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Method of calibrating surface texture measurement device

  • US 8,925,367 B2
  • Filed: 03/14/2012
  • Issued: 01/06/2015
  • Est. Priority Date: 03/18/2011
  • Status: Active Grant
First Claim
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1. A method of calibrating a surface texture measurement device, the device having:

  • a detector having a measurement arm supported swingably in a vertical direction at a rotation axis as a support point, an upward stylus and a downward stylus each provided in an end portion of the measurement arm and projecting in a swing direction of the measurement arm, and a detection unit that detects a swing amount of the measurement arm;

    a stage holding a measured object; and

    a relative movement driver relatively moving the detector and the stage, the method comprising;

    obtaining first axis shape measurement data by;

    relatively moving the detector and the stage in a first axis direction while the downward stylus is in contact with an upper surface of a reference sphere to obtain first axis upper shape measurement data and;

    relatively moving the detector and the stage in the first axis direction while the upward stylus is in contact with a lower surface of the reference sphere to obtain first axis lower shape measurement data; and

    calculating offset amounts of the upward stylus and the downward stylus based on a first center coordinate obtained from the first axis upper shape measurement data and a second center coordinate obtained from the first axis lower shape measurement data.

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