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Microelectromechanical system megasonic transducer

  • US 8,957,564 B1
  • Filed: 06/29/2011
  • Issued: 02/17/2015
  • Est. Priority Date: 06/29/2010
  • Status: Active Grant
First Claim
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1. A system comprising:

  • a plurality of Micro-Electromechanical System (MEMS) transducers, each transducer including a movable membrane with a membrane electrode coupled to a first potential disposed above and spaced apart from an upper surface of a die including a cavity electrode coupled to a second potential, the membrane including multiple layers including a polysilicon layer between a top silicon nitride layer and a bottom silicon nitride layer, and the membrane electrode includes the polysilicon layer;

    a chuck on which a target workpiece is positioned; and

    a fluid to couple sonic energy from the plurality of MEMS transducers to the target workpiece.

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