Method and device for measuring freeform surfaces

• US 8,913,236 B2
• Filed: 08/30/2011
• Issued: 12/16/2014
• Est. Priority Date: 08/30/2011
• Status: Active Grant

• Current Assignee: Corning Incorporated
• Original Assignee: Corning Incorporated
• Inventors: Vankerkhove, Steven J
• Primary Examiner(s): Punnoose, Roy M
• Application Number:
  US13/220,826
• Publication Number:
  US 20130054192A1
• Time in Patent Office: 1,204 Days
• Field of Search: 356/124, 356/125
• US Class Current: 356/124
• CPC Class Codes: G01B 11/24 for measuring contours or curvatures
• CPC Class Codes: G01B 9/02039 by matching the wavefront with a particular object surface shape
• CPC Class Codes: G01M 11/005 Testing of reflective surfaces, e.g. mirrors

Abstract

An optical measuring instrument for measuring aspheric surfaces includes an optical measuring arm and a multi-axis drive platform. The optical measuring arm provides for illuminating and imaging the aspheric surfaces. The multi-axis drive platform relatively moves the optical measuring arm with respect to the aspheric surfaces through a plurality of subaperture measurement positions. A focus of adjustable focusing optic is maintained at a nominal center of curvature of the aspheric surfaces. A variable optical aberrator adds aberration to an illumination wavefront to match the illumination wavefront to the intended local shape of the aspheric surface. Fitted low-frequency shape information is distinguished from a remainder of the local shape information yielding mid-frequency topographic measurements of the subapertures, which can be assembled to construct a profile measurement of the aspheric surface.

Claims

1. An optical measuring instrument for measuring aspheric surfaces, the optical measuring instrument comprising:

an optical measuring arm including a detector that captures information regarding wavefront shape, and imaging optics incorporating a variable focusing optic that images subapertures of an aspheric surface onto the detector; and

a multi-axis drive platform including first and second rotational axes that relatively moves the optical measuring arm with respect to the aspheric surface through a plurality of subaperture measurement positions, a first translational axis along which are maintained different centers of curvature associated with a predetermined local shape of the aspheric surface at a crossing point of the first and second rotational axes through the plurality of subaperture measurement positions, and a second translational axis along which are maintained the subapertures of the aspheric surface conjugate to the detector through the plurality of subaperture measurement positions,

wherein the variable focusing optic maintains a focus of the focusing optic at the crossing point of the first and second rotational axes through the plurality of subaperture measurement positions.

2. The optical measuring instrument of claim 1, wherein the multi-axis drive platform relatively moves the aspheric surface along first translational axis with respect to the crossing point and relatively moves the measuring arm along the second translational axis with respect to the crossing point.

3. The optical measuring instrument of claim 1 further comprising an illumination field aperture having a predetermined size and located optically conjugate to both the subapertures of the aspheric surface and the detector through the plurality of subaperture measurement positions.

4. The optical measuring instrument of claim 3 further comprising sensors that monitor rotational positions of the first and second rotational axes, the detector being arranged to capture subaperture images of the aspheric surface and the illumination field aperture through the plurality of subaperture measurement positions, and a processor that processes the monitored rotational positions and the subaperture images of the aspheric surface and the illumination field aperture to assemble a profile measurement of the aspheric surface.

5. The optical measuring instrument of claim 1, wherein the variable focusing optic shapes an illumination wavefront, and further comprising a variable optical aberrator that adds aberration to the illumination wavefront to substantially match the illumination wavefront to the determined local shape of the aspheric surface.

6. The optical measuring instrument of claim 5, wherein the variable focusing optic functions as an objective and the variable optical aberrator is located adjacent to the variable focusing optic.

