Capacitive pressure sensor

• US 8,943,895 B2
• Filed: 09/07/2012
• Issued: 02/03/2015
• Est. Priority Date: 09/07/2012
• Status: Active Grant

• Current Assignee: Dynisco Instruments, LLC (Roper Technologies, Inc.)
• Original Assignee: Dynisco Instruments, LLC (Roper Technologies, Inc.)
• Inventors: Barron, Leo E., Czazasty, John A.
• Primary Examiner(s): ALLEN, ANDRE J
• Application Number:
  US13/607,602
• Publication Number:
  US 20140069199A1
• Time in Patent Office: 879 Days
• Field of Search: 73700-756
• US Class Current: 73/718
• CPC Class Codes: G01L 19/0046 using isolation membranes G01L13/026 and G01L19/0645 take precedence
• CPC Class Codes: G01L 19/0061 Electrical connection means
• CPC Class Codes: G01L 19/04 Means for compensating for effects of changes of temperature , i.e. other than electric compensation
• CPC Class Codes: G01L 9/125 with temperature compensating means non electric temperature compensating means G01L19/04

Abstract

Pressure sensors and their methods of use are described. In one embodiment, a pressure sensor includes a pressure deflectable diaphragm end formed of a first material with a first coefficient of thermal expansion, and a relatively non-deformable component formed of a second material having a second coefficient of thermal expansion. The pressure deflectable diaphragm end and the non-deformable component form a first and a second portion of a capacitor. An intermediate component separates, or is disposed between, the pressure deflectable diaphragm end and the relatively non-deformable component. The intermediate component is formed of a material with a coefficient of thermal expansion that is less than the first coefficient of thermal expansion which may help minimize changes in span with temperature. In other embodiments, a pressure sensor includes an intermediate circuit located between a distal end of the pressure sensor and a remotely located circuit enclosure including a main circuit.

Claims

1. A pressure sensor, comprising:

a probe body comprising a pressure deflectable diaphragm end formed of a first material having a first coefficient of thermal expansion, the diaphragm end including a first surface at least partially defining a first portion of a capacitor;

a relatively non-deformable component formed of a second material having a second coefficient of thermal expansion, the relatively non-deformable component including a second surface spaced from the first surface, the second surface at least partially defining a second portion of the capacitor; and

an intermediate component disposed at a peripheral region, the intermediate component isolating the pressure deflectable diaphragm end and the relatively non-deformable component from each other, the intermediate component being formed of a third material having a third coefficient of thermal expansion;

wherein the third coefficient of thermal expansion is less than the first coefficient of thermal expansion.

2. The pressure sensor according to claim 1, wherein the third coefficient of thermal expansion is similar to the second coefficient of thermal expansion.

3. The pressure sensor according to claim 1, wherein the third coefficient of thermal expansion is less than the second coefficient of thermal expansion.

4. The pressure sensor according to claim 1, wherein the relatively non-deformable component comprises a disk shaped component formed of alumina.

5. The pressure sensor according to claim 1, wherein the relatively non-deformable component is spring biased toward the pressure deflectable diaphragm end.

6. The pressure sensor according to claim 5, wherein the relatively non-deformable component is spring biased between the probe body and the pressure deflectable diaphragm end.

7. The pressure sensor according to claim 1, wherein the intermediate component comprises an iron-nickel-cobalt alloy.

8. The pressure sensor according to claim 1, wherein the intermediate component comprises titanium.

9. The pressure sensor according to claim 1, wherein the intermediate component comprises an annular shim.

10. The pressure sensor according to claim 1, wherein the intermediate component is formed as a coating on at least one of the pressure deflectable diaphragm end and the relatively non-deformable component.

11. The pressure sensor according to claim 1, wherein the intermediate component is constructed and arranged to reduce thermally induced radial tensile stress between the non-deformable component and the pressure deflectable diaphragm end.

12. The pressure sensor according to claim 1, wherein the intermediate component is disposed at a peripheral region between the first and second surfaces.

13. The pressure sensor according to claim 1, wherein the pressure deflectable diaphragm end is formed of metal.

14. The pressure sensor according to claim 1, wherein the relatively non-deformable component is formed of a relatively electrically insulative material and wherein the second surface comprises a metallization layer.

15. The pressure sensor according to claim 1, wherein the pressure deflectable diaphragm end of the probe body comprises a distal end and wherein the probe body comprises a proximal end opposite the distal end, wherein an intermediate circuit enclosure is disposed at the proximal end and wherein an intermediate circuit is disposed in the intermediate circuit enclosure, wherein the first and second portions of the capacitor define a capacitive sensor, with the intermediate circuit receiving a signal from the capacitive sensor.

16. The pressure sensor according to claim 15, further comprising a remote circuit enclosure and a main circuit disposed in the remote circuit enclosure, the remote circuit enclosure connected to the intermediate circuit enclosure by an interconnect, the intermediate circuit communicating with the main circuit through the interconnect.

