Infrared sensor comprising tunnel junction for measuring the deformation of a membrane

• US 8,919,212 B2
• Filed: 07/09/2011
• Issued: 12/30/2014
• Est. Priority Date: 07/16/2010
• Status: Expired due to Fees

• Current Assignee: Forschungszentrum Jã¼Lich GmbH (Bundesrepublik Deutschland)
• Original Assignee: Forschungszentrum Jã¼Lich GmbH (Bundesrepublik Deutschland)
• Inventors: Bousack, Herbert, Soltner, Helmut, Mayer, Dirk, Banzet, Marko
• Primary Examiner(s): Noori, Max
• Application Number:
  US13/807,121
• Publication Number:
  US 20130205919A1
• Time in Patent Office: 1,270 Days
• Field of Search: 737/60, 738/49, 738/626.24
• US Class Current: 73/862.634
• CPC Class Codes: G01J 5/42 using Golay cells
• CPC Class Codes: G01N 21/84 Systems specially adapted for particular applications

Abstract

A sensor array for measuring the deformation of an area caused by a force, comprises a first strip and a second strip arranged in the same plane on the area so as to form a tunnel junction of which at least the first strip is movably arranged on the area so that the gap between the two strips is increased when the area is deformed as a result of the action of the force.

Claims

1. A sensor array for measuring the deformation of an area caused by a force, comprising:

a first strip and a second strip arranged in the same plane on an area so as to form a tunnel junction of which at least the first strip is movably arranged on said area so that a gap between the two strips is increased when said area is deformed by the action of the force; and

wherein said area is part of a measuring chamber filled with a fluid.

2. The sensor array according to claim 1, wherein a wall of the measuring chamber is designed as a flexible membrane so as to form said area.

3. The sensor array according to claim 2, comprising a window, which is transparent to electromagnetic radiation, in the wall of the measuring chamber.

4. The sensor array according to claim 1, wherein the first strip is longer than the second strip.

5. A sensor array according to claim 1, wherein the first strip comprises a movable section that is not attached to said area and has a free length, and a section that is attached to said area and has an attached length.

6. The sensor array according to claim 5, wherein the free length is greater than the attached length.