7. The optical measuring instrument of claim 5 further comprising a processor that (a) extracts local shape information from the subaperture images of the aspheric surface captured by the detector, (b) distinguishes fitted low-frequency shape information having an order corresponding to an order of aberration that defines the predetermined local shape of the aspheric surface from a remainder of the local shape information yielding mid-frequency profile measurements of the subapertures and (c) assembles the mid-frequency profile measurements of the subapertures to obtain a profile measurement of the aspheric surface.

8. The optical measuring instrument of claim 7, wherein the fitted low-frequency shape information includes terms corresponding to one or more aberrations introduced into the illumination wavefront and other terms corresponding to one or more aberrations not introduced into the illumination wavefront, wherein the value of the other terms within the fitted low-frequency shape information discounted by the value of corresponding terms defining the predetermined local shape of the aspheric surface is processed by the processor to restore low frequency shape information to the profile measurement of the aspheric surface.

9. A method of measuring aspheric surfaces, the method comprising:

mounting a test object having an aspheric surface on a multi-axis drive platform having drive axes that relatively moves an optical measuring arm, including a detector and imaging optics incorporating a variable focusing optic, with respect to the aspheric surface;

relatively rotating the measuring arm with respect to the aspheric surface about two rotational axes to illuminate a succession of subapertures of the aspheric surface and imaging the succession of subapertures onto the detector;

relatively moving the aspheric surface with respect to a crossing point of the two rotational axes to maintain different local centers of curvature associated with the predetermined shape of the aspheric surface at the crossing point through the succession of subapertures;

relatively moving the measuring arm with respect to the crossing point to maintain the subapertures of the aspheric surface conjugate to the detector; and

adjusting the adjustable focusing optic to maintain a focus of the focusing optic at the crossing point through the succession of subapertures.

10. The method of claim 9 further comprising imaging an illumination field aperture having a predetermined size onto both the aspheric surface and the detector through the succession of subapertures.

11. The method of claim 10 further comprising monitoring rotational positions around the rotational axes and processing the monitored rotational positions together with the images of the subapertures of the aspheric surface and the illumination field aperture to provide a profile measurement of the aspheric surface.

12. The method of claim 9 further comprising locating the variable focusing optic between a remainder of the imaging optics and the aspheric surface to shape an illumination wavefront, and adding aberration to the illumination wavefront with a variable optical aberrator to substantially match the illumination wavefront to the predetermined local shape of the aspheric surface.

13. The method of claim 9 further comprising:

extracting local shape information from subaperture images of the aspheric surface;

distinguishing fitted low-frequency shape information having an order corresponding to an order of aberration that defines the predetermined local shape of the aspheric surface from a remainder of the local shape information yielding mid-frequency profile measurements of the subapertures; and

assembling the mid-frequency profile measurements of the subapertures to construct a profile measurement of the aspheric surface.

14. The method of claim 13 wherein the fitted low-frequency shape information includes terms corresponding to one or more aberrations introduced into the illumination wavefront and other terms corresponding to one or more aberrations not introduced into the illumination wavefront, the method further comprising discounting the value of the other terms within the fitted low-frequency shape information by the value of corresponding terms defining the predetermined local shape of the aspheric surface and appending low frequency shape information to the profile measurement of the aspheric surface based on the discounted values.

15. An optical measuring instrument for measuring freeform surfaces, the optical measuring instrument comprising:

an optical measuring arm including a wavefront detector and optics that shape an illumination wavefront and imaging subapertures of a freeform surface onto the wavefront detector as a test wavefront, wherein the optics include a variable focusing optic and a variable optical aberrator that adds aberration to the illumination wavefront to substantially match the illumination wavefront to a predetermined local shape of the aspheric surface within subapertures of the freeform surface;

a multi-axis drive platform that relatively moves the optical measuring arm with respect to the freeform surface through a succession of measurement positions to illuminate the subapertures of the freeform surface and to image the illuminated subapertures onto the detector;

and

a processor that (a) extracts local shape information from the imaged subapertures of the freeform surface, (b) distinguishes fitted low-frequency shape information having an order corresponding to an order of aberration that defines the predetermined local shape of the freeform surface from the local shape information yielding mid-frequency profile measurements of the subapertures and (c) assembles the mid-frequency profile measurements of the subapertures to construct a profile measurement of the freeform surface.

