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High speed backside illuminated, front side contact photodiode array

  • US 8,907,440 B2
  • Filed: 07/31/2013
  • Issued: 12/09/2014
  • Est. Priority Date: 05/05/2003
  • Status: Active Grant
First Claim
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1. A photodiode array having a front side and a back side separated by a layer of silicon and a top edge, a bottom edge, a right edge, and a left edge, comprising:

  • a plurality of metallic cathode pads extending from a surface of said front side of the photodiode array, wherein each of said metallic cathode pads is in physical contact with at least one n+ doped region and wherein said metallic cathode pads are interconnected by a metallic connections;

    a plurality of metallic cathode pads extending from a surface of said back side of the photodiode array wherein each of said metallic cathode pads is in physical contact with a second n+ doped region and wherein said metallic cathode pads are interconnected by a metallic connections; and

    an anode pad extending from the said front side of the photodiode array, wherein said anode pad is in physical contact with a p+ doped region.

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