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Method for fabricating an interlayer

  • US 8,951,922 B2
  • Filed: 03/13/2013
  • Issued: 02/10/2015
  • Est. Priority Date: 01/22/2013
  • Status: Active Grant
First Claim
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1. A method for fabricating an interlayer, comprising:

  • (1) providing a substrate;

    (2) forming an interlayer on said substrate; and

    (3) performing a polymerization to said interlayer for modifying said interlayer wherein a UV light having a wavelength in range of 100 nm to 400 nm is applied to irradiate a surface of said interlayer in an ozone environment for polymerizing said interlayer; and

    (4) performing an OH bonding removing treatment to said surface of said interlayer for removing OH bondings on said surface of said polymerized interlayer after said step (3) wherein said step (4) comprises;

    dissolving a surfactant in a solvent for preparing a surfactant solution; and

    coating said surfactant solution on said surface of said interlayer.

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