Single-chamber sequential curing of semiconductor wafers

• US 8,951,348 B1
• Filed: 02/10/2012
• Issued: 02/10/2015
• Est. Priority Date: 04/26/2005
• Status: Active Grant

• Current Assignee: Novellus Systems Incorporated (Lam Research Corporation)
• Original Assignee: Novellus Systems Incorporated (Lam Research Corporation)
• Inventors: Shrinivasan, Krishnan, Wang, Feng, Kamian, George, Gentile, Steve, Yam, Mark
• Primary Examiner(s): Hassanzadeh, Parviz
• Assistant Examiner(s): Nuckols, Tiffany
• Application Number:
  US13/370,579
• Time in Patent Office: 1,096 Days
• Field of Search: 118/715, 118728-733, 15634551-34555
• US Class Current: 118/725
• CPC Class Codes: C23C 16/56 After-treatment
• CPC Class Codes: H01L 21/67109 mainly by convection
• CPC Class Codes: H01L 21/67115 mainly by radiation

Abstract

The present invention relates to curing of semiconductor wafers. More particularly, the invention relates to cure chambers containing multiple cure stations, each featuring one or more UV light sources. The wafers are cured by sequential exposure to the light sources in each station. In some embodiments, the wafers remain stationary with respect to the light source during exposure. In other embodiments, there is relative movement between the light source and the wafer during exposure. The invention also provides chambers that may be used to independently modulate the cross-linking, density and increase in stress of a cured material by providing independent control of the wafer temperature and UV intensity.

Claims

1. An apparatus for curing a plurality of wafers, the apparatus comprising:

a chamber housing having a plurality of stationary semiconductor processing stations, wherein every one of the semiconductor processing stations is associated with a different, non-overlapping UV exposure area located sequentially along a nominally circular path;

a plurality of wafer supports,

a plurality of ultraviolet (UV) light sources, each of which is associated with one and only one of the UV exposure areas, wherein each UV exposure area is configured to be illuminated by one and only one UV light source of the plurality of UV light sources when the UV light sources are powered, and

at least one of the UV light sources includes a cold mirror that is configured to reflect light from the at least one of the UV light sources onto the corresponding UV exposure area;

a rotational mechanism with an axis of rotation, the rotational mechanism configured to move the wafer supports along the nominally circular path.

2. The apparatus of claim 1, wherein two or more of the UV light sources are configured to provide UV light of different, non-zero intensities to the UV exposure areas associated with the two or more UV light sources.

3. The apparatus of claim 1, wherein two or more of the UV light sources are configured to provide non-zero intensity UV light that is independently variable with respect to intensity.

4. The apparatus of claim 1, wherein two or more of the UV light sources are configured to provide UV light of different, non-identical wavelength ranges to the UV exposure areas associated with the two or more UV light sources.

5. The apparatus of claim 1, wherein two or more of the UV light sources are configured to also provide different amounts of infrared radiation to the UV exposure areas associated with the two or more UV light sources.

6. The apparatus of claim 1, wherein:

each wafer support has a center point;

each UV light source is configured to provide a non-uniform illumination pattern to the associated UV exposure area when powered; and

each non-uniform illumination pattern of each UV exposure area has, with respect to each wafer support, a different orientation with respect to a reference line passing through the center point of the wafer support and the axis of rotation when the wafer support is positioned within the UV exposure area associated with the UV light source that is configured to provide the non-uniform illumination pattern.

7. The apparatus of claim 1, wherein at least one UV light source of the plurality of UV light sources includes a plurality of UV lamps.

8. The apparatus of claim 1, wherein:

the rotational mechanism is a carousel, and

the wafer supports rotate simultaneously and by equal amounts when the carousel is rotated.

9. The apparatus of claim 1, wherein each wafer support is configured to support a wafer of the plurality of wafers, the apparatus further comprising a mechanism for controlling the temperature of the wafers supported by the wafer supports independent of UV light intensities provided by the UV light sources.

10. The apparatus of claim 9, wherein the mechanism for controlling the temperature of the wafers comprises the wafer supports, wherein the wafer supports are configured to control the temperature of wafers supported by the one or more wafer supports.

11. The apparatus of claim 1, wherein each cold mirror is mounted on a base coated with an IR-absorbing material.

12. The apparatus of claim 11, wherein each base includes coolant tubes.

13. The apparatus of claim 1, wherein the wafer supports comprise a plurality of pedestals.

14. The apparatus of claim 1, wherein each UV light source includes a reflector block, the reflector block comprising at least one reflector configured to direct light emitted from the UV light source towards the associated UV exposure area.

15. The apparatus of claim 14, wherein the at least one reflector comprises a parabolic reflector.

16. The apparatus of claim 14, wherein the at least one reflector comprises an elliptical reflector.

17. The apparatus of claim 14, wherein the at least one reflector comprises a planar reflector.

18. An apparatus for curing a plurality of wafers, the apparatus comprising:

a chamber housing having a plurality of stationary semiconductor processing stations, wherein every one of the semiconductor processing stations is associated with a different, non-overlapping UV exposure area located sequentially along a nominally circular path;

a plurality of wafer supports;

a plurality of ultraviolet (UV) light sources, wherein;

each of the UV light sources is associated with one and only one of the UV exposure areas,

each UV exposure area is configured to be illuminated by one and only one UV light source of the plurality of UV light sources when the UV light sources are powered, and

each UV light source is associated with a cold mirror configured to redirect UV light emitted from that UV light source towards the UV exposure area associated with that UV light source; and

a rotational mechanism with an axis of rotation, the rotational mechanism configured to move the wafer supports along the nominally circular path.

19. The apparatus of claim 18, wherein each cold mirror is mounted on a base coated with an IR-absorbing material.

20. The apparatus of claim 19, wherein each base includes coolant tubes.