System and method for printing interference patterns having a pitch in a lithography system

• US 8,934,084 B2
• Filed: 05/31/2006
• Issued: 01/13/2015
• Est. Priority Date: 05/31/2006
• Status: Active Grant

• Current Assignee: ASML Holding NV
• Original Assignee: ASML Holding NV
• Inventors: Shmarev, Yevgeniy Konstantinovich
• Primary Examiner(s): LIU, CHIA HOW MICHAEL
• Application Number:
  US11/443,431
• Publication Number:
  US 20070279642A1
• Time in Patent Office: 3,149 Days
• Field of Search: 355/55, 355/53, 355/67, 356/450, 356/520, 356/521, 359/577, 359/583
• US Class Current: 355/55
• CPC Class Codes: G03F 7/70408 Interferometric lithography; Holographic lithography; Self-imaging lithography, e.g. utilizing the Talbot effect

Abstract

An interferometric lithography system produces a pattern having a sharp field edge and minimal optical path length difference. Light passes through a beamsplitter into an input prism. The two beams produced by the beamsplitter are reflected off respective surfaces of the input prism toward a substrate prism. The substrate prism is symmetric to the input prism such that the incidence angle at an image plane is approximately equal to the beamsplitter diffraction angle. Alternatively, light passes through a beamsplitter into a prism. The two beams produced by the beamsplitter are reflected off respective surfaces of the prism toward an output surface of the prism, such that the incidence angle at the output surface is approximately equal to the beamsplitter diffraction angle. A plurality of these interferometers can be stacked, each being optimized for a given pitch, such that the stack provides a variable pitch interferometry system.

Claims

1. An interferometric lithography apparatus, comprising along an optical path:

a beam splitter to create at least two spatially coherent radiation beams;

a beam combiner adapted to redirect and combine the at least two spatially coherent radiation beams onto a surface of a substrate to form an interference pattern;

a field blade, at an object plane, that is separate from the beam splitter and located on, or downstream from, the beam splitter; and

a lens to image a border of the field blade onto the surface of the substrate so as to create the border of the interference pattern.

2. The interferometric lithography apparatus of claim 1, wherein the beam splitter is provided with a grating and the apparatus further comprises:

a zero diffraction order radiation blocker between the beam splitter and the beam combiner to block the zero order diffracted radiation of the grating.

3. The interferometric lithography apparatus of claim 2, wherein the apparatus comprises:

a first and a second afocal imaging branch provided with the lens, the first afocal imaging branch located on an opposite side of the radiation blocker to the second afocal imaging branch and the first and second afocal imaging branches located between the beam splitter and the beam combiner.

4. The interferometric lithography apparatus of claim 3, wherein the first and second afocal imaging branches reduce shear in radiation passing through the first and second afocal imaging branches.

5. The interferometric lithography apparatus of claim 3, further comprising:

lenses placed symmetrically around a convergence point in the first and second afocal imaging branches to reduce shear in radiation passing through the first and second afocal imaging branches.

6. The interferometric lithography apparatus of claim 2, wherein a pitch of the grating is approximately equal to twice a pitch of a pattern to be patterned onto the surface of the substrate.

7. The interferometric lithography apparatus of claim 1, wherein the beam combiner comprises a reflecting surface.

8. The interferometric lithography apparatus, of claim 1, wherein the beam splitter is provided with the field blade.

9. The interferometric lithography apparatus of claim 1, wherein the field blade defines a rectangular border onto the surface of the substrate.

10. The interferometric lithography apparatus of claim 1, wherein an immersion liquid fills a gap between the beam combiner and the surface of the substrate.

11. An interferometric lithography apparatus, comprising:

a beam splitter to create at least two spatially coherent radiation beams at a first plane;

a beam combiner adapted to redirect and combine the at least two spatially coherent radiation beams onto a surface of a substrate to form an interference pattern at a second plane;

a first afocal imaging branch provided with a lens, the first afocal imaging branch having substantially unit magnification;

a second afocal imaging branch provided with a lens, the second afocal imaging branch having substantially unit magnification; and

four reflecting surfaces between the beam splitter and an output surface of the beam combiner which faces the surface of the substrate,

wherein, during use, each of the at least two spatially coherent radiation beams are reflected from two of the four reflecting surfaces in series and each of the at least two spatially coherent radiation beams are reflected and converged by two of the four reflecting surfaces in parallel and the first and second planes are substantially optically conjugate.

12. The interferometric lithography apparatus of claim 11, wherein the beam splitter comprises a grating and a blocking aperture to block zero diffraction order radiation of the grating.

13. The interferometric lithography apparatus of claim 12, wherein a pitch of the grating is approximately equal to twice a pitch of an interference pattern to be patterned at the surface of the substrate.

14. The interferometric lithography apparatus of claim 13, further comprising a plurality of lenses and wherein, in use, radiation passes through the lenses and the beam combiner to the surface of the substrate.

15. The interferometric lithography apparatus of claim 14, further comprising a field blade, and wherein the lenses are configured to image a. border of the field blade onto the surface of the substrate to create a border for the interference pattern to be patterned.

16. An interferometric lithography apparatus having variable pitch, comprising:

an illumination system;

a first interferometer to form an interference pattern having a first pitch; and

a second interferometer to form an interference pattern having a second pitch, the second interferometer comprising;

a beam splitter to create at least two spatially coherent radiation beams at a first plane;

a beam combiner adapted to redirect and combine the at least two spatially coherent radiation beams onto a surface of a substrate to form the interference pattern at a second plane;

a first afocal imaging branch provided with a lens, the first afocal imaging branch having substantially unit magnification;

a second afocal imaging branch provided with a lens, the second afocal imaging branch having substantially unit magnification; and

four reflecting surfaces between the beam splitter and an output surface of the beam combiner which faces the surface of the substrate,

wherein, during use, each of the at least two spatially coherent radiation beams are reflected from two of the four reflecting surfaces in series and each of the at least two spatially coherent radiation beams are reflected and converged by two of the four reflecting surfaces in parallel and the first and second planes are substantially optically conjugate,

wherein the first and second interferometers are movable with respect to the illumination system such that radiation from the illumination system is incident on one of the first and second interferometers.

17. The interferometric lithography apparatus of claim 16, wherein the first interferometer comprises:

a second beam splitter to create at least two spatially coherent radiation beams; and

a second beam combiner adapted to redirect and combine the two spatially coherent radiation beams onto a surface of the substrate to form an interference pattern having the first pitch.

18. The interferometric lithography apparatus of claim 17, wherein the second beam splitter comprises a grating to create the at least two spatially coherent radiation beams.

19. The interferometric lithography apparatus of claim 17, wherein the second beam combiner comprises a reflecting surface.

20. The interferometric lithography apparatus of claim 16, wherein the first and second interferometers are arranged in a stack formation.