Piezoelectric microfluidic pumping device and method for using the same

• US 8,956,325 B2
• Filed: 12/07/2011
• Issued: 02/17/2015
• Est. Priority Date: 12/07/2011
• Status: Active Grant

• Current Assignee: STMicroelectronics Incorporated (STMicroelectronics NV)
• Original Assignee: STMicroelectronics Incorporated (STMicroelectronics NV)
• Inventors: Palmieri, Michele
• Primary Examiner(s): Stigell, Theodore
• Assistant Examiner(s): KOO, BENJAMIN K
• Application Number:
  US13/313,443
• Publication Number:
  US 20130150790A1
• Time in Patent Office: 1,168 Days
• Field of Search: 604/153, 604/891.1, 251/129.01, 417/413.2, 137/831
• US Class Current: 604/153
• CPC Class Codes: A61M 2205/0244 Micromachined materials, e.g. made from silicon wafers, microelectromechanical systems [MEMS] or comprising nanotechnology
• CPC Class Codes: A61M 2205/0294 Piezoelectric materials
• CPC Class Codes: A61M 35/00 Devices for applying media, e.g. remedies, on the human body devices for handling toiletry or cosmetic substances A45D; absorbent pads, e.g. swabs, A61F13/15
• CPC Class Codes: A61M 5/142 Pressure infusion, e.g. using pumps
• CPC Class Codes: A61M 5/14224 Diaphragm type
• CPC Class Codes: F04B 43/046 with piezoelectric drive

Abstract

Disclosed herein is a microfluidic pumping device having a piezoelectric member positioned above a displaceable membrane. A voltage is applied across the piezoelectric member causing the piezoelectric member to displace the membrane. Displacement of the membrane increases and decreases pressure in a cavity that is below the membrane. The increases and decreases in pressure actuate cantilevered check valve members to facilitate unidirectional liquid flow through the pumping device.

Claims

1. A liquid displacement apparatus, comprising:

a silicon substrate;

a first cavity formed in the substrate and having an inlet side and an outlet side;

a piezoelectrically displaceable membrane positioned above the first cavity at least partially enclosing the cavity;

a ceiling member positioned above the membrane;

a second cavity positioned proximate the inlet side of the first cavity; and

an inlet valve member at least partially suspended above the first cavity, the inlet valve member communicatively couples the second cavity to the first cavity by swinging to a first position that is at least partially in the first cavity in response to displacement of the membrane to a first displacement position and communicatively decouples the first cavity from the second cavity by swinging to a second position that is at least partially in the second cavity;

a third cavity formed proximate to the outlet side of the first cavity and having an upper portion bound by the ceiling member and a lower portion bound by the substrate; and

an outlet valve member positioned between the first cavity and the third cavity, the outlet valve member at least partially suspended over the first cavity and extending from the membrane, wherein the outlet valve member communicatively couples and decouples the first cavity to the third cavity by flexibly swinging between a third position that is at least partially in the third cavity and a fourth position that is at least partially in the first cavity, the outlet valve member abutting the substrate in the fourth position and communicatively decoupling the third cavity from the first cavity in response to displacement of the membrane to the first displacement position when in the fourth position.

2. The apparatus of claim 1 wherein the inlet valve member communicatively decouples the first cavity from the second cavity in response to displacement of the membrane to a second displacement position different from the first displacement position.

3. The apparatus of claim 1 wherein the outlet valve member flexibly swings to the fourth position in the first cavity and the inlet valve member flexibly swings to the first position in the first cavity in response to displacement of the membrane to the first displacement position, and the outlet valve member flexibly swings to the third position in the third cavity and the inlet valve member flexibly swings to the second position in the second cavity in response to displacement of the membrane to a second displacement position different from the first displacement position.

4. The apparatus of claim 1 wherein the second cavity includes an upper portion bound by the ceiling member and a lower portion bound by the substrate.

