Method of fabricating structured particles composed of silicon or a silicon-based material
First Claim
1. A process of etching silicon, the process comprising:
- treating silicon, e.g. granules or bulk material, with a solution comprising HF, Ag+ ions and nitrate ions,forming silicon having etched structures on its surface, which silicon includes a surface deposit of silver,separating the etched silicon from a spent etching solution,dissolving the silver from the etched silicon using nitric acid to form a solution containing Ag+ ions and nitrate ions,mixing the solution containing Ag+ ions and nitrate ions with further HF to form a further solution, andusing the further solution to treat further silicon.
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Abstract
A process of etching silicon includes treating silicon, e.g. granules or bulk material, with an etching solution, including HF, Ag+ ions and nitrate ions thereby etching the silicon to form silicon having etched pillars on its surface, which silicon includes a surface deposit of silver. The etched silicon is then separated from the spent etching solution. The silver from the etched silicon is dissolved using nitric acid to form a solution containing Ag+ ions and nitrate ions. The solution containing Ag+ ions and nitrate ions is mixed with further HF to form a further etching solution. The further etching solution is used to treat further silicon. The pillars may be used as an anode material in a Li-ion battery.
160 Citations
20 Claims
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1. A process of etching silicon, the process comprising:
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treating silicon, e.g. granules or bulk material, with a solution comprising HF, Ag+ ions and nitrate ions, forming silicon having etched structures on its surface, which silicon includes a surface deposit of silver, separating the etched silicon from a spent etching solution, dissolving the silver from the etched silicon using nitric acid to form a solution containing Ag+ ions and nitrate ions, mixing the solution containing Ag+ ions and nitrate ions with further HF to form a further solution, and using the further solution to treat further silicon. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19)
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20. A process of etching silicon to form silicon having etched structures on its surface, the process comprising:
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(i) depositing silver onto silicon with a solution comprising HF, Ag+ ions and nitrate ions; (ii) etching the silver deposited silicon to give etched silicon having a surface deposit of silver; (iii) separating the etched silver deposited silicon from a spent etching solution; (iv) removing the surface deposit of silver by treatment with nitric acid to form a solution containing Ag+ ions and nitrate ions; (v) mixing the solution containing Ag+ ions and nitrate ions with further HF to form a further solution, and (vi) using the further solution to treat further silicon.
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Specification