Magnification optical system
First Claim
Patent Images
1. A magnification optical system to form an enlarged image of an object, comprising:
- a refractive optical system including a plurality of lens groups; and
a mirror train including a curved mirror, arranged in the following order from an object side;
a first focus structure configured to move the respective lens groups of the refractive optical system by different amounts along a normal line of a conjugate surface on the object side; and
a second focus structure configured to move lens groups including the lens groups moved by the first focus structure along the normal line of the conjugate surface on the object side by different amounts from those of the first focus structure.
1 Assignment
0 Petitions
Accused Products
Abstract
A magnification optical system forms an enlarged image of an object. It includes a refractive optical system including a plurality of lens groups; and a mirror train including a curved mirror, arranged in this order from an object side, a first focus structure configured to move the respective lens groups of the refractive optical system by different amounts along a normal line of a conjugate surface on the object side, and a second focus structure configured to move the respective lens groups along the normal line of the conjugate surface on the object side by different amounts from those of the first focus structure.
-
Citations
15 Claims
-
1. A magnification optical system to form an enlarged image of an object, comprising:
-
a refractive optical system including a plurality of lens groups; and a mirror train including a curved mirror, arranged in the following order from an object side; a first focus structure configured to move the respective lens groups of the refractive optical system by different amounts along a normal line of a conjugate surface on the object side; and a second focus structure configured to move lens groups including the lens groups moved by the first focus structure along the normal line of the conjugate surface on the object side by different amounts from those of the first focus structure. - View Dependent Claims (2, 3, 5, 6, 7, 8, 9)
-
-
4. A magnification optical system to form an enlarged image of an object, comprising:
-
a refractive optical system including a plurality of lens groups; and a mirror train including a curved mirror, arranged in the following order from an object side; a first focus structure configured to move the respective lens groups of the refractive optical system by different amounts along a normal line of a conjugate surface on the object side; and a second focus structure configured to move the respective lens groups along the normal line of the conjugate surface on the object side by different amounts from those of the first focus structure, wherein the second focus structure is a front focus mechanism to move, by different amounts from those of the first focus structure, one of the lens groups of the refractive optical system including a lens as farthest from a conjugate surface on a reduction side along the normal line of the conjugate surface on the reduction side. - View Dependent Claims (10, 11, 12, 13, 14)
-
-
15. A magnification optical system to form an enlarged image of an object, comprising:
-
a refractive optical system including a plurality of lens groups; and a mirror train including a curved mirror, arranged in the following order from an object side; a first focus structure configured to move the respective lens groups of the refractive optical system by different amounts along a normal line of a conjugate surface on the object side; and a second focus structure configured to move the respective lens groups along the normal line of the conjugate surface on the object side by different amounts from those of the first focus structure, wherein the second focus structure is a protrusion mechanism to move an entirety of the refractive optical system along the normal line of the conjugate surface on the object side, and wherein the protrusion mechanism includes a lens barrel to hold the refractive optical system and a screw mechanism, and the protrusion mechanism protrudes by a rotation of the screw mechanism.
-
Specification