MEMS actuator alignment

• US 8,953,934 B2
• Filed: 08/23/2013
• Issued: 02/10/2015
• Est. Priority Date: 11/15/2010
• Status: Active Grant

• Current Assignee: DigitalOptics Corporation MEMS (Adeia Inc.)
• Original Assignee: DigitalOptics Corporation MEMS (Adeia Inc.)
• Inventors: Calvet, Robert J., Gutierrez, Roman C., Wang, Guiqin
• Primary Examiner(s): LaBalle, Clayton E
• Assistant Examiner(s): BUTLER, KEVIN C
• Application Number:
  US13/975,122
• Publication Number:
  US 20130343740A1
• Time in Patent Office: 536 Days
• Field of Search: 396/133, 396 54- 55
• US Class Current: 396/133
• CPC Class Codes: G02B 7/003 Alignment of optical elements G02B7/001, G02B7/002 take precedence; for mirrors G02B7/1822
• CPC Class Codes: G02B 7/04 with mechanism for focusing or varying magnification
• CPC Class Codes: G02B 7/08 adapted to co-operate with a remote control mechanism
• CPC Class Codes: G03B 13/34 Power focusing
• CPC Class Codes: Y10T 29/49002 Electrical device making
• CPC Class Codes: Y10T 29/49117 Conductor or circuit manufacturing
• CPC Class Codes: Y10T 29/49899 by multiple cooperating aligning means

Abstract

A method for aligning an actuator device relative to an adjacent component, such as a rear cover of an actuator module or a stationary lens, includes disposing a plurality of radially extending tabs around an outer periphery of the actuator device, disposing a corresponding plurality of pairs of raised mounting features on a front surface of the adjacent component, each pair defining a slot having sidewalls that are complementary in configuration to respective sidewalls of corresponding ones of the tabs, and inserting respective ones of the tabs into corresponding ones of the slots.

Claims

1. A method for making an apparatus, the method comprising:

forming an actuator device with at least one actuator having components that move rotationally relative to each other about a pivot axis extending between opposing ones of the components, a platform rotatably coupled to the at least one actuator and a plurality of radially extending tabs disposed around an outer periphery thereof;

disposing an optical element on or in a central opening of the platform;

providing an annular structure having a front surface with plurality of slots disposed around a central opening therein, each slot having sidewalls complementary in configuration to corresponding sidewalls of a corresponding one of the tabs; and

inserting respective ones of the tabs into corresponding ones of the slots such that an optical axis of the optical element is disposed coaxially with a central axis of the central opening of the annular structure.

2. The method of claim 1, further comprising:

providing a front cover having a central opening and a plurality of radial slots disposed around an outer periphery thereof; and

attaching the front cover to a front surface of the actuator device such that each of the radial slots exposes a front surface of a respective one of the plurality of radially extending tabs and a central axis of the central opening of the front cover is aligned coaxially with the optical axis of the optical element.

3. The method of claim 2, wherein

a front surface of at least one of the plurality of radially extending tabs is plated or coated with an electrically conductive material comprising one or more of gold, monocrystalline silicon and/or polycrystalline silicon, and

the components of the at least one actuator move rotationally relative to each other about the pivot axis and wherein the pivot axis extends between opposing edges of the components.

4. The method of claim 3, further comprising electrically connecting a wire or a flexible circuit board to the surface through a corresponding one of the radial slots.

5. The method of claim 3, wherein the connecting comprises adhering the wire or flexible circuit board to the surface with an electrically conductive adhesive.

6. The method of claim 1, wherein:

the actuator device comprises a single monolithic structure and the forming comprises utilizing photolithography techniques;

the platform is coupled to the at least one actuator by a hinge flexure; and

the optical element is a first optical element.

7. The method of claim 6, further comprising disposing a second optical element within the central opening of the annular structure such that an optical axis of the second optical element is disposed coaxially with the optical axis of the first optical element.

8. The method of claim 6, further comprising:

providing an annular lens barrel having a central opening;

disposing a second optical element within the central opening of the lens barrel; and

inserting the annular structure into the central opening of the lens barrel such that outer circumferential surfaces of the tabs abut with an inner circumferential surface of the lens barrel and coaxially align the optical axis of the first optical element with the optical axis of the second optical element.

9. The method of claim 1, further comprising incorporating the apparatus into a lens barrel of a miniature camera.

10. The method of claim 9, further comprising incorporating the miniature camera into an electronic device.

11. The method of claim 9, further comprising utilizing the at least one actuator to effect at least one of focusing and zooming of the miniature camera.

12. An apparatus, comprising:

an actuator device with at least one actuator having components that move rotationally relative to each other about a pivot axis extending between opposing edges of the components, a platform rotatably coupled to each of the actuators, and a plurality of radially extending tabs disposed around an outer periphery thereof; and

an optical element disposed on or within an opening in the platform.

13. The apparatus of claim 12, wherein actuation of the at least one actuator causes the platform and the optical element to move conjointly with translational movement along an optical axis of the optical element.

14. The apparatus of claim 12, further comprising:

an annular structure having a front surface with plurality of slots disposed around a central opening therein, each slot having sidewalls complementary in configuration to corresponding sidewalls of a corresponding one of the tabs,

wherein respective ones of the tabs are disposed in corresponding ones of the slots such that an optical axis of the optical element is disposed coaxially with a central axis of the central opening of the annular structure.

15. The device of claim 14, further comprising;

a front cover having a central opening and a plurality of radial slots disposed around an outer periphery thereof,

wherein the front cover is attached to a front surface of the actuator device such that each of the radial slots exposes a front surface of a respective one of the tabs, and

a central axis of the central opening of the front cover is aligned coaxially with the optical axis of the optical element.

16. The apparatus of claim 14, wherein:

the optical element comprises a first optical element; and

further comprising a second optical element disposed within the central opening of the annular structure such that an optical axis of the second optical element is disposed coaxially with the optical axis of the one first optical element.

17. The apparatus of claim 16, further comprising:

an annular lens barrel having a central opening and the second optical element disposed within the central opening such that an optical axis of the second optical element is aligned coaxially with a central axis of the central opening,

wherein the annular structure is disposed within the central opening of the lens barrel such that outer circumferential surfaces of the tabs abut with an inner circumferential surface of the lens barrel and coaxially align the optical axis of the optical element with the optical axis of the second optical element.

18. The apparatus of claim 16, wherein at least one of the first and the second optical elements comprises a lens, a group of lenses, a fixed aperture, a variable aperture, a shutter, a mirror, a prism, a spatial light modulator, a diffraction grating, a laser, an LED and/or a light detector.

19. The apparatus of claim 14, wherein each of the slots is defined by a pair of raised mounting features disposed on the front surface of the annular structure and the platform is coupled to each of the actuators by a hinge flexure.

20. The apparatus of claim 12, wherein rotational movement of the at least one actuator causes the platform and the first optical element to move conjointly with purely translational movement along an optical axis of the first optical element.

21. A lens barrel incorporating the apparatus of claim 12.

22. A miniature camera incorporating the lens barrel of claim 21.

23. An electronic device incorporating the miniature camera of claim 22.

24. A cellular telephone, a laptop computer, a personal digital assistant or a surveillance device incorporating the apparatus of claim 12.