Method and arrangement for robust interferometry for detecting a feature of an object

• US 8,934,104 B2
• Filed: 01/21/2011
• Issued: 01/13/2015
• Est. Priority Date: 01/22/2010
• Status: Active Grant

• Current Assignee: Universitaet Stuttgart
• Original Assignee: Universitaet Stuttgart
• Inventors: Koerner, Klaus, Berger, Reinhard, Osten, Wolfgang
• Primary Examiner(s): Geisel, Kara E
• Assistant Examiner(s): Prieto, Violeta A
• Application Number:
  US13/574,707
• Publication Number:
  US 20120307258A1
• Time in Patent Office: 1,453 Days
• Field of Search: 356450-521
• US Class Current: 356/497
• CPC Class Codes: G01B 2290/15 Cat eye, i.e. reflection always parallel to incoming beam
• CPC Class Codes: G01B 9/02032 generating a spatial carrier frequency, e.g. by creating lateral or angular offset between reference and object beam shearing interferometers G01B9/02098
• CPC Class Codes: G01B 9/02061 Reduction or prevention of effects of tilts or misalignment
• CPC Class Codes: G01B 9/0209 Low-coherence interferometers

Abstract

An arrangement and a method are provided for robust interferometry for detecting distance, depth, profile, form, undulation, flatness deviation and/or roughness or the optical path length in or on technical or biological objects, including in layered form, or else for optical coherence tomography (OCT), with a source of electromagnetic radiation and with an interferometer, in particular also in the form of an interference microscope, having an object beam path and having a reference beam path, in which an end reflector is arranged, and a line-scan detector for detecting electromagnetic radiation in the form of at least one spatial interferogram.

Claims

1. An arrangement for robust interferometry or optical coherence tomography for detecting at least one of a distance, depth, profile, form, undulation, roughness, optical path length, and flatness deviation in or on technical or biological objects, including in layered form, the arrangement comprising:

a light source for illuminating one of the technical or biological objects,

an interferometer in the form of an interference microscope, having an object beam path and having at least one reference beam path, in which at least one end reflector is arranged, and a measurement plane in the object beam path, in which measurement plane the surface or volume elements of the object which are to be optically measured are at least approximately situated,

and at least one line-scan detector for detecting electromagnetic radiation in the form of at least one spatial interferogram,

at least one end reflector having three plane mirrors is arranged as reference reflector in the reference beam path of the interferometer, the three plane mirrors each being at least approximately perpendicular to a common reference plane BE, and

three trace lines of planes represented by the surfaces of the three plane mirrors forming a triangle ABC in the reference plane BE, in order that there is a lateral shear of an absolute value delta_q between reference beam and object beam in said interferometer.

2. The arrangement for robust interferometry of claim 1, characterized in that the three trace lines form an obtuse triangle ABC in the reference plane BE.

3. The arrangement for robust interferometry of claim 1, characterized in that a multiplicity of miniaturized three-plane-mirror reference end reflectors define an array arranged in the reference beam path.

4. The arrangement for robust interferometry of claim 1, characterized in that the light source is a source of short-coherent electromagnetic radiation designed for laterally finely structured illumination of the object by a switchable spatial light modulator array.

5. The arrangement for robust interferometry of claim 1, further comprising at least one double diaphragm with slits or pinholes is arranged in a jointly used imaging stage for reference radiation and object radiation, wherein a first opening of the double diaphragm is reserved for the reference radiation and a second opening is reserved for the object radiation.

6. The arrangement for robust interferometry of claim 1, characterized in that means for chromatic depth splitting of foci are arranged in the object beam path.

7. The arrangement for robust interferometry of claim 1, characterized in that at least one confocally discriminating diagram is arranged in the object beam path.

8. The arrangement for robust interferometry of claim 1, characterized in that the interferometer is a Michelson, Linnik, Mirau or Schulz-Minor interferometer and at least one three-mirror reference end reflector is arranged in the reference beam path.

9. The arrangement for robust interferometry of claim 1, wherein

the light source is a monochromatic source of electromagnetic radiation, a quasi-monochromatic source of electromagnetic radiation, or a source of short-coherent electromagnetic radiation for illuminating the object, and

means for spectral splitting are arranged in the detection beam path.

10. A method for robust interferometry or optical coherence tomography for detecting at least one of a distance, depth, profile, form, undulation, roughness, and optical path length in or on technical or biological objects, including in layered form, comprising the following method steps:

generating at least one object beam of rays of electromagnetic radiation for illuminating the technical or biological objects,

generating at least one reference beam of rays by means of beam splitting in an interferometer,

generating spatial short-coherence interferences of object and reference rays,

detecting spatial short-coherence interferences on a line-scan detector of electromagnetic radiation,

directly carrying out successive reflections at three respective plane mirrors in the reference beam path,

the surfaces of said three plane mirrors each being at least approximately perpendicular to a common reference plane BE, thereby forming a three-plane-mirror reference end reflector,

introducing a lateral shear having an absolute value delta_q between object beam of rays and reference beam of rays in the interferometer, thereby generating at least one spatial short-coherence interferogram on the line-scan detector, and

evaluating at least one spatial interferogram to obtain information about at least one of the distance, depth, profile, form, undulation, roughness, and the optical path length of an object, including in optical coherence tomography.

11. The method for robust interferometry of claim 10, characterized in that a point illumination or a laterally structured illumination of the object is effected.

12. The method for robust interferometry of claim 10, characterized in that at least one three-plane-mirror reference end reflector is produced in a metal or plastics body by means of a single-point diamond processing technique.

13. The method for robust interferometry of claim 10, wherein a spectral splitting of object and reference radiation is carried out in the detection beam path, wherein the at least one spatial interferogram with spectral splitting is detected and evaluated in order to obtain information about at least one of the distance, depth, profile, form, undulation, roughness, and optical path length of an object.

14. An arrangement for robust, wide-scale interferometry or optical coherence tomography for detecting at least one of a distance, depth, profile, form, undulation, roughness, and optical path length in or on technical or biological objects, including in layered form, which comprises the following means:

at least one source of short-coherent electromagnetic radiation for illuminating the technical or biological object, comprising a frequency comb laser cavity disposed upstream of the interferometer and having a single optical length L and at least one multi-beam interference cavity disposed downstream of a spectrally broadband source in the light path and having the single optical length L,

an interferometer having an object beam path and having at least one reference beam path, in which at least one end reflector having three plane mirrors as reference reflector is arranged, wherein the surfaces of said three plane mirrors lie in each case at least approximately perpendicular to a common reference plane BE and wherein the three trace lines of the planes which are represented by the surfaces of the three plane mirrors form a triangle ABC in the reference plane BE, in order that there is a lateral shear of the absolute value delta_q between reference beam and object beam in said interferometer, and having a measurement plane or a measurement volume in the object beam path, in which the surface or volume elements of the technical or biological object which are to be optically measured are at least approximately situated,

and at least one line-scan detector for detecting electromagnetic radiation, and

means for tuning the frequency comb laser cavity and the multi-beam interference cavity.

15. The arrangement for robust interferometry of claim 14, characterized in that there are arranged means for temporal synchronization for carrying out an optical length change delta_L of at least one frequency comb laser cavity disposed upstream of the interferometer and of at least one multi-beam interference cavity disposed downstream of the source in the light path with the image recording by means of line-scan detector.