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Substrate lamination system and method

  • US 8,936,057 B2
  • Filed: 01/18/2008
  • Issued: 01/20/2015
  • Est. Priority Date: 08/30/2005
  • Status: Active Grant
First Claim
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1. A substrate lamination apparatus, the apparatus comprising:

  • a vacuum chamber comprising a base portion;

    a flexible membrane, the flexible membrane partitioning the vacuum chamber into a first compartment and a second compartment;

    a substrate support; and

    a substrate alignment insert removable from both the base portion of the vacuum chamber and the substrate support, the substrate alignment insert including a generally planar base portion and a plurality of alignment guides extending upward from the planar base portion, the generally planar base portion and the plurality of alignment guides defining an aperture extending through the substrate alignment insert and being configured to receive at least a portion of a substrate and align the substrate within the vacuum chamber.

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