Semiconductor device, display device, and production method for semiconductor device and display device

• US 8,940,566 B2
• Filed: 11/01/2011
• Issued: 01/27/2015
• Est. Priority Date: 11/04/2010
• Status: Active Grant

• Current Assignee: Sharp Kabushiki Kaisha (Hon Hai Precision Industry Co., Ltd.)
• Original Assignee: Sharp Kabushiki Kaisha (Hon Hai Precision Industry Co., Ltd.)
• Inventors: Nakagawa, Okifumi, Chikama, Yoshimasa, Hara, Takeshi, Katsui, Hiromitsu
• Primary Examiner(s): Everhart, Caridad
• Application Number:
  US13/883,014
• Publication Number:
  US 20140147966A1
• Time in Patent Office: 1,183 Days
• Field of Search: 438/85, 438/34, 257/646, 257/258, 257/43, 349/42
• US Class Current: 438/34
• CPC Class Codes: G02F 1/136227 Through-hole connection of the pixel electrode to the active element through an insulation layer
• CPC Class Codes: G02F 1/136231 for reducing the number of lithographic steps
• CPC Class Codes: H01L 27/1225 with semiconductor materials not belonging to the group IV of the periodic table, e.g. InGaZnO
• CPC Class Codes: H01L 29/41733 for thin film transistors with insulated gate
• CPC Class Codes: H01L 29/66742 Thin film unipolar transistors
• CPC Class Codes: H01L 29/66969 of devices having semiconductor bodies not comprising group 14 or group 13/15 materials comprising selenium or tellurium in uncombined form other than as impurities in semiconductor bodies of other materials, comprising cuprous oxide or cuprous iodide H01L21/02365
• CPC Class Codes: H01L 29/78606 with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device H01L29/78642, H01L29/78645 take precedence
• CPC Class Codes: H01L 29/7869 having a semiconductor body comprising an oxide semiconductor material, e.g. zinc oxide, copper aluminium oxide, cadmium stannate

Abstract

The semiconductor device (100) according to the present invention includes a gate electrode (102) of a TFT, a gate insulating layer (103) formed on the gate electrode (102), an oxide semiconductor layer (107) disposed on the gate insulating layer (103), a protecting layer (108) formed on the oxide semiconductor layer (107) by a spin-on-glass technique, and a source electrode (105) and a drain electrode (106) disposed on the protecting layer (108). Via a first contact hole (131) formed in the protecting layer (108), the source electrode (105) is electrically connected to the oxide semiconductor layer (104), and via a second contact hole (132), the drain electrode (106) is electrically connected to the oxide semiconductor layer (104).

Claims

1. A production method of a display device including a transistor portion having a thin film transistor, a Cs portion having a pixel electrode and a storage capacitor, and a terminal portion having a connecting portion for connecting an upper layer wiring and a lower layer wiring, comprising the steps of:

(A2) forming a gate electrode, a gate insulating layer, and an oxide semiconductor layer of the thin film transistor, the storage capacitor of the Cs portion, and the lower layer wiring of the terminal portion, on a substrate;

(B2) forming a protecting layer by a spin-on-glass technique so as to cover the oxide semiconductor layer, the storage capacitor, and the lower layer wiring;

(C2) forming a source electrode and a drain electrode of the thin film transistor, and the upper layer wiring of the terminal portion, on the protecting layer;

(D2) forming a first and a second contact holes in the protecting layer in the transistor portion, forming a third contact hole in the protecting layer on the storage capacitor, and removing the protecting layer on at least part of the lower layer wiring of the terminal portion; and

(E2) forming a transparent electrode on the first, second, and third contact holes, and in the terminal portion, wherein

the source electrode and the drain electrode, and the oxide semiconductor layer are electrically connected via the transparent electrode, the transparent electrode and a counter electrode of the storage capacitor are electrically connected in the Cs portion, and the lower layer wiring and the upper layer wiring are electrically connected via the transparent electrode in the terminal portion; and

the production method further comprising, between steps (C2) and (D2);

a step of forming an interlayer insulating layer so as to cover the source electrode, the drain electrode, and the upper layer wiring;

a step of forming a second protecting layer on the interlayer insulating layer; and

a step of forming a plurality of contact holes in the second protecting layer; and

in the step (D2), the interlayer insulating layer and the protecting layer under the plurality of contact holes are removed, thereby forming the first, second and third contact holes.

2. The production method of a display device of claim 1, wherein the oxide semiconductor is made of an In—

Ga—

Zn—

O semiconductor.

3. The production method of a display device of claim 1, wherein the step (B2) of forming the protecting layer includes:

a step of applying a spin-on-glass material onto the oxide semiconductor layer and the gate insulating layer by a spin-on-glass technique; and

a step of sintering the applied spin-on-glass material.

4. The production method of a display device of claim 3, wherein in the sintering step, the protecting layer of silicon oxide is obtained due to dehydration polymerization reaction of the spin-on-glass material.