17. The pressure sensor according to claim 16, wherein the intermediate circuit is disposed on a printed circuit board, and wherein a temperature sensor is disposed on the printed circuit board.

18. The pressure sensor according to claim 17, wherein the main circuit is configured to receive a temperature signal from the temperature sensor and wherein the main circuit is configured to produce an output signal that is compensated for the temperature of the intermediate electronics enclosure.

19. The pressure sensor according to claim 1, wherein the intermediate component comprises a material having a low coefficient of friction.

20. A pressure sensor, comprising:

a probe body;

a pressure deflectable diaphragm end formed of a conductive material and coupled to the probe body, the conductive material having a first coefficient of thermal expansion, the pressure deflectable diaphragm end having a first surface defining at least a first portion of a capacitor;

an alumina disk having a second coefficient of thermal expansion that is less than the first coefficient of thermal expansion, the disk including a metallization layer, with the metallization layer being spaced from the first surface such that the metallization layer at least partially defines a second portion of the capacitor;

a spring disposed between the probe body and the alumina disc, the spring biasing the alumina disk toward the pressure deflectable diaphragm end; and

an annular shim component disposed at a peripheral region of the alumina disk and isolating the alumina disk from the pressure deflectable diaphragm end, the annular shim being formed of a third material having a third coefficient of thermal expansion;

wherein the third coefficient of thermal expansion is less than the first coefficient of thermal expansion.

21. A pressure sensor comprising an intermediate circuit that produces an electrical voltage signal proportional to a difference between a reference capacitance and a sensed capacitance.

22. The pressure sensor according to claim 21, wherein the intermediate circuit comprises a diode bridge.

23. The pressure sensor according to claim 22, further comprising a probe assembly having a capacitive pressure sensor at a distal end, the capacitive pressure sensor capable of producing the sensed capacitance as a result of pressure acting on the capacitive pressure sensor.

24. The pressure sensor according to claim 23, wherein the probe assembly comprises a proximal end opposite the distal end, wherein an intermediate circuit enclosure is disposed at the proximal end and wherein the intermediate circuit is disposed in the intermediate circuit enclosure.

25. The pressure sensor according to claim 24, further comprising a remote circuit enclosure and a main circuit disposed in the remote circuit enclosure, the remote circuit enclosure connected to the intermediate circuit enclosure by an interconnect, the intermediate circuit communicating with the main electrical circuit through the interconnect.

26. The pressure sensor according to claim 25, wherein the intermediate circuit transmits the electrical voltage signal to the main circuit through the interconnect.

27. The pressure sensor according to claim 21, wherein the intermediate circuit is configured to operate continuously at temperatures exceeding approximately 125°

C.

28. The pressure sensor according to claim 27, wherein the intermediate circuit is configured to operate continuously at temperatures of approximately 150°

C.

29. The pressure sensor according to claim 21, wherein the electrical voltage signal is a DC signal.

30. The pressure sensor according to claim 25, wherein a distance between the intermediate circuit enclosure and the remote circuit enclosure is at least double a distance between the intermediate circuit enclosure and the distal end of the probe assembly.

31. The pressure sensor according to claim 25, wherein a distance between the intermediate circuit enclosure and the remote circuit enclosure is at least quadruple a distance between the intermediate electronics enclosure and the distal end of the probe assembly.

32. The pressure sensor according to claim 25, wherein the probe assembly includes a relatively rigid body extending between the intermediate circuit enclosure and the distal end and wherein the interconnect is relatively flexible.

33. The pressure sensor according to claim 25, further comprising a temperature sensor configured to sense a temperature indicative of the intermediate circuit enclosure.

34. The pressure sensor according to claim 33, wherein the intermediate circuit is disposed on a printed circuit board, and wherein the temperature sensor is disposed on the printed circuit board.

35. The pressure sensor according to claim 33, wherein the main circuit is configured to receive a temperature signal from the temperature sensor and wherein the main circuit is configured to produce an output signal that is compensated for a temperature of the intermediate circuit enclosure.

36. A pressure sensor comprising:

a probe assembly including;

a relatively rigid body;

a distal end having a capacitive pressure sensor, the capacitive pressure sensor capable of producing a sensed capacitance as a result of pressure acting on the capacitive pressure sensor; and

a proximal end opposite the distal end;

an intermediate circuit enclosure disposed at the proximal end;

a capacitive detection bridge circuit housed within the intermediate circuit enclosure, the capacitive detection bridge circuit producing an electrical voltage signal proportional to a difference between a reference capacitance and the sensed capacitive signal;

a remote circuit enclosure;

a relatively flexible interconnect coupling the remote circuit enclosure to the intermediate circuit enclosure; and

a main circuit disposed in the remote circuit enclosure, the remote circuit enclosure connected to the intermediate circuit enclosure by the relatively flexible interconnect, the capacitive detection bridge circuit transmitting the electrical voltage signal to the main electrical circuit through the interconnect.