5. The apparatus of claim 1 wherein the inlet valve member extends from the substrate.

6. A liquid displacement apparatus comprising:

a silicon substrate;

a first cavity formed in the substrate and having an inlet side and an outlet side;

a piezoelectrically displaceable membrane positioned above the first cavity at least partially enclosing the cavity;

a ceiling member positioned above the membrane;

a second cavity positioned proximate the inlet side of the first cavity; and

an inlet valve member at least partially suspended above the first cavity, the inlet valve member communicatively couples the second cavity to the first cavity by swinging to a first position that is at least partially in the first cavity in response to displacement of the membrane to a first displacement position and communicatively decouples the first cavity from the second cavity by swinging to a second position that is at least partially in the second cavity;

a third cavity formed proximate to the outlet side of the first cavity and having an upper portion bound by the ceiling member and a lower portion bound by the substrate; and

an outlet valve member positioned between the first cavity and the third cavity, the outlet valve member at least partially suspended over the cavity and extending from the membrane, wherein the outlet valve member communicatively couples and decouples the first cavity to the third cavity by flexibly swinging between a third position that is at least partially in the third cavity and a fourth position that is at least partially in the first cavity, wherein the inlet valve member communicatively decouples the first cavity from the second cavity in response to displacement of the membrane to a second displacement position different from the first displacement position and the inlet valve member abuts the ceiling member in the second position thereby communicatively decoupling the first cavity from the second cavity.

7. The apparatus of claim 6 wherein the outlet valve member abuts the substrate in the fourth position thereby communicatively decoupling the third cavity from the first cavity in response to displacement of the membrane to the first displacement position.

8. A drug delivery device, comprising:

a portable power supply;

a drug reservoir; and

a liquid displacement apparatus, including;

a silicon substrate,

a cavity formed in the substrate,

a piezoelectrically displaceable membrane positioned above the cavity to at least partially enclose the cavity,

a ceiling member positioned above the membrane, and

an inlet valve member partially suspended above the cavity and configured to communicatively couple the drug reservoir to the cavity by swinging to a first position having part of the inlet valve member in the cavity and to communicatively decouple the cavity from the drug reservoir by swinging to a second position having part of the inlet valve member in the inlet chamber in response to displacements of the membrane;

an outlet chamber;

an outlet valve member extending from the membrane and configured to couple and decouple the outlet chamber from the cavity by swinging between a third position having part of the outlet valve member in the outlet chamber and a fourth position having part of the outlet valve member in the cavity in response to displacements of the membrane, the outlet valve member being a second check valve, that abuts the substrate when in the fourth position to stop a backflow of drug from the outlet chamber to the cavity.

9. A method of moving liquid, comprising:

displacing a piezoelectrically actuated membrane, suspended above a cavity formed in a silicon substrate, between a first position that is proximate the cavity relative to a resting position of the membrane and a second position that is away from the cavity relative to the resting position of the membrane;

communicatively decoupling an inlet chamber and the cavity by swinging a free end of an inlet cantilever into the inlet chamber and communicatively coupling the inlet chamber and the cavity by swinging the free end of the inlet cantilever into the cavity in response to displacing the piezoelectrically actuated membrane; and

communicatively coupling an outlet chamber and the cavity by swinging a free end of an outlet cantilever into an outlet chamber and communicatively decoupling the outlet chamber and the cavity by swinging the free end of the outlet cantilever into the cavity to abut the substrate in the fourth position by displacing the piezoelectrically actuated membrane.

10. The method of claim 9, further comprising:

inhibiting flow of a fluid from the cavity to the inlet chamber by communicatively decoupling the cavity from the inlet chamber in response to displacing the membrane towards the first position.

11. The method of claim 10, further comprising:

allowing flow of the fluid from the cavity to the outlet chamber by communicatively coupling the cavity to the outlet chamber in response to displacing the membrane towards the first position.

12. The method of claim 9, further comprising:

inhibiting flow of a fluid from the outlet chamber to the cavity by communicatively decoupling the cavity from the outlet chamber in response to displacing the membrane towards the second position.

13. The method of claim 12, further comprising:

allowing flow of the fluid from the inlet chamber to the cavity by communicatively coupling the cavity to the inlet chamber in response to displacing the membrane towards the second position.