MEMS sensor with stress isolation and method of fabrication
First Claim
1. A microelectromechanical systems (MEMS) sensor comprising:
- a substrate;
a support structure suspended above a surface of said substrate and connected to said substrate via a support element;
a proof mass suspended above said substrate and flexibly connected to said support structure via a flexible support element, said proof mass being adapted for rotational motion about an axis between first and second ends of said proof mass; and
an electrode suspended above said substrate and connected to said support structure, said electrode being spaced apart from said proof mass, wherein said electrode is disposed out of a plane in which said proof mass is located.
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Accused Products
Abstract
A MEMS sensor (20, 86) includes a support structure (26) suspended above a surface (28) of a substrate (24) and connected to the substrate (24) via spring elements (30, 32, 34). A proof mass (36) is suspended above the substrate (24) and is connected to the support structure (26) via torsional elements (38). Electrodes (42, 44), spaced apart from the proof mass (36), are connected to the support structure (26) and are suspended above the substrate (24). Suspension of the electrodes (42, 44) and proof mass (36) above the surface (28) of the substrate (24) via the support structure (26) substantially physically isolates the elements from deformation of the underlying substrate (24). Additionally, connection via the spring elements (30, 32, 34) result in the MEMS sensor (22, 86) being less susceptible to movement of the support structure (26) due to this deformation.
23 Citations
20 Claims
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1. A microelectromechanical systems (MEMS) sensor comprising:
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a substrate; a support structure suspended above a surface of said substrate and connected to said substrate via a support element; a proof mass suspended above said substrate and flexibly connected to said support structure via a flexible support element, said proof mass being adapted for rotational motion about an axis between first and second ends of said proof mass; and an electrode suspended above said substrate and connected to said support structure, said electrode being spaced apart from said proof mass, wherein said electrode is disposed out of a plane in which said proof mass is located. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. A device comprising:
a microelectromechanical systems (MEMS) sensor, said MEMS sensor including; a substrate; a support structure suspended above a surface of said substrate and connected to said substrate via a spring system; a proof mass suspended above said substrate and flexibly connected to said support structure via a flexible support element, said proof mass being adapted for rotational motion about an axis located between first and second ends of said proof mass, a first section being formed between said axis and said first end and a second section being formed between said axis and said second end; a first electrode suspended above said substrate and fixedly attached to said support structure, said first electrode being spaced apart from said first section of said proof mass; and a second electrode suspended above said substrate and fixedly attached to said support structure, said second electrode being spaced apart from said second section of said proof mass, wherein each of said first and second electrodes is disposed out of a plane in which said proof mass is located. - View Dependent Claims (14, 15, 16, 17)
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18. A microelectromechanical systems (MEMS) sensor comprising:
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a substrate; a support structure suspended above a surface of said substrate and connected to said substrate via a spring system, said support structure including a frame having a central opening; a proof mass suspended above said substrate and position in said central opening, said proof mass being flexibly connected to said support structure via a flexible support element, said proof mass being adapted for rotational motion about an axis between first and second ends of said proof mass; and an electrode suspended above said substrate and fixedly attached to said support structure, said electrode being spaced apart from said proof mass, wherein said electrode is disposed out of a plane in which said proof mass is located, and said electrode connected to said support structure remains substantially nonmovable relative to said proof mass. - View Dependent Claims (19, 20)
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Specification