Manufacturing method of top plate of plasma processing apparatus
First Claim
1. A manufacturing method of a top plate hermetically attached to an upper opening of a tubular shaped container body for forming a processing container of a plasma processing apparatus, the method comprising the steps of;
- preparing a top plate body comprised of a dielectric body for transmitting an electromagnetic wave, and having a gas ejection hole for ejecting a gas into the processing container;
forming a discharge prevention member having a discharge prevention member body comprised of a dielectric body having a permeability, and a dense member comprised of a dielectric body without a permeability covering at least a side face of the discharge prevention member body; and
attaching the discharge prevention member in the gas ejection hole of the top plate body,wherein the process for forming the discharge prevention member further comprises the steps of;
preparing the dense member formed in a tubular shape; and
baking the tubular shaped dense member filled with a material comprising the discharge prevention member body.
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Accused Products
Abstract
A manufacturing method of a top plate hermetically attached to an upper opening of a tubular shaped container body for forming a processing container of a plasma processing apparatus is provided. The manufacturing method includes the steps of; preparing a top plate body comprised of a dielectric body for transmitting an electromagnetic wave, and having a gas ejection hole for ejecting a gas into the processing container; forming a discharge prevention member having a discharge prevention member body comprised of a dielectric body having a permeability, and a dense member comprised of a dielectric body without a permeability covering at least a side face of the discharge prevention member body; and attaching the discharge prevention member in the gas ejection hole of the top plate body.
30 Citations
6 Claims
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1. A manufacturing method of a top plate hermetically attached to an upper opening of a tubular shaped container body for forming a processing container of a plasma processing apparatus, the method comprising the steps of;
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preparing a top plate body comprised of a dielectric body for transmitting an electromagnetic wave, and having a gas ejection hole for ejecting a gas into the processing container; forming a discharge prevention member having a discharge prevention member body comprised of a dielectric body having a permeability, and a dense member comprised of a dielectric body without a permeability covering at least a side face of the discharge prevention member body; and attaching the discharge prevention member in the gas ejection hole of the top plate body, wherein the process for forming the discharge prevention member further comprises the steps of; preparing the dense member formed in a tubular shape; and baking the tubular shaped dense member filled with a material comprising the discharge prevention member body. - View Dependent Claims (3, 4)
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2. A manufacturing method of a top plate hermetically attached to an upper opening of a tubular shaped container body for forming a processing container of a plasma processing apparatus, the method comprising the steps of;
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preparing a top plate body comprised of a dielectric body for transmitting an electromagnetic wave, and having a gas ejection hole for ejecting a gas into the processing container; forming a discharge prevention member having a discharge prevention member body comprised of a dielectric body having a permeability, and a dense member comprised of a dielectric body without a permeability covering at least a side face of the discharge prevention member body; and attaching the discharge prevention member in the gas ejection hole of the top plate body, wherein the process for forming the discharge prevention member further comprises the steps of; forming an adhesive layer by curing the adhesive, the adhesive layer comprising a material of the dense member in a dissolved state, coated on an entire surface of the discharge prevention member body; removing the adhesive layer from a gas ejection face of the discharge prevention member corresponding to an opening of the gas ejection hole; and forming a gas introducing depression on a gas introducing face on an opposite side of the gas ejection face of the discharge prevention member body. - View Dependent Claims (5, 6)
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Specification