Symmetric VHF source for a plasma reactor

• US 8,920,597 B2
• Filed: 03/14/2011
• Issued: 12/30/2014
• Est. Priority Date: 08/20/2010
• Status: Active Grant

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Ramaswamy, Kartik, Markovsky, Igor, Chen, Zhigang, Carducci, James D., Collins, Kenneth S., Rauf, Shahid, Misra, Nipun, Dorf, Leonid, Ye, Zheng John
• Primary Examiner(s): MacArthur, Sylvia R
• Assistant Examiner(s): CROWELL, ANNA M
• Application Number:
  US13/047,052
• Publication Number:
  US 20120043023A1
• Time in Patent Office: 1,387 Days
• Field of Search: 118/723.E, 118/723.I, 118/723.AN, 156/345.43, 156/345.44, 156/345.45, 156/345.46, 156/345.47, 156/345.48, 315/111.21, 315/111.51
• US Class Current: 156/345.44
• CPC Class Codes: H01J 37/32018 Glow discharge
• CPC Class Codes: H01J 37/32082 Radio frequency generated discharge H01J37/32357, H01J37/32366, H01J37/32394 and H01J37/32403 take precedence
• CPC Class Codes: H01J 37/32091 the radio frequency energy being capacitively coupled to the plasma
• CPC Class Codes: H01J 37/32183 Matching circuits
• CPC Class Codes: H01J 37/32541 Shape
• CPC Class Codes: H01J 37/32568 Relative arrangement or disposition of electrodes; moving means
• CPC Class Codes: H01J 37/32577 Electrical connecting means
• CPC Class Codes: H01J 37/32587 Triode systems
• CPC Class Codes: H01J 37/32596 Hollow cathodes
• CPC Class Codes: H01J 37/3266 Magnetic control means
• CPC Class Codes: H01J 37/32715 Workpiece holder
• CPC Class Codes: H01J 37/32834 Exhausting

Abstract

The disclosure pertains to a capactively coupled plasma source in which VHF power is applied through an impedance-matching coaxial resonator having a folded structure and symmetrical power distribution.

Claims

1. A plasma reactor comprising:

a vacuum chamber enclosure and a center electrode;

a coaxial resonator comprising;

(a) a hollow inner conductive cylinder coaxial with said center electrode and having a bottom edge contacting said center electrode;

(b) a hollow outer conductive cylinder coaxial with and surrounding said inner conductive cylinder and having a bottom edge insulated from said center electrode, said inner and outer conductive cylinders having respective circular top edges;

(c) an annular conductor extending between and electrically contacting said respective circular top edges of said inner and outer conductive cylinders;

(d) a hollow center conductive cylinder coaxial with said inner and outer conductive cylinders and located between said inner and outer conductive cylinders, and having a bottom edge contacting said center electrode, said center conductive cylinder having a top edge facing and spaced from said annular conductor by an axial gap length;

a VHF power generator coupled to said center conductive cylinder;

wherein said VHF generator is coupled to said center conductive cylinder by a power coupler extending from said VHF power generator to said center conductive cylinder, wherein said power coupler comprises;

an axial center conductor connected at a first end to said VHF generator and extending through the interior of said hollow inner conductive cylinder to a second end thereof at a selected axial location;

plural respective openings through said inner cylindrical conductor and coinciding with a circular plane at said selected axial location; and

plural respective spoke conductors extending radially from said second end of said axial center conductor through said plural respective openings and terminating at and contacting said center conductive cylinder, said plural respective spoke conductors being symmetrically distributed.

2. The reactor of claim 1 further comprising a connection between said outer cylindrical conductor and ground.

3. The reactor of claim 1 wherein a sum of the axial lengths of said inner and outer conductive cylinders and a radial length of said annular conductor is at least approximately equal to an integral fraction of a wavelength of the frequency of said VHF generator.

4. The reactor of claim 3 wherein said integral fraction is one-half.

5. The reactor of claim 3 wherein said axial gap length is selected to optimize resonance of said coaxial resonator at the frequency of said VHF generator.

6. The reactor of claim 1 wherein said center conductive cylinder has a radius that is a geometric mean of the radii of said inner and outer conductive cylinders.

7. The reactor of claim 1 wherein said selected axial location corresponds to an impedance presented to said power coupler matching an output impedance of said VHF generator.

8. The reactor of claim 1 wherein said center electrode comprises a gas distribution plate comprising plural interior gas passages and plural exterior gas ejection orifices on a bottom surface thereof, said reactor further comprising:

a process gas source;

hollow gas lines coupled between said process gas source and said gas distribution plate, said gas lines extending through the interior of said inner conductive cylinder.