MEMS actuator device deployment

• US 8,941,192 B2
• Filed: 09/28/2011
• Issued: 01/27/2015
• Est. Priority Date: 11/15/2010
• Status: Active Grant

• Current Assignee: DigitalOptics Corporation MEMS (Adeia Inc.)
• Original Assignee: DigitalOptics Corporation MEMS (Adeia Inc.)
• Inventors: Calvet, Robert J., Liu, Xiaolei, Jain, Ankur, Hariharan, Lakshminarayan, Gutierrez, Roman C.
• Primary Examiner(s): MULLINS, BURTON S
• Application Number:
  US13/247,888
• Publication Number:
  US 20120081598A1
• Time in Patent Office: 1,217 Days
• Field of Search: 310/309, 310/300, 428/50, 257/415, 257/417, 735/141.8, 735/143.2
• US Class Current: 257/415
• CPC Class Codes: B81B 2201/033 Comb drives
• CPC Class Codes: B81B 2203/053 Translation according to an axis perpendicular to the substrate
• CPC Class Codes: B81B 3/0037 For increasing stroke, i.e. achieve large displacement of actuated parts
• CPC Class Codes: G03B 2205/0007 Movement of one or more optical elements for control of motion blur imaging systems in general using optical elements for stabilisation of the position of the image G02B27/64
• CPC Class Codes: G03B 2205/0084 using other types of actuators
• CPC Class Codes: G03B 3/10 Power-operated focusing
• CPC Class Codes: G03B 5/00 Adjustment of optical system relative to image or object surface other than for focusing
• CPC Class Codes: Y10T 29/49826 Assembling or joining
• CPC Class Codes: Y10T 74/18992 Reciprocating to reciprocating

Abstract

A method for making an actuator device includes forming a substantially planar structure having a stage resiliently supported for movement within a plane of the structure, an actuator coupled to an outer periphery of the stage and operable to apply a force acting in the plane and tangentially to the stage when actuated, the actuator comprising a fixed frame and a moving frame resiliently supported for reciprocal movement relative to the fixed frame by a motion control flexure, and an outer frame surrounding and supporting the stage and the actuator. The moving frame is moved to a deployed position that is coplanar with, parallel to and spaced apart from the fixed frame at a selected distance, and the moving frame is then fixed at the deployed position for substantially rectilinear, perpendicular movement relative to the fixed frame.

Claims

1. A method for making an actuator device, the method comprising:

forming a substantially planar structure having;

a stage resiliently supported for movement within a plane of the structure,

an actuator coupled to an outer periphery of the stage and operable to apply a force acting in the plane and tangentially to the stage when actuated, the actuator including a fixed frame and a moving frame resiliently supported for reciprocal movement relative to the fixed frame by a motion control flexure, and

an outer frame surrounding and supporting the stage and the actuator;

moving either the moving frame or the fixed frame as a deployed frame to a deployed position that is coplanar with, parallel to and spaced apart from the other of the moving frame or the fixed frame at a selected distance; and

fixing the deployed frame at the deployed position for substantially rectilinear movement toward and away from the other frame.

2. The method of claim 1, wherein the moving comprises:

providing a lower snub having a resilient cantilever thereon, the cantilever having an up-standing post disposed thereon;

forming a pad coupled to the moving frame by a deployment flexure, the pad having a through-opening corresponding in size and configuration to those of the circumferential periphery of the post;

disposing the post in the opening of the pad;

providing an upper snub having a chamfer thereon; and

urging the chamfer of the upper snub downward onto the pad such that the pad is urged laterally and causes the deployment flexure to pull the moving frame to the deployed position.

3. The method of claim 1, wherein the moving comprises:

forming an engagement pad coupled to the moving frame by a deployment flexure;

providing a pair of snubs disposed in spaced opposition to each other, each snub having a motion converter disposed bilaterally symmetrical with respect to the ramp of the other, each motion converter having a pusher pad disposed at a distal end thereof;

disposing the engagement pad between the respective pusher pads of the snubs; and

urging the snubs toward each other such that the respective motion converters of the snubs rotate away from each other and cause the pusher pads to push the engagement pad laterally and thereby cause the deployment flexure to urge the moving frame to the deployed position.

4. The method of claim 1, wherein the moving comprises:

forming a deployment stage coupled to the moving frame by a deployment flexure, the stage having opposite upper and lower surfaces;

providing a pair of snubs disposed in spaced opposition to each other, each snub having a resilient inclined motion converter disposed bilaterally symmetrical with respect to the motion converter of the other and a pusher pad disposed at a distal end thereof;

placing the lower surface of the deployment stage on an upper surface of the pusher pad of the motion converter of a lower one of the snubs; and

urging a lower surface of the pusher pad of the motion converter of an upper one of the stubs downward and into contact with the upper surface of the deployment stage such that the deployment stage is urged laterally by the pusher pads and thereby causes the deployment flexure to urge the moving frame to the deployed position.

