Substrate lamination system and method
First Claim
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1. A substrate lamination apparatus, the apparatus comprising:
- a vacuum chamber comprising a base portion;
a flexible membrane, the flexible membrane partitioning the vacuum chamber into a first compartment and a second compartment;
a substrate support; and
a substrate alignment insert removable from both the base portion of the vacuum chamber and the substrate support, the substrate alignment insert including a generally planar base portion and a plurality of alignment guides extending upward from the planar base portion, the generally planar base portion and the plurality of alignment guides defining an aperture extending through the substrate alignment insert and being configured to receive at least a portion of a substrate and align the substrate within the vacuum chamber.
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Abstract
The present disclosure is directed to a substrate lamination system and method.
A substrate lamination apparatus may comprise: (a) a vacuum chamber; (b) a flexible membrane; and (c) a substrate support.
A system for laminating substrates may comprise: (a) a vacuum chamber; (b) a flexible membrane; (c) a substrate support; (d) a vacuum pump; (e) a compressor; and (f) a control unit, wherein the control unit is configured to carry out the steps: (i) evacuating the vacuum chamber; and (ii) applying pressure to at least one of a first substrate and a second substrate.
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Citations
33 Claims
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1. A substrate lamination apparatus, the apparatus comprising:
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a vacuum chamber comprising a base portion; a flexible membrane, the flexible membrane partitioning the vacuum chamber into a first compartment and a second compartment; a substrate support; and a substrate alignment insert removable from both the base portion of the vacuum chamber and the substrate support, the substrate alignment insert including a generally planar base portion and a plurality of alignment guides extending upward from the planar base portion, the generally planar base portion and the plurality of alignment guides defining an aperture extending through the substrate alignment insert and being configured to receive at least a portion of a substrate and align the substrate within the vacuum chamber. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 32)
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14. A substrate lamination system, the apparatus comprising:
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a vacuum chamber configured to receive a first substrate and a second substrate; a first and second flexible membranes, the first and second flexible membranes partitioning the vacuum chamber into a first compartment and a second compartment; a substrate support configured to support at least one of the first substrate and the second substrate in a generally vertical fashion, the substrate support being received in one of a plurality of apertures formed in a wall of the vacuum chamber; a vacuum pump; a compressor; and a control unit, wherein the control unit is configured to control operation of the vacuum pump to evacuate the vacuum chamber such that the first and second membranes apply pressure to the first and second substrates; wherein the first and second flexible membranes and the substrate support are configured such that prior to evacuation of the chamber the first and second flexible membranes are spaced apart from the first and second substrates. - View Dependent Claims (15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 33)
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Specification