasonically vaporize the introduced liquid; and passing the vaporized liquid through a vapor nozzle that is fluidly cooperative with the vapor outlet, where a fluid passageway formed at least in part by a collar placed in fluid communication with the vapor outlet and vapor nozzle is defined by an outwardly extending first portion comprising an annular ring with an annular flange removably connected to a second portion comprising an annular flange, the fluid passageway forming a substantially unobstructed vapor flowpath such that upon the passage of the vaporized liquid through the collar, it increases a pressure in the vaporization chamber while leaving the conductance of the vapor through the vapor nozzle substantially unchanged, the annular flanges of the first and second portions being adjacently placed such that at least the second portion defines a smaller cross-sectional area than the vapor outlet. - View Dependent Claims (12, 13, 14)
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15. A method of depositing a flash evaporated liquid, the method comprising:
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introducing the liquid into an inlet of a vaporization chamber that also has a vapor outlet; passing the liquid through an atomizer that is configured to ultrasonically vaporize the introduced liquid; passing the vaporized liquid through a vapor nozzle that is fluidly cooperative with the vapor outlet, where a collar with a first portion that forms a flanged annular ring and a second portion that are removably connected to one another is placed in fluid communication with the vapor outlet and vapor nozzle such that an outwardly extending part of the first portion and an adjacently placed flanged part of the second portion defines a non-filtered single opening with a substantially unobstructed vapor flowpath therethrough such that upon the passage of the vaporized liquid through the collar, it increases a pressure in the vaporization chamber while leaving the conductance of the vapor through the vapor nozzle substantially unchanged; and accumulating material on a substrate that is placed in fluid communication with the vapor nozzle. - View Dependent Claims (16)
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Specification