×

Element structure, inertia sensor, and electronic device

  • US 8,950,259 B2
  • Filed: 05/25/2011
  • Issued: 02/10/2015
  • Est. Priority Date: 05/26/2010
  • Status: Active Grant
First Claim
Patent Images

1. A movement sensor, comprising:

  • a first substrate that has a first support layer on which a first sensor element is mounted; and

    a second substrate that has a second support layer on which a second sensor element is mounted,wherein a surface on which the first sensor element of the first support layer is mounted and a surface on which the second sensor element of the second support layer is mounted face each other;

    the first sensor element includes a first movable part including a first movable electrode that moves relative to a first fixed electrode formed on a first fixed part of the first sensor element, the first fixed electrode facing the first movable electrode; and

    the second sensor element includes a second movable part including a second movable electrode that moves relative to a second fixed electrode formed on a second fixed part of the second sensor element, the second fixed electrode facing the second movable electrode.

View all claims
  • 2 Assignments
Timeline View
Assignment View
    ×
    ×