Yaw rate sensor and method for manufacturing a mass element

• US 8,955,379 B2
• Filed: 07/08/2011
• Issued: 02/17/2015
• Est. Priority Date: 07/27/2010
• Status: Active Grant

• Current Assignee: Robert Bosch GmbH
• Original Assignee: Robert Bosch GmbH
• Inventors: Classen, Johannes
• Primary Examiner(s): KWOK, HELEN C
• Application Number:
  US13/179,157
• Publication Number:
  US 20120024059A1
• Time in Patent Office: 1,320 Days
• Field of Search: 735/041.2, 735/041.4, 735/040.4, 735/041.5, 735/040.2
• US Class Current: 73/504.12
• CPC Class Codes: G01C 19/5747 each sensing mass being connected to a driving mass, e.g. driving frames

Abstract

A yaw rate sensor includes a drive device, at least one mass element which is connected to the drive device, and at least one detection electrode for detecting a motion of the mass element. The mass element has a base layer and at least one web which is situated on the base layer. Also, a method for manufacturing a mass element.

Claims

1. A yaw rate sensor comprising:

a drive device;

at least one mass element which is connected to the drive device, the mass element including a base layer and at least one web which is situated on the base layer forming a lattice structure such that cells are formed within the lattice structure, and at least one etching hole is provided in each cell; and

at least one detection electrode for detecting a motion of the mass element;

wherein the drive device includes at least one drive frame.

2. The yaw rate sensor according to claim 1, wherein multiple webs are situated in a grid shape on the base layer.

3. The yaw rate sensor according to claim 1, further comprising a substrate on which the at least one mass element is vibratably mounted.

4. The yaw rate sensor according to claim 3, wherein the substrate is a conductive supporting plate, which includes the at least one detection electrode.

5. A yaw rate sensor comprising:

a drive device;

at least one mass element which is connected to the drive device, the mass element including a base layer and at least one web which is situated on the base layer forming a lattice structure such that cells are formed within the lattice structure, and at least one etching hole is provided in each cell; and

at least one detection electrode for detecting a motion of the mass element;

wherein the drive device includes drive frames coupled to a substrate via at least one of springs and anchors.

6. The yaw rate sensor according to claim 5, wherein the drive frames are coupled to the mass element via coupling elements including springs.

7. The yaw rate sensor according to claim 6, wherein the springs are U-springs.