5. The production method of a display device of claim 4, wherein the spin-on-glass material includes silanol, alkoxysilane, or an organic siloxane resin.

6. The production method of a display device of claim 5, wherein the sintering temperature in the sintering step is 200 to 450°

C.

7. A production method of a display device including a transistor portion having a thin film transistor, a Cs portion having a pixel electrode and a storage capacitor, and a terminal portion having a connecting portion for connecting an upper layer wiring and a lower layer wiring, comprising the steps of:

(A2) forming a gate electrode, a gate insulating layer, and an oxide semiconductor layer of the thin film transistor, the storage capacitor of the Cs portion, and the lower layer wiring of the terminal portion, on a substrate;

(B2) forming a protecting layer by a spin-on-glass technique so as to cover the oxide semiconductor layer, the storage capacitor, and the lower layer wiring;

(C2) forming a source electrode and a drain electrode of the thin film transistor, and the upper layer wiring of the terminal portion, on the protecting layer;

(D2) forming a first and a second contact holes in the protecting layer in the transistor portion, forming a third contact hole in the protecting layer on the storage capacitor, and removing the protecting layer on at least part of the lower layer wiring of the terminal portion; and

(E2) forming a transparent electrode on the first, second, and third contact holes, and in the terminal portion;

wherein

the source electrode and the drain electrode, and the oxide semiconductor layer are electrically connected via the transparent electrode, the transparent electrode and a counter electrode of the storage capacitor are electrically connected in the Cs portion, and the lower layer wiring and the upper layer wiring are electrically connected via the transparent electrode in the terminal portion; and

in the step (E2), the transparent electrode is formed so as to be directly in contact with the source electrode and the drain electrode of the thin film transistor, the counter electrode of the storage capacitor, and the lower layer wiring and the upper layer wiring of the terminal portion.

8. The production method of a display device of claim 7, wherein the oxide semiconductor is made of an In—

Ga—

Zn—

O semiconductor.

9. The production method of a display device of claim 7, wherein the step (B2) of forming the protecting layer includes:

a step of applying a spin-on-glass material onto the oxide semiconductor layer and the gate insulating layer by a spin-on-glass technique; and

a step of sintering the applied spin-on-glass material.

10. The production method of a display device of claim 9, wherein in the sintering step, the protecting layer of silicon oxide is obtained due to dehydration polymerization reaction of the spin-on-glass material.

11. The production method of a display device of claim 10, wherein the spin-on-glass material includes silanol, alkoxysilane, or an organic siloxane resin.

12. The production method of a display device of claim 11, wherein the sintering temperature in the sintering step is 200 to 450°

C.

13. A production method of a display device including a transistor portion having a thin film transistor, a Cs portion having a pixel electrode and a storage capacitor, and a terminal portion having a connecting portion for connecting an upper layer wiring and a lower layer wiring, comprising the steps of:

(A2) forming a gate electrode, a gate insulating layer, and an oxide semiconductor layer of the thin film transistor, the storage capacitor of the Cs portion, and the lower layer wiring of the terminal portion, on a substrate;

(B2) forming a protecting layer by a spin-on-glass technique so as to cover the oxide semiconductor layer, the storage capacitor, and the lower layer wiring;

(C2) forming a source electrode and a drain electrode of the thin film transistor, and the upper layer wiring of the terminal portion, on the protecting layer;

(D2) forming a first and a second contact holes in the protecting layer in the transistor portion, forming a third contact hole in the protecting layer on the storage capacitor, and removing the protecting layer on at least part of the lower layer wiring of the terminal portion; and

(E2) forming a transparent electrode on the first, second, and third contact holes, and in the terminal portion, wherein

the source electrode and the drain electrode, and the oxide semiconductor layer are electrically connected via the transparent electrode, the transparent electrode and a counter electrode of the storage capacitor are electrically connected in the Cs portion, and the lower layer wiring and the upper layer wiring are electrically connected via the transparent electrode in the terminal portion; and

the step (C2) is performed after the steps (D2) and (E2), thereby forming the source electrode, the drain electrode, and the upper layer wiring of the terminal portion on the transparent electrode.

14. The production method of a display device of claim 13, wherein the oxide semiconductor is made of an In—

Ga—

Zn—

O semiconductor.

15. The production method of a display device of claim 13, wherein the step (B2) of forming the protecting layer includes:

a step of applying a spin-on-glass material onto the oxide semiconductor layer and the gate insulating layer by a spin-on-glass technique; and

a step of sintering the applied spin-on-glass material.

16. The production method of a display device of claim 15, wherein in the sintering step, the protecting layer of silicon oxide is obtained due to dehydration polymerization reaction of the spin-on-glass material.

17. The production method of a display device of claim 16, wherein the spin-on-glass material includes silanol, alkoxysilane, or an organic siloxane resin.

18. The production method of a display device of claim 17, wherein the sintering temperature in the sintering step is 200 to 450°

C.