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Zero-mode waveguides with non-reflecting walls

  • US 8,906,670 B2
  • Filed: 09/08/2010
  • Issued: 12/09/2014
  • Est. Priority Date: 09/11/2009
  • Status: Active Grant
First Claim
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1. A zero-mode waveguide structure comprising:

  • a) a transparent substrate having a top surface;

    b) an opaque layer comprising a metal disposed upon the top surface of the transparent substrate;

    c) an array of apertures extending through the opaque layer to the transparent substrate whereby the apertures comprise wells having walls and bases, the bases of the wells comprising portions of the top surface of the transparent substrate; and

    d) a non-reflective layer comprising an oxide formed by oxidation of the metal disposed on the walls of the wells wherein the thickness of the non-reflective layer is greater than about 10 nm.

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