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Method and arrangement for robust interferometry for detecting a feature of an object

  • US 8,934,104 B2
  • Filed: 01/21/2011
  • Issued: 01/13/2015
  • Est. Priority Date: 01/22/2010
  • Status: Active Grant
First Claim
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1. An arrangement for robust interferometry or optical coherence tomography for detecting at least one of a distance, depth, profile, form, undulation, roughness, optical path length, and flatness deviation in or on technical or biological objects, including in layered form, the arrangement comprising:

  • a light source for illuminating one of the technical or biological objects,an interferometer in the form of an interference microscope, having an object beam path and having at least one reference beam path, in which at least one end reflector is arranged, and a measurement plane in the object beam path, in which measurement plane the surface or volume elements of the object which are to be optically measured are at least approximately situated,and at least one line-scan detector for detecting electromagnetic radiation in the form of at least one spatial interferogram,at least one end reflector having three plane mirrors is arranged as reference reflector in the reference beam path of the interferometer, the three plane mirrors each being at least approximately perpendicular to a common reference plane BE, andthree trace lines of planes represented by the surfaces of the three plane mirrors forming a triangle ABC in the reference plane BE, in order that there is a lateral shear of an absolute value delta_q between reference beam and object beam in said interferometer.

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