Mechanical resonating structures including a temperature compensation structure
First Claim
Patent Images
1. A mechanical resonating structure, comprising:
- an active layer; and
a compensating structure coupled to the active layer,wherein the compensating structure comprises first, second and third layers of materials, wherein the first and third layers of materials have a stiffness that increases with increasing temperature over a temperature range, andwherein the mechanical resonating structure is configured to support Lamb waves.
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Abstract
Mechanical resonating structures are described, as well as related devices and methods. The mechanical resonating structures may have a compensating structure for compensating temperature variations. The compensating structure may have multiple layers, one of which may have a stiffness that increases with increasing temperature and one of which may have a stiffness that decreases with increases in temperature.
72 Citations
16 Claims
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1. A mechanical resonating structure, comprising:
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an active layer; and a compensating structure coupled to the active layer, wherein the compensating structure comprises first, second and third layers of materials, wherein the first and third layers of materials have a stiffness that increases with increasing temperature over a temperature range, and wherein the mechanical resonating structure is configured to support Lamb waves. - View Dependent Claims (2, 3, 4, 5)
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6. A mechanical resonating structure, comprising:
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an active layer; and a compensating structure coupled to the active layer, wherein the compensating structure comprises three layers of materials, wherein at least two of the three layers of materials have a stiffness that varies according to a change in temperature over a temperature range, and wherein the mechanical resonating structure is configured to support Lamb waves, and wherein each of the three layers of materials of the compensating structure is configured to vibrate in response to actuation of the active layer. - View Dependent Claims (7, 8, 9)
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10. A mechanical resonating structure, comprising:
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an active layer; and a multi-layer compensation structure comprising multiple layers configured to provide the mechanical resonating structure with a temperature coefficient of frequency having an absolute value less than 10 ppm/K over a temperature range from −
40°
C. to 85°
C. - View Dependent Claims (11, 12, 13, 14)
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15. A mechanical resonating structure, comprising:
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an active layer formed, at least in part, of a piezoelectric material; a first patterned electrode disposed on a first surface of the active layer; a second electrode formed on a second surface of the active layer; and a multi-layer compensation structure comprising at least three layers, the multi-layer compensation structure coupled to the active layer, wherein the mechanical resonating structure is a suspended mechanical resonating structure coupled to a substrate by at least one anchor, wherein each of the at least three layers of the multi-layer compensation structure is configured to vibrate in response to actuation of the active layer, and wherein the mechanical resonating structure is configured to support Lamb waves. - View Dependent Claims (16)
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Specification