System comprising a semiconductor device and structure
First Claim
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1. A 3D IC based system, comprising:
- a first layer comprising first transistors;
an interconnection layer overlying said first transistors, said interconnection layer providing interconnection for said first transistors;
a bonding layer overlying said interconnection layer;
a second layer overlying said bonding layer; and
a carrier substrate for the transferring of said second layer,wherein said second layer comprises at least one through second layer via,wherein said at least one through second layer via has a diameter of less than 100 nm,wherein said second layer comprises a plurality of second transistors, andwherein said second layer is transferred from a donor wafer.
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Abstract
A semiconductor device, including: a first layer including first transistors; an interconnection layer overlying the first transistors, the interconnection layer providing interconnection for the first transistors; a bonding layer overlying the interconnection layer; a second layer overlying the bonding layer; and a carrier substrate for the transferring of the second layer, where the second layer includes at least one through second layer via, where the at least one through second layer via has a diameter of less than 100 nm, where the second layer includes a plurality of second transistors, and where the second layer is transferred from a donor wafer.
637 Citations
30 Claims
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1. A 3D IC based system, comprising:
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a first layer comprising first transistors; an interconnection layer overlying said first transistors, said interconnection layer providing interconnection for said first transistors; a bonding layer overlying said interconnection layer; a second layer overlying said bonding layer; and a carrier substrate for the transferring of said second layer, wherein said second layer comprises at least one through second layer via, wherein said at least one through second layer via has a diameter of less than 100 nm, wherein said second layer comprises a plurality of second transistors, and wherein said second layer is transferred from a donor wafer. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A 3D IC based system, comprising:
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a first layer comprising first transistors; an interconnection layer overlying said first transistors, said interconnection layer providing interconnection for said first transistors; a bonding layer overlying said interconnection layer; a second layer overlying said bonding layer; and a reusable carrier substrate for the transferring of said second layer, wherein said second layer comprises at least one through second layer via, wherein said at least one through second layer via has a diameter of less than 100 nm, wherein said second layer comprises a plurality of second transistors, and wherein said second layer is transferred from a donor wafer. - View Dependent Claims (9, 10, 11, 12, 13, 14)
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15. A semiconductor device, comprising:
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a first layer comprising first transistors; an interconnection layer overlying said first transistors, said interconnection layer providing interconnection for said first transistors; a bonding layer overlying said interconnection layer; and a second layer overlying said bonding layer, wherein said second layer comprises a plurality of second transistors on one side of said second layer and a plurality of third transistors on a second side of said second layer. - View Dependent Claims (16, 17, 18, 19, 20, 21)
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22. A semiconductor device, comprising:
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a first layer comprising first transistors; an interconnection layer overlying said first transistors, said interconnection layer providing interconnection for said first transistors; a bonding layer overlying said interconnection layer; a second layer overlying said bonding layer, wherein said second layer comprises a plurality of second transistors on a first side of said second layer, wherein said first side faces said interconnection layer; and at least one through second layer via, wherein said at least one through second layer via has a diameter of less than 100 nm. - View Dependent Claims (23, 24, 25, 26, 27, 28, 29, 30)
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Specification