5. The method of claim 1, wherein the moving comprises:

forming a deployment pad coupled to the moving frame by a deployment flexure, the pad having a lateral surface;

providing a fixed frame having a component with a positive coefficient of thermal expansion and a lateral surface disposed in opposition to the lateral surface of the deployment pad; and

,

heating the frame such that at least the component of the frame expands laterally, causing the lateral surface of the frame to contact the opposing lateral surface of the deployment pad and urge the deployment pad laterally, thereby causing the deployment flexure to urge the moving frame to the deployed position.

6. An actuator device made in accordance with the method of claim 1.

7. An electronic device incorporating the actuator device of claim 6.

8. The electronic device of claim 7, wherein the electronic device comprises a camera.

9. A cellular telephone, a personal digital assistant (PDA), a computer or a surveillance system incorporating the camera of claim 8.

10. An actuator device, comprising:

a substantially planar structure having

a stage resiliently supported for movement within a plane of the structure,

an actuator coupled to an outer periphery of the stage and operable to apply a force acting in the plane and tangentially to the stage when actuated, the actuator including a fixed frame and a moving frame resiliently supported for reciprocal movement relative to the fixed frame by a motion control flexure, and

an outer frame surrounding and supporting the stage and the actuator, wherein

either the moving frame or the fixed frame is a deployed frame that is disposed at a deployed position that is coplanar with, parallel to and spaced apart from the other of the moving frame or the fixed frame at a selected distance, and

the frame is fixed at the deployed position for substantially rectilinear movement toward and away from the other frame.

11. An electronic device incorporating the actuator device of claim 10.

12. The electronic device of claim 11, wherein the electronic device comprises a camera.

13. A cellular telephone, a personal digital assistant (FDA), a computer or a surveillance system incorporating the camera of claim 12.

14. A method for making an actuator device, the method comprising:

forming a substantially planar structure having

a stage resiliently supported for both in-plane and out-of-plane movement relative to a plane of the device,

an actuator coupled to an outer periphery of the stage, the actuator comprising

an out-of-plane portion operable to apply a force acting perpendicular to the plane of the device and the stage when actuated, the out-of-plane portion including an out-of-plane fixed frame and an out-of-plane moving frame coupled to the stage and resiliently supported for rotational movement relative to the out-of-plane fixed frame,

an in-plane portion operable to apply a force acting in the plane of the device and tangentially to the stage when actuated, the in-plane portion including an in-plane fixed frame and an in-plane moving frame coupled to the out-of-plane fixed frame and resiliently supported for translational movement relative to the in-plane fixed frame, and

an outer frame surrounding and supporting the stage and the actuator;

rotating either the out-of-plane fixed frame or the out-of-plane moving frame to a deployed position disposed at a selected angular position relative to the other out-of-plane frame;

translating either the in-plane moving frame or the in-plane fixed frame to a deployed position that is coplanar with and spaced a selected distance apart from the other in-plane frame; and

fixing the deployed out-of-plane frame and the deployed in-plane frame at their respective deployed positions.

15. An electronic device incorporating the actuator device of claim 14.

16. The electronic device of claim 15, wherein the electronic device comprises a camera.

17. A cellular telephone, a personal digital assistant (PDA), a computer or a surveillance system incorporating the camera of claim 16.

18. An actuator device, comprising:

a substantially planar structure having

a stage resiliently supported for both in-plane and out-of-plane movement relative to a plane of the device; and

an actuator coupled to an outer periphery of the stage, the actuator comprising

an out-of-plane portion operable to apply a force acting perpendicular to the plane of the device and the stage when actuated, the out-of-plane portion including an out-of-plane fixed frame and an out-of-plane moving frame coupled to the stage and resiliently supported for rotational movement relative to the out-of-plane fixed frame,

an in-plane portion operable to apply a force acting in the plane of the device and tangentially to the stage when actuated, the in-plane portion including an in-plane fixed frame and an in-plane moving frame coupled to the out-of-plane fixed frame and resiliently supported for translational movement relative to the in-plane fixed frame, and

an outer frame surrounding and supporting the stage and the actuator, wherein

either the out-of-plane fixed frame or the out-of-plane moving frame is rotated to a deployed position disposed at a selected angular position relative to the other out-of-plane frame,

either the in-plane moving frame or the in-plane fixed frame is translated to a deployed position that is coplanar with and spaced a selected distance apart from the other in-plane frame, and

the deployed out-of-plane frame and the deployed in-plane frame are fixed at their respective deployed positions.

19. An electronic device incorporating the actuator device of claim 18.

20. The electronic device of claim 19, wherein the electronic device comprises a camera.

21. A cellular telephone, a personal digital assistant (FDA), a computer or a surveillance system incorporating the camera of claim 20.