Method of calibrating surface texture measurement device
First Claim
1. A method of calibrating a surface texture measurement device, the device having:
- a detector having a measurement arm supported swingably in a vertical direction at a rotation axis as a support point, an upward stylus and a downward stylus each provided in an end portion of the measurement arm and projecting in a swing direction of the measurement arm, and a detection unit that detects a swing amount of the measurement arm;
a stage holding a measured object; and
a relative movement driver relatively moving the detector and the stage, the method comprising;
obtaining first axis shape measurement data by;
relatively moving the detector and the stage in a first axis direction while the downward stylus is in contact with an upper surface of a reference sphere to obtain first axis upper shape measurement data and;
relatively moving the detector and the stage in the first axis direction while the upward stylus is in contact with a lower surface of the reference sphere to obtain first axis lower shape measurement data; and
calculating offset amounts of the upward stylus and the downward stylus based on a first center coordinate obtained from the first axis upper shape measurement data and a second center coordinate obtained from the first axis lower shape measurement data.
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Accused Products
Abstract
A method of calibrating a surface texture measurement device includes obtaining Y-axis shape measurement data and a maximum diameter portion to obtain upper and lower maximum diameter portions of a reference sphere from Y-axis upper and lower shape data obtained by relatively moving in the Y-axis direction while a downward and an upward styluses are in contact with an upper and a lower surfaces, respectively, of the reference sphere; obtaining X-axis shape measurement data to obtain X-axis upper and lower shape data of the reference sphere by relatively moving in the X-axis direction while the downward stylus is in contact with the upper diameter portion and the upward stylus with the lower diameter portion of the reference sphere; and calculating offset amounts Δx and Δz of the upward and downward styluses from center coordinates O3 and O4 obtained from the shape data.
7 Citations
5 Claims
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1. A method of calibrating a surface texture measurement device, the device having:
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a detector having a measurement arm supported swingably in a vertical direction at a rotation axis as a support point, an upward stylus and a downward stylus each provided in an end portion of the measurement arm and projecting in a swing direction of the measurement arm, and a detection unit that detects a swing amount of the measurement arm; a stage holding a measured object; and a relative movement driver relatively moving the detector and the stage, the method comprising; obtaining first axis shape measurement data by; relatively moving the detector and the stage in a first axis direction while the downward stylus is in contact with an upper surface of a reference sphere to obtain first axis upper shape measurement data and; relatively moving the detector and the stage in the first axis direction while the upward stylus is in contact with a lower surface of the reference sphere to obtain first axis lower shape measurement data; and calculating offset amounts of the upward stylus and the downward stylus based on a first center coordinate obtained from the first axis upper shape measurement data and a second center coordinate obtained from the first axis lower shape measurement data. - View Dependent Claims (2, 3, 4, 5)
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Specification