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MEMS actuator alignment

  • US 8,953,934 B2
  • Filed: 08/23/2013
  • Issued: 02/10/2015
  • Est. Priority Date: 11/15/2010
  • Status: Active Grant
First Claim
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1. A method for making an apparatus, the method comprising:

  • forming an actuator device with at least one actuator having components that move rotationally relative to each other about a pivot axis extending between opposing ones of the components, a platform rotatably coupled to the at least one actuator and a plurality of radially extending tabs disposed around an outer periphery thereof;

    disposing an optical element on or in a central opening of the platform;

    providing an annular structure having a front surface with plurality of slots disposed around a central opening therein, each slot having sidewalls complementary in configuration to corresponding sidewalls of a corresponding one of the tabs; and

    inserting respective ones of the tabs into corresponding ones of the slots such that an optical axis of the optical element is disposed coaxially with a central axis of the central opening of the annular structure.

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