Motion conversion system

• US 8,915,148 B2
• Filed: 09/14/2012
• Issued: 12/23/2014
• Est. Priority Date: 12/22/2006
• Status: Active Grant

• Current Assignee: Texas Instruments, Inc.
• Original Assignee: Texas Instruments, Inc.
• Inventors: Knipe, Richard Lee
• Primary Examiner(s): Caputo, Lisa
• Assistant Examiner(s): DAVIS-HOLLINGTON, OCTAVIA L
• Application Number:
  US13/618,788
• Publication Number:
  US 20130213164A1
• Time in Patent Office: 830 Days
• Field of Search: 738/62
• US Class Current: 73/862
• CPC Class Codes: B81B 2201/038 Microengines and actuators not provided for in B81B2201/031 - B81B2201/037
• CPC Class Codes: B81B 2203/051 Translation according to an axis parallel to the substrate
• CPC Class Codes: B81B 2203/058 Rotation out of a plane parallel to the substrate
• CPC Class Codes: B81B 3/0032 Structures for transforming energy not provided for in groups B81B3/0021 - B81B3/0029
• CPC Class Codes: B81B 5/00 Devices comprising elements which are movable in relation to each other, e.g. comprising slidable or rotatable elements
• CPC Class Codes: F16H 21/16 for interconverting rotary motion and reciprocating motion
• CPC Class Codes: F16H 21/44 for conveying or interconverting oscillating or reciprocating motions
• CPC Class Codes: F16H 21/50 for interconverting rotary motion and reciprocating motion F16H23/00 takes precedence
• CPC Class Codes: Y10T 74/18056 Rotary to or from reciprocating or oscillating
• CPC Class Codes: Y10T 74/18568 Reciprocating or oscillating to or from alternating rotary
• CPC Class Codes: Y10T 74/1892 Lever and slide

Abstract

A motion conversion system is described. The motion conversion system comprises a first torsional member operative for rotating in a first direction. A second torsional member is offset a distance from the first torsional member, wherein the second torsional member is operative for rotating in a direction opposite from the first direction. And, a lateral member has a lower surface connected to the first and second torsional members. Wherein, translational movement of the lateral member results from rotational movement of the first and second torsional members.

Claims

1. A microelectromechanical system (MEMS) device, comprising:

a movable first MEMS component;

a second MEMS component comprising a support structure fixed for rotation about a first axis and separated by a clearance distance from the first MEMS component; and

a hinge element having a first end connected to the second MEMS component and a second end connected to the first MEMS component;

the first MEMS component, second MEMS component, hinge and first and second hinge ends aligned along a second axis orthogonal to the first axis; and

the hinge element configured and dimensioned so that rotational movement of the second MEMS component about the first axis causes corresponding, complementary rotational movement of the first MEMS component, causing translational movement of the first MEMS component in a direction orthogonal to the first and second axes.

2. The device of claim 1, wherein the first end is connected to the second MEMS component at first and second opposing first end attachment portions offset by a distance from the second axis on opposite sides of the first end;

and the second end is connected to the first MEMS component at first and second opposing second end attachment portions offset by a distance from the second axis on opposite sides of the second end.

3. The device of claim 2, wherein the hinge element includes a central offset portion that extends symmetrically and orthogonally outwardly relative to the second axis from a central beam section of the hinge element.

4. The device of claim 3, wherein the first and second MEMS components and the hinge element are aligned along a shared longitudinal axis.

5. The device of claim 4, wherein the first and second MEMS components and the hinge element are formed in a same device metal layer.

6. The device of claim 4, wherein the hinge element and first and second MEMS components have identical thicknesses.

7. The device of claim 4, wherein at least one of the first and second MEMS components is formed from semiconductor material.

8. The device of claim 1, wherein the hinge element includes a central offset portion that extends symmetrically and orthogonally outwardly relative to the second axis from a central beam section of the hinge element.

9. The device of claim 1, wherein the first and second MEMS components and the hinge element are aligned along a shared longitudinal axis.

10. The device of claim 1, wherein the first and second MEMS components and the hinge element are formed in a same device metal layer.

11. The device of claim 1, wherein the hinge element and first and second MEMS components have identical thicknesses.

12. The device of claim 1, wherein at least one of the first and second MEMS components is formed from semiconductor material.

13. The device of claim 1, further comprising:

a third MEMS component rotatable about a third axis spaced from and parallel to the first axis;

a second hinge element connecting the first and third MEMS components so that rotational movement of one of the first or third MEMS components about the corresponding one of the first or third axis causes corresponding, complementary rotational movement of the other of the first or third MEMS component about the corresponding other of the first or third axis, causing translational movement of the first MEMS component relative to the third MEMS component in the direction orthogonal to the first, second and third axes.

14. The device of claim 1, further comprising:

a third MEMS component rotatable about a third axis spaced from and parallel to the first axis;

a second hinge element connecting the first and third MEMS components so that rotational movement of the third MEMS component about the third axis causes corresponding, complementary rotational movement of the first MEMS component, causing translational movement of the first MEMS component relative to the third MEMS component in the direction orthogonal to the first, second and third axes.

15. A microelectromechanical system (MEMS) device, comprising:

a movable first MEMS component;

a second MEMS component comprising a first support structure fixed for rotation about a first axis and separated by a first clearance distance from the first MEMS component;

a first hinge element having a first end connected to the second MEMS component and a second end connected to a first end of the first MEMS component;

a third MEMS component comprising a second support structure fixed for rotation about a second axis parallel to the first axis and separated by a second clearance distance from the first MEMS component; and

a second hinge element having a first end connected to the third MEMS component and a second end connected to second end of the first MEMS component;

the first, second and third MEMS components, the first and second hinges, and the first and second hinge ends of the first and second hinges being aligned along a third axis orthogonal to the first and second axes; and

the first and second hinge elements being configured and dimensioned so that rotational movement of each of the second and third MEMS components about its respective first or second axis causes corresponding, complementary rotational movement of the first MEMS component, causing translational movement of the first MEMS component in a direction (436) orthogonal to the first, second and third axes.

16. A microelectromechanical system (MEMS) device, comprising:

a movable first elongated MEMS component;

a second elongated MEMS component comprising a support structure fixed for rotation about a pivotal axis and separated by a clearance distance from the first MEMS component; and

an elongated hinge element having a first end connected to the second MEMS component and a second end connected to the first MEMS component;

the elongations of the first and second MEMS components and of the hinge and the first and second hinge ends being aligned along a longitudinal axis orthogonal to the pivotal axis; and

the hinge element configured and dimensioned so that rotational movement of the second MEMS component about the pivotal axis causes corresponding, complementary rotational movement of the first MEMS component, causing translational movement of the first MEMS component in a direction orthogonal to the pivotal and longitudinal axes.