Vacuum valve

• US 8,960,641 B2
• Filed: 11/14/2012
• Issued: 02/24/2015
• Est. Priority Date: 11/14/2012
• Status: Active Grant

• Current Assignee: VAT Holding AG (VAT Group AG)
• Original Assignee: VAT Holding AG (VAT Group AG)
• Inventors: Blecha, Thomas
• Primary Examiner(s): Bastianelli, John
• Application Number:
  US13/676,523
• Publication Number:
  US 20140131603A1
• Time in Patent Office: 832 Days
• Field of Search: 251/158, 251/193, 251/195, 251/215, 251/229, 251/284
• US Class Current: 251/158
• CPC Class Codes: F16K 3/18 by movement of the closure members
• CPC Class Codes: F16K 3/188 by means of hydraulic forces
• CPC Class Codes: F16K 51/02 specially adapted for high-vacuum installations

Abstract

A vacuum valve having a valve rod (11) which has a longitudinal axis (20) and which carries at least one closing member (9, 10) for closing at least one valve orifice (2, 3) and which can be displaced by a longitudinal drive (18), in a longitudinal direction (21) lying parallel to the longitudinal axis (20) of the valve rod (11), from an initial position, in which the vacuum valve is open, into an intermediate position and can be displaced by a transverse drive (19) from the intermediate position to at least one end position in which the vacuum valve is closed. A transmission piece (23) which is guided displaceably in the longitudinal direction (21) by at least one guide part (24) is secured to the valve rod (11). At least one transverse drive part (26) of the transverse drive (19) engages on the guide part (24), the guide part (24) being displaceable in the transverse direction (22) by the transverse drive (19) via the at least one transverse drive part (26), and the guide part (24), during its displacement in the transverse direction (22), taking along the transmission piece (23).

Claims

1. A vacuum valve with a valve rod (11) which has a longitudinal axis (20) and which carries at least one closing member (9, 10) for closing at least one valve orifice (2, 3) and which can be displaced by a longitudinal drive (18), in a longitudinal direction (21) lying parallel to the longitudinal axis (20) of the valve rod (11), from an initial position, in which the vacuum valve is open, into an intermediate position, and can be displaced by a transverse drive (19) from the intermediate position to at least one end position in which the vacuum valve is closed, wherein a transmission piece (23) which is guided displaceably in the longitudinal direction (21) by at least one guide part (24) is secured to the valve rod (11), and wherein at least one transverse drive part (26) of the transverse drive (19) engages on the guide part (24), the guide part (24) being displaceable in the transverse direction (22) by the transverse drive (19) via the at least one transverse drive part (26), and the guide part (24), during its displacement in the transverse direction (22), carrying along the transmission piece (23).

2. The vacuum valve as claimed in claim 1, wherein the at least one guide part (24), on which in each case the at least one transverse drive part (26) engages, is arranged on each of two sides of the valve rod (11) with respect to a direction lying at right angles to the longitudinal direction (21) and at right angles to the transverse direction (22).

3. The vacuum valve as claimed in claim 1 or 2, wherein the transverse drive part (26) is a piston rod connected to a piston (27) of the transverse drive (19).

4. The vacuum valve as claimed in one of claims 1 to 3, wherein the at least one guide part (24) is designed in the form of a rod.

5. The vacuum valve as claimed in one of claims 2 to 4, wherein two of the guide parts (24), which are spaced apart from one another in the transverse direction (22) and on which in each case at least one of the transverse drive parts (26) engages, are arranged on each of the two sides of the valve rod (11) with respect to the direction lying at right angles to the longitudinal direction (21) and at right angles to the transverse direction (22).

6. The vacuum valve as claimed in one of claims 1 to 5, wherein the valve rod (11) carries a first and a second closing member (9, 10), and, in a first end position of the valve rod (11), the first closing member (9) is pressed onto a first valve seat (6) which surrounds a first valve orifice (2), and, in a second end position of the valve rod (11), the second closing member (10) is pressed onto a second valve seat (7) which surrounds a second valve orifice (3).

7. The vacuum valve as claimed in one of claims 1 to 6, wherein, to adjust the transmission piece (23) in the longitudinal direction (21), at least one longitudinal drive part (32) of the longitudinal drive (18) is connected to the transmission piece (23).

8. The vacuum valve as claimed in claim 7, wherein the at least one longitudinal drive part (32) is connected to the transmission piece (23) displaceably in the transverse direction (22).

9. The vacuum valve as claimed in claim 7 or 8, wherein the at least one longitudinal drive part (32) is a piston rod connected to a piston (33) of the longitudinal drive (18).

10. The vacuum valve as claimed in one of claims 1 to 9, wherein the vacuum valve has a valve housing (1), inside which the at least one closing member (9, 10) is arranged.

11. The vacuum valve as claimed in one of claims 1 to 10, wherein the transmission piece (23) is arranged in an inner space of a transverse drive housing (29, 30) nondisplaceable in the longitudinal direction (21) and transverse direction (22).

12. The vacuum valve as claimed in claim 11, wherein the at least one guide part (24) is guided displaceably in the transverse direction (22) with respect to the transverse drive housing (29, 30) and is held nondisplaceably in the longitudinal direction (21).

13. The vacuum valve as claimed in one of claims 1 to 12, wherein the transverse drive (19) has at least one spring element (46), by which the valve rod (11), when it is in an end position or in one of its end positions, is prestressed in a direction of the intermediate position.

14. The vacuum valve as claimed in one of claims 1 to 13, wherein, in the end position or the respective end position of the valve rod (11), a portion of the valve rod (11), which portion extends from a region of connection to the transmission piece (23) as far as one end, remote from the at least one closing member (9, 10) of the valve rod (11), is supported on a transverse stop or a respective transverse stop (42, 43).