Frequency modulated micro gyro

• US 8,939,026 B2
• Filed: 05/13/2013
• Issued: 01/27/2015
• Est. Priority Date: 10/21/2008
• Status: Expired due to Fees

• Current Assignee: Ying W. Hsu
• Original Assignee: Ying W. Hsu
• Inventors: Hsu, Ying W.
• Primary Examiner(s): Chapman, Jr., John
• Application Number:
  US13/893,092
• Publication Number:
  US 20130247665A1
• Time in Patent Office: 624 Days
• Field of Search: 735/041.2
• US Class Current: 73/504.12
• CPC Class Codes: G01C 19/56 Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
• CPC Class Codes: G01C 19/5719 using planar vibrating masses driven in a translation vibration along an axis

Abstract

A sensing device comprises a rotationally oscillating proof mass resonator and a detector resonator. The detector resonator, actuated to produce an oscillating signal, is coupled to the proof mass resonator and the frequency of the oscillating signal is modulated by a change of motion of the proof mass resonator.

Claims

1. A micro-machined device for sensing a motion comprising:

a first resonator configured to be rotationally actuated,

a second resonator configured to be actuated to produce an oscillating signal, and,

means for coupling the first resonator to the second resonator whereby a frequency of the oscillating signal is modulated by a change of a motion of the first resonator.

2. A micro-machined device for sensing a force comprising:

a first resonator configured to be rotationally actuated,

a second resonator configured to be actuated to produce an oscillating signal, and,

coupling means configured for connecting the first resonator to the second resonator, the coupling means configured for transferring a force produced by the first resonator into a change in a frequency of the oscillating signal.

3. A method for sensing a motion using a micro-machined device comprising the steps of:

rotationally actuating a first resonator,

actuating a second resonator to produce an oscillating signal,

coupling the first resonator to the second resonator, and,

modulating a frequency of the oscillating signal using a change of a motion of the first resonator.

4. A method for sensing a force using a micro-machined device comprising the steps of:

rotationally actuating a first resonator,

actuating a second resonator to produce an oscillating signal,

coupling the first resonator to the second resonator,

transferring a force produced by the first resonator into a change in a frequency of the oscillating signal.