Cold cathode gauge fast response signal circuit

• US 8,928,329 B2
• Filed: 07/26/2012
• Issued: 01/06/2015
• Est. Priority Date: 07/26/2011
• Status: Active Grant

• Current Assignee: MKS Instruments Incorporated
• Original Assignee: MKS Instruments Incorporated
• Inventors: Downing, Bert, Gu, Donghua, Peacock, Neil T.
• Primary Examiner(s): Assouad, Patrick
• Assistant Examiner(s): BROWN, LAMARR A
• Application Number:
  US13/559,347
• Publication Number:
  US 20130249563A1
• Time in Patent Office: 894 Days
• Field of Search: 324459-470
• US Class Current: 324/460
• CPC Class Codes: G01L 21/34 using electric discharge tubes with cold cathodes

Abstract

A fast response output signal circuit (10) for a cold cathode gauge is provided to produce a fast response output signal (48) in addition to a voltage output signal (40) that is representative of the pressure in the cold cathode gauge. The fast response output signal (48) is either on or off, thus can be used to trigger a closing of an isolation valve or other responsive action upon a change in pressure that attains or exceeds a certain set point threshold. The fast response output signal is produced and processed with analog circuits, but the set point is produced with a microprocessor. The voltage output signal can be produced as a logarithmic function of the pressure.

Claims

1. A fast response signal circuit for a cold cathode pressure gauge that provides a current signal which is proportional to pressure in the cold cathode gauge, comprising:

an electrometer circuit that is connectable electrically to the current signal from the cold cathode pressure gauge and that amplifies and processes the current signal from the cold cathode pressure gauge to provide a first analog voltage output signal that is proportional to the current signal;

a microprocessor circuit that is programmed to provide a set point voltage signal that is indicative of a set point pressure threshold;

an analog sensing circuit that is connected electrically to the electrometer circuit and to the microprocessor circuit and that compares the first analog voltage output signal from the electrometer circuit with the set point voltage signal and produces a state signal voltage when the first analog voltage output signal from the electrometer circuit equals or exceeds the set point voltage signal;

a relay circuit connected electrically to the sensing circuit and that outputs a fast response signal output in response to the state signal voltage produced by the sensing circuit; and

a buffer/gain circuit connected electrically to the electrometer circuit and that produces a second analog output signal which is indicative of the pressure in the cold cathode gauge.

2. The fast response signal circuit of claim 1, wherein the electrometer circuit includes a logarithmic amplifier and the first analog voltage output signal provided by the electrometer circuit is a logarithmic function of the current signal from the cold cathode pressure gauge.

3. The fast response signal circuit of claim 2, wherein the logarithmic amplifier includes a difference amplifier that produces the first analog voltage output signal as a function of a difference between a base-emitter voltage of a first transistor through which the current signal from the cold cathode gauge flows and a base-emitter voltage of a matched second transistor.

4. A method of providing a fast response control signal from a cold cathode gauge that outputs a current signal which is proportional to pressure in the cold cathode gauge in addition to providing a second analog output signal that is indicative of pressure measured by the cold cathode gauge, comprising:

amplifying the current signal from the cold cathode gauge and producing a first analog voltage output signal that is proportional to the pressure in the cold cathode gauge;

feeding the first analog voltage output signal to a buffer/gain circuit, a microprocessor circuit, and an analog sensing circuit;

amplifying and isolating the first analog voltage output signal with the buffer/gain circuit to produce the second analog output signal that is a direct representation of the pressure in the cold cathode gauge for application by a user to measure, monitor, and/or other purposes;

providing a set point voltage signal with the microprocessor that is indicative of a threshold pressure at which the fast response control signal is desired;

comparing the first analog voltage output signal to the set point voltage signal with the analog sensing circuit and producing a state signal voltage with the analog sensing circuit when the first analog voltage output signal equals or exceeds the set point voltage signal; and

triggering a relay circuit with the state signal voltage to produce the fast response control signal.

5. The method of claim 4, including comparing the first analog voltage output signal with the set point signal-voltage signal and producing the state signal voltage using an analog comparator circuit in the analog sensing circuit.

6. The method of claim 4, including amplifying the current signal from the cold cathode gauge with an logarithmic amplifier and producing the first analog voltage output signal as a logarithmic function of the pressure in the cold cathode gauge.

7. Apparatus for providing a fast response control signal from a cold cathode gauge that outputs a current signal which is proportional to pressure in the cold cathode gauge in addition to providing a second analog output signal that is indicative of pressure measured by the cold cathode gauge, comprising:

means for amplifying the current signal from the cold cathode gauge and producing a first analog voltage output signal that is proportional to the pressure in the cold cathode gauge;

means for amplifying and isolating the first analog voltage output signal to produce the second analog output signal that is a direct representation of the pressure in the cold cathode for application by a user to measure, monitor, and/or other purposes;

means for providing a set point voltage signal that is indicative of a threshold pressure at which the fast response control signal is desired;

means for comparing the first analog voltage output signal with the set point voltage signal and for producing a state signal voltage when the first analog voltage output signal equals or exceeds the set point voltage signal; and

means for producing the fast response control signal in response to the state signal voltage.

8. The apparatus of claim 7, including analog means for comparing the first analog voltage output signal with the set point voltage signal and for producing the state signal voltage.

9. The apparatus of claim 7, including logarithmic amplifier means for amplifying the current signal from the cold cathode gauge and producing the first analog voltage output signal as a logarithmic function of the pressure in the cold cathode gauge.