System and method for producing carbon nanotubes
First Claim
1. A system for producing carbon nanotubes, comprising:
- a plurality of synthetic substrates;
a reaction chamber in which a process is performed for producing carbon nanotubes on the plurality of synthetic substrates;
a processing chamber in which a pre-treating process and a post-treating process are performed, wherein the pre-treating process applies catalysts on the plurality of synthetic substrates and the post-treating process retrieves carbon nanotubes formed on the plurality of synthetic substrates; and
a first transporter configured for transporting the plurality of synthetic substrates continuously between the reaction chamber and the processing chamber;
wherein the processing chamber includes a substrate accommodating part for accommodating the plurality of synthetic substrates before they are loaded to the reaction chamber and after they are unloaded from the reaction chamber, the substrate accommodating part comprising;
a cassette having first supports adapted to accommodate the plurality of synthetic substrates before they are loaded to the reaction chamber and second supports adapted to accommodate the plurality of synthetic substrates after they are unloaded from the reaction chamber.
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Accused Products
Abstract
A system for producing carbon nanotubes includes a reaction chamber in which a process is performed for producing a carbon nanotube on a synthetic substrate; a station part disposed at one side of the reaction chamber and provided with a first transporter for loading/unloading the synthetic substrate to/from the reaction chamber; a first transporter installed inside the station part for loading/unloading synthetic substrates to/from the reaction chamber; a substrate accommodating part in which a substrate to be loaded to the reaction chamber is accommodated or a synthetic substrate unloaded from the reaction chamber waits; a retrieve part for drawing out a synthetic substrate from the substrate accommodating part to retrieve a carbon nanotube produced on the synthetic substrate; a catalyst coating unit configured for coating a synthetic substrate with a catalyst before the synthetic substrate is accommodated in the substrate accommodating part of the station part; and a second transporter for transporting a synthetic substrate between the retrieve part and the substrate accommodating part and between the catalyst coating unit and the substrate accommodating part.
15 Citations
26 Claims
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1. A system for producing carbon nanotubes, comprising:
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a plurality of synthetic substrates; a reaction chamber in which a process is performed for producing carbon nanotubes on the plurality of synthetic substrates; a processing chamber in which a pre-treating process and a post-treating process are performed, wherein the pre-treating process applies catalysts on the plurality of synthetic substrates and the post-treating process retrieves carbon nanotubes formed on the plurality of synthetic substrates; and a first transporter configured for transporting the plurality of synthetic substrates continuously between the reaction chamber and the processing chamber; wherein the processing chamber includes a substrate accommodating part for accommodating the plurality of synthetic substrates before they are loaded to the reaction chamber and after they are unloaded from the reaction chamber, the substrate accommodating part comprising;
a cassette having first supports adapted to accommodate the plurality of synthetic substrates before they are loaded to the reaction chamber and second supports adapted to accommodate the plurality of synthetic substrates after they are unloaded from the reaction chamber. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24)
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25. A system for producing carbon nanotubes, comprising:
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a reaction chamber in which a process is performed for producing a carbon nanotube on a synthetic substrate; a station part connected to one side of the reaction chamber and has an internal space that is isolated from the outside to prevent the synthetic substrate unloaded from the reaction chamber from contacting oxygen; a first transporter disposed within the station part adapted to load the synthetic substrate into the reaction chamber and unload the synthetic substrate from the reaction chamber; a substrate accommodating part disposed within the station part for accommodating the synthetic substrate to be loaded into the reaction chamber and the synthetic substrate unloaded from the reaction chamber; a retrieve part for drawing out the synthetic substrate from the substrate accommodating part to retrieve a carbon nanotube produced on the synthetic substrate; a catalyst coating unit configured for coating a top surface of the synthetic substrate with a catalyst before the synthetic substrate is accommodated in the substrate accommodating part of the station part; and a second transporter for transporting the synthetic substrate between the retrieve part and the substrate accommodating part and between the catalyst coating unit and the substrate accommodating part; wherein the station part includes; a first region, disposed to be adjacent to the reaction chamber, where the substrate accommodating part is disposed; and a second region, disposed to be collinear with the reaction chamber at an opposite position to the reaction chamber on the basis of the first region, where the first transporter is disposed, wherein the first region includes; an upper region disposed to be collinear with the reaction chamber and the substrate accommodating part; and a lower region extending from the upper region in a perpendicular direction to the collinear direction, wherein the substrate accommodating part comprises;
a cassette provided for accommodating synthetic substrates and movable between the upper region and the lower region. - View Dependent Claims (26)
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Specification