Thermal stress resistant resonator, and a method for fabricating same
First Claim
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1. A thermal stress resistant resonator comprising:
- a monolithic piezoelectric member having at least two separate folded spring piezoelectric support members integrally extending therefrom, wherein the monolithic piezoelectric member and the folded spring piezoelectric support members are part of a single piece of shear mode resonating AT- or SC-cut quartz; and
whereineach of the at least two folded spring piezoelectric support members comprises at least two arms extending generally along a first direction, connected by a third arm extending generally along a second direction perpendicular to the first direction.
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Abstract
In an embodiment, a thermal stress resistant resonator is disclosed. The thermal stress resistant resonator may include or comprise a piezoelectric member having one or more non-linear piezoelectric support members extending there from.
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Citations
12 Claims
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1. A thermal stress resistant resonator comprising:
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a monolithic piezoelectric member having at least two separate folded spring piezoelectric support members integrally extending therefrom, wherein the monolithic piezoelectric member and the folded spring piezoelectric support members are part of a single piece of shear mode resonating AT- or SC-cut quartz; and
whereineach of the at least two folded spring piezoelectric support members comprises at least two arms extending generally along a first direction, connected by a third arm extending generally along a second direction perpendicular to the first direction. - View Dependent Claims (2)
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3. A thermal stress resistant resonator comprising:
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a monolithic piezoelectric member disposed between first and second electrodes; and a first folded spring support member including; a first non-linear signal line extending from said first electrode; and a first piezoelectric support member integrally extending from said monolithic piezoelectric member, said first non-linear signal line being disposed on or adjacent to said first piezoelectric support member; and a second folded spring support member including; a second non-linear signal line extending from said second electrode; and a second piezoelectric support member integrally extending from said monolithic piezoelectric member separately from said first piezoelectric support member, said second non-linear signal line being disposed on or adjacent to said second piezoelectric support member; wherein the monolithic piezoelectric member and the first and second support members comprise a single piece of shear mode resonating AT- or SC-cut quartz and wherein each of the first and second support members comprises at least two arms extending generally along a first direction, connected by a third arm extending generally along a second direction perpendicular to the first direction.
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4. A thermal stress resistant resonator comprising:
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a monolithic quartz member disposed between first and second electrodes; and
a first folded spring support member including;a first non-linear signal line extending from said first electrode; and a first quartz support member integrally extending from said monolithic quartz member, said first non-linear signal line being disposed on or adjacent to said first non-linear quartz support member; a second non-linear signal line extending from said second electrode; and a second quartz support member integrally extending from said monolithic quartz member separately from the first quartz support member, said second non-linear signal line being disposed on or adjacent to said second non-linear quartz support member; wherein the monolithic quartz member and the first and second quartz support member comprise each a single piece of shear mode resonating AT- or SC-cut quartz; and wherein each of the first and second support members comprises at least two arms extending generally along a first direction, connected by a third arm extending generally along a second direction perpendicular to the first direction. - View Dependent Claims (5, 6, 7)
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8. A method of fabricating a thermal stress resistant resonator, said method comprising:
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providing first and second electrodes; disposing a quartz member between said first and second electrodes; and
providing a first spring support member including;a first non-linear signal line extending from said first electrode; and a first non-linear quartz support member extending from said quartz member, said first non-linear signal line being disposed on or adjacent to said first non-linear quartz support member;
the method further comprising;providing a second spring support member including; a second non-linear signal line extending from said second electrode; and a second non-linear quartz support member extending separately from said first non-linear quartz support member from said quartz member, said second non-linear signal line being disposed on or adjacent to said second nonlinear quartz support member; wherein the quartz member and the first and second quartz support member form part of a single piece of shear mode resonating AT- or SC-cut quartz; and
wherein each of the first and second support members comprises at least two arms extending generally along a first direction, connected by a third arm extending generally along a second direction perpendicular to the first direction. - View Dependent Claims (9, 10, 11, 12)
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Specification