16. The optical measuring instrument of claim 15, wherein the variable focusing optic contributes second order defocus to the illumination wavefront and the variable optical aberrator contributes at least one of a second order astigmatism and a third order coma to the illumination wavefront to substantially match the illumination wavefront to the predetermined local shape of the freeform surface within a measurement range of the wavefront detector.

17. The optical measuring instrument of claim 16, wherein the fitted low-frequency shape information includes terms corresponding to the contributions of the variable focusing optic and the variable optical aberrator to the illumination wavefront.

18. The optical measuring instrument of claim 15, wherein the variable focusing optic functions as an objective and the variable optical aberrator is located adjacent to the variable focusing optic.

19. The optical measuring instrument of claim 15, wherein the optical measuring arm includes an illuminator aperture and the optics that shape the illumination wavefront and imaging subapertures of the freeform surface image the illuminator aperture onto the freeform surface and image the illuminator aperture together with the freeform surface onto the wavefront detector.

20. The optical measuring instrument of claim 19, wherein the illuminator aperture has a predetermined size and the processor scales the size of the imaged subapertures to the predetermined size of the illuminator aperture.

21. The optical measuring instrument of claim 15, wherein the multi-axis drive platform comprises:

first and second rotational axes about which the multi-axis drive platform relatively moves the optical measuring arm with respect to the freeform surface through the succession of measurement positions

a first translational axis along which are maintained different centers of curvature associated with a predetermined local shape of the freeform surface at a crossing point of the first and second rotational axes through the succession of measurement positions; and

a second translational axis along which are maintained the subapertures of the freeform surface conjugate to the detector through the succession of measurement positions.

22. The optical measuring instrument of claim 20, wherein the variable focusing optic is adjustable to maintain a focus of the focusing optic at the crossing point of the first and second rotational axis through the succession of measurement positions.

23. A method of measuring freeform surfaces of test objects, the method comprising:

mounting a test object having a freeform surface on a multi-axis drive platform that relatively moves an optical measuring arm with respect to the freeform surface through a succession of measurement positions;

adjustably focusing an illumination wavefront through an adjustable focusing optic to illuminate subapertures of the freeform surface at the succession of measurement positions;

imaging the illuminated subapertures of the freeform surface onto a wavefront detector in the form of test wavefronts reflected from the freeform surface at the succession of measurement positions;

capturing shape information from the test wavefronts that are imaged onto the wavefront detector at the succession of measurement positions;

fitting low-frequency shape information having an order corresponding to an order of aberration that defines the predetermined shape of the freeform surface at the succession of measurement positions

distinguishing the low-frequency shape information from the captured shape information yielding mid-frequency profile measurements of the subapertures; and

assembling the mid-frequency profile measurements of the subapertures to construct a profile measurement of the freeform surface.

24. The method of claim 23, wherein the fitted low-frequency shape information includes terms corresponding to one or more aberrations introduced into the illumination wavefront and other terms corresponding to one or more aberrations not introduced into the illumination wavefront, the method further comprising discounting the value of the other terms within the fitted low-frequency shape information by the value of corresponding terms defining the predetermined local shape of the aspheric surface and appending low frequency shape information to the profile measurement of the aspheric surface based on the discounted values.

25. The method of claim 24, wherein adjustably focusing an illumination wavefront contributes a defocus aberration to the illumination wavefront and the method further comprising further aberrating the illumination wavefront to substantially match the illumination wavefront to the predetermined local shape of the freeform surface.

26. The method of claim 23, further comprising imaging an illumination field aperture having a predetermined size onto both the freeform surface and the wavefront detector at the succession of measurement positions.