Inertial sensor
First Claim
1. An inertial sensor comprising:
- a basement layer having a main surface;
a first drive frame connected to the basement layer via a first elastic body having higher rigidity in a second direction than in a first direction, the first direction being parallel to the main surface and the second direction crossing the first direction;
a first Coriolis frame connected to the first drive frame via a second elastic body having lower rigidity in the second direction than in the first direction;
a first driving unit which vibrates the first drive frame in the first direction;
a second drive frame connected to the basement layer via a third elastic body having higher rigidity in the second direction than in the first direction;
a second Coriolis frame connected to the second drive frame via a fourth elastic body having lower rigidity in the second direction than in the first direction;
a second driving unit which vibrates the second drive frame in the first direction; and
a plurality of driving-direction acceleration detecting units, in which a first driving-direction acceleration detecting unit is connected to the first drive frame via a fifth elastic body, and a second driving-direction acceleration detecting unit is connected to the second drive frame via a sixth elastic body,wherein the first driving unit and the second driving unit vibrate the first drive frame and the second drive frame in opposite phases in the first direction.
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Abstract
One inertial sensor detects an acceleration in a driving direction as well as an angular rate about one axis and an acceleration in a detecting direction at the same time. A driving-direction acceleration detecting unit is provided to members vibrating in mass members on the left and right via an elastic body. In this manner, when an acceleration is applied in the driving direction, the mass members on the left and right normally vibrated with a same amplitude and in opposite phases have displacement amounts in a same phase, and the driving-direction acceleration detecting unit detects the displacement amounts in the same phase as a capacitance change, thereby detecting the acceleration in the driving direction.
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Citations
13 Claims
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1. An inertial sensor comprising:
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a basement layer having a main surface; a first drive frame connected to the basement layer via a first elastic body having higher rigidity in a second direction than in a first direction, the first direction being parallel to the main surface and the second direction crossing the first direction; a first Coriolis frame connected to the first drive frame via a second elastic body having lower rigidity in the second direction than in the first direction; a first driving unit which vibrates the first drive frame in the first direction; a second drive frame connected to the basement layer via a third elastic body having higher rigidity in the second direction than in the first direction; a second Coriolis frame connected to the second drive frame via a fourth elastic body having lower rigidity in the second direction than in the first direction; a second driving unit which vibrates the second drive frame in the first direction; and a plurality of driving-direction acceleration detecting units, in which a first driving-direction acceleration detecting unit is connected to the first drive frame via a fifth elastic body, and a second driving-direction acceleration detecting unit is connected to the second drive frame via a sixth elastic body, wherein the first driving unit and the second driving unit vibrate the first drive frame and the second drive frame in opposite phases in the first direction. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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Specification