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Multi-layer variable micro structure for sensing substance

  • US 8,958,070 B2
  • Filed: 12/11/2011
  • Issued: 02/17/2015
  • Est. Priority Date: 05/29/2007
  • Status: Expired due to Fees
First Claim
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1. An optical sensor, comprising:

  • a substrate having an upper surface;

    a plurality of protrusions on the substrate, wherein each of the plurality of protrusions is defined by a base at the upper surface of the substrate and by one or more sloped surfaces oriented at oblique angles relative to the upper surface; and

    two or more structural layers on the sloped surfaces, wherein the two or more structural layers comprise two non-adjacent layers having substantially a same material composition, wherein the surfaces of the two or more structural layers are configured to adsorb molecules of a chemical or biological substance.

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