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Manufacturing method of top plate of plasma processing apparatus

  • US 8,925,351 B2
  • Filed: 07/10/2013
  • Issued: 01/06/2015
  • Est. Priority Date: 01/20/2006
  • Status: Active Grant
First Claim
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1. A manufacturing method of a top plate hermetically attached to an upper opening of a tubular shaped container body for forming a processing container of a plasma processing apparatus, the method comprising the steps of;

  • preparing a top plate body comprised of a dielectric body for transmitting an electromagnetic wave, and having a gas ejection hole for ejecting a gas into the processing container;

    forming a discharge prevention member having a discharge prevention member body comprised of a dielectric body having a permeability, and a dense member comprised of a dielectric body without a permeability covering at least a side face of the discharge prevention member body; and

    attaching the discharge prevention member in the gas ejection hole of the top plate body,wherein the process for forming the discharge prevention member further comprises the steps of;

    preparing the dense member formed in a tubular shape; and

    baking the tubular shaped dense member filled with a material comprising the discharge prevention member body.

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